EX500-GPR1A.eng

Confirm that the connector portion does not move. 14.9 Gray: Ground Black: DC24V 10% ( power supply for input and control ) Blue: 0V ( for input and control ) White: DC24V+10%/-5% ( for solenoid valves/output ) 18 48 34 Straight connector Type Angle connector Type EX500-AP -S EX500-AP -A 6 30 5 50 31.3 28.3 6 Socket Connector Pin Layout 4 3 1 5 30 5 50 2 B. Single power supply system A.

Digital Flow Switch

to 500 L/min 10 to 1000 L/min 20 to 2000 L/min Instantaneous flow 5 to 525 L/min 10 to 1050 L/min 20 to 2100 L/min Set flow rate range Accumulated flow 0 to 999,999,990 L Instantaneous flow 1 L/min Flow Minimum setting unit Accumulated flow 10 L Accumulated volume per pulse (Pulse width = 50 msec.) 1 L/pulse 10 L/pulse Accumulated value hold 1 Every 2 minutes or every 5 minutes Rated pressure

155

SGC(A)2lll-05l10, 15 Watchmakers screwdriver 5 6 SGC(A)2lll-10l10, 15 Slotted set screw 5 7 SGC(A)2lll-16l10, 15 5 4 SGC(A)3lll-05l20 4 B A 6 When tightening an auto switch mounting screw, use a watchmakers screwdriver with a handle of approximately 5 to 6 mm in diameter.

Common Supply Regulator

How to Order 8 5. Options 9 6. Structural Drawing and Replacement Parts 10 7. Assembly of Optional Parts 11 8. Operation and Adjustment 12-13 9. Trouble Shooting 14-15 10. How to Replace the Components 16-21 10-1. Diaphragm Assembly Replacement 16 10-2. Valve Guide Assembly and Valve Assembly Replacement 17 10-3. Square Embedded Type Pressure Gauge Replacement 18 10-4.

Compact Electric Actuator Series LG1

FG 14 Photomicrosensor Series LG1H Photomicrosensor for Home Position Ratings Power supply voltage 5 to 24VAC 10%, ripple (p-p)10% or less Current consumption 35mA or less 5 to 24VAC, Load current (1c)100mA, Residual voltage 0.8Vor less Control output Load current (1c) 40mA, Residual voltage 0.4V or less Ambient operating temperature Operation: -25 to 55C (Storage: -30 to 80C) Operation:

Flow Sensor Series PFMV

2 x M5 x 0.8 15.2 18 15 7.1 3 2 x 3.4 14 Both-side bracket One-side bracket 10 x n pcs. + 24 (n = 1 to 5) (25.7) 10 x n pcs. + 14 (n = 1 to 5) 12 10 10 2 x 4.5 5 2 x 4.5 PFM PFMV PF2A PF2W 24 34 34 24 PF2D IF L-type bracket (Tapped finish) L-type bracket (Tapped finish) 20 20 9.1 9.1 2 1 1 2 L-type bracket (Through hole) The dimensions show the PFMV5-1.

Low-Speed Rotary Actuator

Load Rotary actuator Flexible coupling Bearing Fig.4 -24- Unit used as flange mount Figure 5 and Table 5 show locations and sizes of piping ports. Ports can be selected from two sides. Plug the ports that are not used. Table 5 (mm) Size L Bolt 10 13 M 4 15 16 M 4 20 22.5 M 6 30 24.5 M 8 Bolt 40 28.5 M 8 Rotating range examples Fig.5 Fig.6 shows piping ports of the rotary actuator.

Digital Flow Switch (Remote type monitor unit)

Accuracy 5 5%F.S. max.

VP300/500/700

Y: 4.5 to 7 D: 6 to 8 78.3 2(A) 2(A) 63 19 (A port) Rc1/2 Stations L L1 L2 Formula L1 = 41 x n + 33 L2 = 41 x n + 17 9 402 386 10 443 427 2 115 99 3 156 140 4 197 181 5 238 222 6 279 263 7 320 304 8 361 345 : With light/surge voltage suppressor ( ): Dimensions for external pilot 4-8-15

