SMC Corporation of America
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(If an operation is not performed for 30 seconds during input or change of the security code, it will return to measurement mode.) -44NO.ZK2-OM00501-B How to stop energy-saving control function B If a large amount of leakage is generated at the work piece adsorption surface, energy-saving control frequently occurs (the valve is turned ON and OFF when the vacuum is generated / stopped).

P_1 = A-(A-B)/4 A = Maximum pressure value H_1 = | (A-B)/2| B = Minimum pressure value To clear the stored auto-preset settings, press the and buttons simultaneously for 1 second or longer. 28 - NO. ZQ-OM01501 [F 6] Fine adjustment of display value This function is used to manually perform fine adjustment of the displayed pressure. It is adjustable within the range 5% R.D.

/4 A= H_1=|(A-B)/2| B= 1 28 - [F 6] 5R.D. <> [F 6] [FSC] 1 [F 6] 29 - [F11] <> [F11] , 1000 100 [F11] [MPa]/[kPa]/[kgf/cm 2]/[bar]/[psi]/[inHg] 2]/[bar]/[psi]/[inHg]:) ([kgf/cm 21 -[F 0] 30 - [F80] 30 ,OFF <> [F80] 1 2 2 1 [F80] 1,OFF 1 2,30 () 2 OFF ON 31 - [F81] , <> [F81] [F81] , 000 40 32 - [F90] <> [F90] [on] [oFF] 1 [oFF]() 2 [F90] 1 34 -""

CAT.ES90-11 B Filter for Cleaning Solvent Quick Change Filter Series FQ1 No tools required. Takes only 60 seconds for element replacement. Element replacement in only 60 seconds Replacement in less than two minutes is possible including removal of liquid.

Panel mount adapter Panel (ZS-26-B) Waterproof seal (accessory) 328

P_1 = A-(A-B)/4 A = Maximum pressure value H_1 = | (A-B)/2| B = Minimum pressure value To clear the stored auto-preset settings, press the and buttons simultaneously for 1 second or longer. -29No.TQ0010298-OM003-B [F 6] Fine adjustment of display value This function is used to manually perform fine adjustment of the displayed pressure. It is adjustable within the range 5% R.D.

D. 9 to 11:P368010-27 View A 100 46 30 2 14 IP8000-01 (With terminal box) OUT2.Rc1/4 With plug 110 38 192 218 23.5 110 40 35 OUT1.Rc1/4 SUP.Rc1/4 2 x M8 x 1.25 depth12 (Female thread for side mounting) 43 23.5 58 38 39 11 9 39 OUT2 MPa 42 162 117 16 6.1 MPa 20 50 65 A 122 ELECTORO PNEUMATIC IP8000 P O S I T I O N E R 22.5 125 At accessory E: 110 At accessory F: 110 { } 5 150 125 12 168 8

The set values for OUT1 are displayed in auto-preset mode as follows: Normal output Reversed output P_1 = A-(A-B)/4 n_1 = B+(A-B)/4 A = Max. pressure H_1 = (A-B)/2 H_1 = (A-B)/2 B = Min. pressure The set values of OUT2 become as follows "_", i.e. "P_2", "n_2", "H_2".

A void A void A void A void A void A B A B A B A B A B A A A B A B A B A A A A 6 7 8 9 10 11 12 13 14 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 15 0 0 1 2 3 4 5 SC type OMRON SYSBUS wire system compatible SD type Sharp Satellite I/O link system compatible Terminal block (LED) nomenclature ADDRESS NO. STATION NO.

lines in clean room environments TPH 06 04 B 20 Tube O.D.

10 to 30 5 to 30 20 to 30 10 to 30 20 to 30 10 to 30 Max. acceleration/deceleration[mm/s2] 5000 Positioning repeatability [mm] 0.01 Lost motion[mm] *4 0.1 or less Screw lead[mm] 10 5 2.5 12 6 16 8 Impact/Vibration resistance[m/s2] *5 50/20 Actuation type Ball screw (In-line) Ball screw + Belt (parallel) Guide type Linear guide (Circulating type) Operating temperature range[] 5 to 40 Operating

113.2 137.2 162.2 25 32 40 Mounting position Series ML1C 177.5 A 128.5 152.5 B 123.5 147.5 172.5 4.7-11

A B PF3W504 0 4 PF3W520 0 16 PF3W540 0 40 PF3W511 0 100 Display A Set A and B to the values shown in the table on the left.

5, 10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 1/4" 6 12 3/8" 10 20 5/8" 15 40 3/4" 20 60 1" 25 80 32 1-1/4" 80 1-1/2" 40 80 2" 50 80 2-1/2" 63 80 Note) The longer the stroke, the larger the amount of deflection in a cylinder tube.

HEC006 HEC012 HEC006 HEC012 Model No. label Model No. label Fig.4-1 Position of Model No. label Fig.4-2 Legend of Model No. label 4-2 Unit Overview 4.4 Appearance 4.4.1 HEC006 (C) 4xG D E A B F A B C D E F G HEC006 240 390 497 214 458 482 7 Unit: mm Fig.4-3 Outside drawings of HEC006 4-3 Unit Overview 4.4.2 HEC012 (C) 4xG D E A B F A B C D E F G HEC012 300 448 565 190 526 550 7 Unit: mm Fig

Poppet valve assembly Release flow adjusting needle assembly Sound absorbing material Supply adapter Round head combination screw Supply pilot valve Release valve Pressure sensor O-ring Filter element 3 4 5 6 7 ZR ZA1-SAE2 XT631-ZA1-KA2 M2 x 12 VQ110VQ110PSE54-R04 3.0 x 1.0 ZA1-FE-30 ZM 8 9 10 11 ZMA ZQ q w e t y u !0 !1 !

(A) + 14 (A) + PIN 2 PIN 2 12 (B) + 12 (B) + PIN 2 PIN 2 PIN 3 PIN 3 COMMON COMMON PIN 3 PIN 3 PIN 3 PIN 3 COMMON COMMON COMMON COMMON COMMON COMMON PIN 3 PIN 3 PIN 4 PIN 4 14 (A) + 14 (A) + 12 (B) + 12 (B) + PIN 4 PIN 4 12 (B) + 12 (B) + PIN 4 PIN 4 14 (A) + 14 (A) + PIN 4 PIN 4 NOT USED NOT USED X17 X17 PIN 1 PIN 1 X6 X6 PIN 1 PIN 1 NOT USED NOT USED X53 X53 14 (A) + 14 (A) + PIN 1 PIN

ARG20(K) ARG30(K) ARG40(K) ARG20(K)/30(K)/40(K) Hook spanner Nominal: ARG20(K) ARG30(K) ARG40(K) When mounting the bracket for ARG20(K)/30(K)/40(K), ensure that the roulette faces of the set nut and the bracket are mated appropriatelly.

ARG20(K) ARG30(K) ARG40(K) ARG20(K)/30(K)/40(K) Hook spanner Nominal: ARG20(K) ARG30(K) ARG40(K) When mounting the bracket for ARG20(K)/30(K)/40(K), ensure that the roulette faces of the set nut and the bracket are mated appropriatelly.

E B ,rt1 0f $ [,r PEEAA P B EAPE +q--dz 3 position Closed centr/Exhaust centet/Presute cenler .1&t*080 PEEA A P B EBPE Main Parts No.