HEC-OM-S008

. 5-5 5.6 Function codes . 5-7 5.7 LRC . 5-7 5.8 Explanation of function codes . 5-8 5.9 Negative response . 5-12 5.10 Register Map . 5-13 5.11 Communication Format and Examples of Answers from Thermo-con . 5-16 6 Troubleshooting . 6-1 Preparation for Communication 1 Preparation for Communication Make preparation for using communication facility as follows. 1) Turn off the power switch

VG342 Series

(Refer to Figure-1.) 4) Remove the cable gland (4) and plain washer (5) and rubber seal (6). 2. Wiring 1) Pass them through the cable (7) in the order of cable ground (4), washer (5), rubber seal (6), and then insert into the housing (2). 2) From the terminal block (3), loosen the screw (11), then pass the lead wire (10) through, then again tighten the screw (11).

1

Normal Close High Vacuum Solenoid Valve *1 RoHS Minimum operating pressure *1 Excluding grommet/AC *1 OUT side 1x10 6 Pa(abs) *1 Leakage Internal External 1.3x10 9 Pam3/s 1.3x10 11 Pam3/s Power consumption Fluid temperature 5 to 60C Size XSA [W] Previous model [W] 25% reduction Max. Max.

Process Pump

Refer to Best Pneumatics No. 5 for further details.

Sine Rodless Cylinder Series REBR Direct Mount Type

5 5 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 7 8 9 10 11 7 8 9 10 1112 13 14 15 Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) 100 REBR32 REBR25 10 REBR15 1 0.1 100 200 300 400 600 500 Maximum speed U (mm/s) 62 Series REBR Model Selection

Bernoulli Gripper

or less 1.2 or more 11 or less 1.2 or more 11 or less ZNC80 16.8 or less 2.7 or more 15 or less 16.2 or less 4.5 or more 18 ZNC Series Specific Product Precautions 5 Be sure to read this before handling the products.

MVGQ

Note 2) For the specifying way of ordering numbers for the solenoid valve with adapter assembly, refer to page 10-16-4. 10-16-19 20 Series MVGQ Proper Auto Switch Mounting Position (Detection at stroke end) Operating Range Bore size (mm) Auto switch model 16 100 12 20 25 32 40 50 63 80 D-Z7/Z8 8.5 14 7.5 9.5 9.5 11 11 11 13 13 A B D-Y59/Y69/Y7P/Y7PV D-Y7W/Y7WV 6 11.5 5 6 6.5 8.5 8.5 9 10

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

depth 22 Up to 300 50 32 25 37 3 40 40 22 71 20 110 20 16 10 M26 x 1.5 M12 x 1.75 depth 22 Up to 300 60 41 30 37 3 40 50 26 (mm) Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 NA P S TA TB ZZ 11 11 77 1/8 24 114 Up to 200 11 11 77 1/8 29 119 Up to 300 11 11 79 1/8 35.5 121 Up to 300 12 12 87 1/8 44 139 Up to 300 13 13 102 1/4 55 162 Up to 300 13 13 102 1/4 69 162 Up to 300 122

Specification: Standard Type (Not Clean Room), Bore Size: 4.5 mm, Symmetric Type: L (Symmetric), Stroke: 10mm, Adjuster: C (Metal Stopper Both Ends)

Specification: Standard Type (Not Clean Room), Bore Size: 4.5 mm, Symmetric Type: L (Symmetric), Stroke: 10mm, Adjuster: C (Metal Stopper Both Ends), Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Auto Switch), Number: S (1 pc.)

Specification: Standard Type (Not Clean Room), Bore Size: 4.5 mm, Symmetric Type: L (Symmetric), Stroke: 5mm, Adjuster: C (Metal Stopper Both Ends), Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Auto Switch), Number: S (1 pc.)

Specification: Standard Type (Not Clean Room), Bore Size: 4.5 mm, Symmetric Type: L (Symmetric), Stroke: 5mm, Adjuster: CT (Metal Stopper Retraction End), Function: P (Axial Piping Type)

Specification: Standard Type (Not Clean Room), Bore Size: 4.5 mm, Symmetric Type: L (Symmetric), Stroke: 10mm, Adjuster: C (Metal Stopper Both Ends), Function: P (Axial Piping Type)

Specification: Standard Type (Not Clean Room), Bore Size: 4.5 mm, Symmetric Type: L (Symmetric), Stroke: 10mm, Adjuster: CS (Metal Stopper Extension End), Function: P (Axial Piping Type)

Specification: Standard Type (Not Clean Room), Bore Size: 4.5 mm, Symmetric Type: L (Symmetric), Stroke: 10mm, Adjuster: CT (Metal Stopper Retraction End)

Specification: Standard Type (Not Clean Room), Bore Size: 4.5 mm, Symmetric Type: L (Symmetric), Stroke: 10mm, Adjuster: w/o Adjuster, Function: P (Axial Piping Type)

Specification: Standard Type (Not Clean Room), Bore Size: 4.5 mm, Symmetric Type: L (Symmetric), Stroke: 5mm, Adjuster: CS (Metal Stopper Extension End), Function: P (Axial Piping Type)

Specification: Standard Type (Not Clean Room), Bore Size: 4.5 mm, Symmetric Type: L (Symmetric), Stroke: 5mm, Adjuster: C (Metal Stopper Both Ends), Function: w/o Axial Piping, Switch Rail: N (w/o Magnet & Switch Rail)

Specification: Standard Type (Not Clean Room), Bore Size: 4.5 mm, Symmetric Type: L (Symmetric), Stroke: 10mm, Adjuster: C (Metal Stopper Both Ends), Function: P (Axial Piping Type), Switch Rail: N (w/o Magnet & Switch Rail)

Specification: Standard Type (Not Clean Room), Bore Size: 4.5 mm, Symmetric Type: L (Symmetric), Stroke: 10mm, Adjuster: CS (Metal Stopper Extension End), Function: P (Axial Piping Type), Switch Rail: N (w/o Magnet & Switch Rail)