Main Body/Related Components: Main Body, Structure: Fixed, Orifice Format: Multi-Orifice, Operating Environment: Standard, Nominal Mounting Screw (M): 25, Body Material: [Steel] Rolled Steel, Maximum Absorbed Energy(J): 19.6, Stroke(mm): 8, Thread Nominal(mm): M25, Maximum Collision Velocity(m/s): 3, Overall length(mm): 52, Max.

Main Body/Related Components: Main Body, Structure: Fixed, Orifice Format: Multi-Orifice, Operating Environment: Standard, Nominal Mounting Screw (M): 25, Body Material: [Steel] Rolled Steel, Maximum Absorbed Energy(J): 19.6, Stroke(mm): 8, Thread Nominal(mm): M25, Maximum Collision Velocity(m/s): 3, Overall length(mm): 52, Max.

Main Body/Related Components: Main Body, Structure: Fixed, Orifice Format: Multi-Orifice, Operating Environment: Standard, Nominal Mounting Screw (M): 25, Body Material: [Steel] Rolled Steel, Maximum Absorbed Energy(J): 19.6, Stroke(mm): 8, Thread Nominal(mm): M25, Maximum Collision Velocity(m/s): 3, Overall length(mm): 52, Max.

Main Body/Related Components: Main Body, Structure: Fixed, Orifice Format: Multi-Orifice, Operating Environment: Standard, Nominal Mounting Screw (M): 25, Body Material: [Steel] Rolled Steel, Maximum Absorbed Energy(J): 19.6, Stroke(mm): 8, Thread Nominal(mm): M25, Maximum Collision Velocity(m/s): 3, Overall length(mm): 52, Max.

Main Body/Related Components: Main Body, Structure: Fixed, Orifice Format: Multi-Orifice, Operating Environment: Standard, Nominal Mounting Screw (M): 25, Body Material: [Steel] Rolled Steel, Maximum Absorbed Energy(J): 19.6, Stroke(mm): 8, Thread Nominal(mm): M25, Maximum Collision Velocity(m/s): 3, Overall length(mm): 52, Max.

Main Body/Related Components: Main Body, Structure: Fixed, Orifice Format: Multi-Orifice, Operating Environment: Standard, Nominal Mounting Screw (M): 25, Body Material: [Steel] Rolled Steel, Maximum Absorbed Energy(J): 19.6, Stroke(mm): 8, Thread Nominal(mm): M25, Maximum Collision Velocity(m/s): 3, Overall length(mm): 52, Max.

Main Body/Related Components: Main Body, Structure: Fixed, Orifice Format: Multi-Orifice, Operating Environment: Standard, Nominal Mounting Screw (M): 25, Body Material: [Steel] Rolled Steel, Maximum Absorbed Energy(J): 19.6, Stroke(mm): 8, Thread Nominal(mm): M25, Maximum Collision Velocity(m/s): 3, Overall length(mm): 52, Max.

XLA Series

H 4 S y m b o l Initial power/ Power 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 consumption (W) Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

XLA- ∗ -F7NJ ∗ - ∗ Series

H 4 S y m b o l Initial power/ Power consumption (W) 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

XLF Series

H 4 S y m b o l Initial power/ Power consumption (W) 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

High Vacuum L Type Valve

N B T Port 3(R) A G A Unit: mm Model A B C Fn Fd G J XLAV-16-2 40 108 38 30 17 41 XLAV-25-2 50 121 48 40 26 46 XLAV-40-2 65 171 66 55 41 54.5 XLAV-50-2 70 185 79 75 52 61 XLAV-63-2 88 212 100 87 95 70 80.5 XLAV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLAV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLAV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLAV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLAV-50-2 38.2 10.2 3.6 3.6

XLG Series

H 4 S y m b o l Initial power/ Power consumption (W) 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

70pvvna

H (Conduit terminal: T) VXA I (DIN terminal: D) VN Main port Rc A H I J K L M R B F G N S C P T D Q U E Model LVC VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 63 52 2.3 42 26 25 28 4.5 34 14 72.5 80.5 74.5 79.5 82.5 124 125.5 142.5 24.3 55 LVA 60.5 73 1 80 90 84 100 92 108 62 72 2.3 2.3 50 60 31 36 30 35 35 40 5.5 6.5 43 49 17.5 20 83.5 89.5 88.5 94.5 91.5 97.5 135.5 151.5 137 153 154

NARM Series

56) (16) (9) (18) (19) (52) (9) (11.5) (4.8) NARM2000 .18 1.36 1.69 1.10 1.06 2.76 .79 .45 .94 1.10 2.60 .45 .65 .19 (4.5) (34.5) (43) (28) (27) (70) (20) (11.5) (24) (28) (66) (11.5) (16.5) (4.8) Dimensions by number of stations Model Symbol A C E F G H J K M P NARM1000 L1 1.42 2.17 2.91 3.66 4.41 5.16 5.91 6.65 7.40 8.15 (36) (55) (74) (93) (112) (131) (150) (169) (188) (207) L2 1.06 1.81

Series VS

M H SIZE 2 1/2 SIZE 3 3/4 2 PORTS EA, EB PORTS N N ALL DIMENSIONS ARE IN MILLIMETERS R S T EA EB P SIZE 2 3/8, 1/2, 3/4 SIZE 3 1/2, 3/4, 1 P PORT Q P O * 3/8 14.5 1/2 16 3/4 18.5 A B C D E F G H I J 29 8.5 ** 22 * 28 48.5 36 32.5 52 32.5 47.5 SIZE 2 SIZE 3 22 27 47 45 40 65 40 71 SIZE 3 SIZE 2 K L M N O P Q R S 41 39 T 57 65 19 17.5 15.5 27 187.5 174.5 58 19 14 26 19 40 234 221 76 27 12 Series

Electric Actuator/Slider Type Motor Parallel Type Series LEFS LEFS16, 25, 32, 40 Step Motor (Servo/24 VDC) Servo Motor (24 VDC) ®

Only 1.5 m cables usable with open collector. 1 For details about controllers/driver and compatible motors, refer to the compatible controllers/driver below. 2 Only available for the motor type Step motor.

Electric Gripper 2-Finger Type LEHZ10, 16, 20, 25, 32, 40 Series LEHZ ® Step Motor (Servo/24 VDC)

Only 1.5 m cables usable with open collector.

Step Motor (Servo/24 VDC) Electric Actuator Miniature Rod Type LEPY Series LEPY6, 10

Only 1.5 m cables usable with open collector. 3 For the LECPMJ, only Nil, S and T are selectable since I/O cable is not included.

How to Order LER10, 30, 50 Series LER Step Motor (Servo/24 VDC) Electric Rotary Table ®

Entry on the left side i Controller/Driver type1 o I/O cable length [m]1 L Nil 6N 6P 1N 1P AN AP Nil 1 3 5 Without cable 1.5 32 Without controller/driver LECP6 (Step data input type) NPN PNP NPN PNP NPN PNP 52 LECP1 (Programless type) LECPA (Pulse input type) 1 When Without controller/driver is selected for controller/driver types, I/O cable cannot be selected.

High Power Cylinder Series RHC

Load voltage Lead wire length (m) Auto switch model DC AC Indicator light Special function Wiring (output) Electrical entry Applicable loads Type Reed switch Solid state switch 0.5 (Nil) 3 (L) 5 (Z) None (N) Refer to Page 2 for part numbers of air cylinder mounting brackets other than the basic type. 3 wire (NPN equiv.)