Series CJ5-S ø10, ø16 Stainless Steel Cylinder

Applicable bore size (mm) SNJ-016SUS d A1 L L1 NDd9 MM B C H B C d H 0.030 0.060 0.030 0.060 10 10 10 14 7 3.3 8 16.2 4 8.1 3.2 15.2 21 M10 x 1.0 M4 x 0.7 M4 x 0.7 16 16 16 Y-J016SUS 17 8 NTJ-015SUS 5 11 19.6 4 9.2 4 SNKJ-016SUS 16.6 21 M12 x 1.0 M5 x 0.8 M5 x 0.8 NX R1 NDH10 U1 Part no. + 0.048 0 + 0.048 0 Y-J010SUS 3.3 3.2 8 10 Y-J016SUS 5 6.5 12 10 Rod End Cap CJ5 CG5 T-bracket Flat type

MGP

P.336 P.1785 (/) (/) 19 18-2. 12 16 20 25 32 40 50 63 80 100 1 2 1 2 1 15 2 15 1 15 2 15 1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 2 10 15 5 10 5 10 10 5 10 D-A9 D-A9V D-M9V D-M9 10 10 10 10 D-M9W D-M9WV D-M9AVL 15 10 D-M9AL 15 10 5 D-Z7 D-Z80 D-Y59 D-Y7P D-Y69 D-Y7PV D-Y7W D-Y7WV 15 10 10 15 10 5 5 5 10 15 15 10 15 D-Y7BAL 10 20 75 18-3.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01-06-X214 Operation 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Caution

Digital Flow Switch

If an instantaneous flow of 10 L/min continues for 5 minutes, the accumulated flow will be 5 x 10 = 50 L. Accumulated flow external reset A function to reset the accumulated flow to "0" when an external signal is input. A type of output where a pulse is generated every time a predefined accumulated flow passes.

3-Position Rotary Table

10 1.2 12 76 34 8.1 10 50.4 60h9 61h9 28H9 9 17H9 10 6 2.5 6.5 17 8.6 14 8.5 8 34.7 70 17 18.5 10 1.2 12 84 37 10.5 10.5 53.5 65h9 67h9 32H9 12 22H9 10 4.5 3 6.5 17 8.6 14 8.5 10 39.7 80 19 21 12 1.6 15.5 100 50 12.4 12.5 60.6 75h9 77h9 35H9 13 26H9 12 5 3 7.5 20 10.5 18 10.5 (mm) JC JD JJ JU JV Q S SC SD SU UU WA WB WC WD WE WF XA XB XC YA YB YC Size 10 20 30 50 M8 x 1.25 12 M5 x 0.8 M4

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Lateral 0.2 0.1 200 300 500 100 Load point distance mm LJ1H20 LJ1H30 20 10 Lateral load 100% 10 5000 Lateral load 50% 5000 2000 Horizontal load 100% 2000 Horizontal load 50% 1000 Horizontal load 100% 1000 Horizontal load 50% 500 500 Amount of deflection m Amount of deflection m 200 200 100 100 50 50 20 20 10 Lateral load 100% 10 5 Lateral load 50% 5 Horizontal empty weight deflection 2 2

HRX-OM-W069

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 CH1 abnormal low tank fluid level 1 CH1 low tank fluid level 2 CH2 Abnormal low tank fluid level 3 CH2 low tank fluid level 4 Reservation 5 Fan failure Alarm flag 1 6 Reservation 7 Reservation 8 CH1 abnormal rise of circulating fluid temperature 9

K35-OMW0031

Max speed Retract 6 PV 7 SV Less than 5% 8 Error status 5%-10% 9 Loop current 10%-30% 10 Travel distance 30%-50% 11 Rod friction count 50%-70% 12 Movement area 70%-90% 13 Cal select status 90%-95% 14 Cal Type more than 95% total *1-3-5-5 "Setting monitor" is only reading 6 5.

MK

5 !6 !7 !8 !

Dual Speed Controller with One-touch Fitting Series ASD 1

3 6 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 07, 08, 09, 10, 11 Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations ASD530F ASD630F 1500 1000 14 10,11 12 20 Flow rate (l/min (ANR)) Flow rate (l/min (ANR

Large Bore Compact Cylinder Series CQ2

(different sides, same side) 10 (0.4) 5 (0.2) 15 (0.6) 1 pc. 5 (0.2) 5 (0.2) 10 (0.4) Theoretical Output/Double Acting Type OUT IN Unit: N Operating Pressure MPa (psi) Bore size (mm) Operating direction 0.7 (101.5) 0.6 (87) 0.5 (72.5) 0.4 (58) 0.3 (43.5) 0.2 (29) IN 16933 14514 12095 9676 7257 4838 180 OUT 17812 15268 12724 10179 7634 5089 IN 21112 18096 15080 12064 9048 6032 200 OUT 21991