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/min How to find the flow rate for water 5.0 Formula based on Cv factor Q = 14.2 Cv 10.2 P l/min VCB 3 Cv = 0.35 3 4 Formula based on effective area (Smm) 1.0 Q = 0.8 S 10.2 P l/min VCB23 Cv = 0.33 VCB25 Cv = 0.65 Q: Flow rate (l/min) P:Pressure differential (P P) P: Upstream pressure (MPa) P: Downstream pressure (MPa) S: Effective area (mm) Cv: Cv factor VCB34 Cv = 0.54 VCB24

AFF2B AFF22B AFF75A 1 8B 2 3 4B B Max. flow line 0.1 MPa 0.1 MPa 0.3 MPa Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) Max. flow line Max. flow line Air flow rate (m3/min (ANR)) Air flow rate (l /min (ANR)) Air flow rate (l /min (ANR)) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258

(ANR)) Air flow rate (l /min (ANR)) AMG550 3 4 B AMG250 1 4 B Max. flow line Pressure drop (MPa) Max. flow line Air flow rate (l /min (ANR)) Air flow rate (l /min (ANR)) AMG650 1 AMG350 3 8B B Max. flow line Pressure drop (MPa) Pressure drop (MPa) Max. flow line Air flow rate (l /min (ANR)) Air flow rate (l /min (ANR)) 14-20-4 3 Water Separator Series AMG Construction AMG150 to AMG650 AMG850

L/A indicator Table 6-2 L/A indicator L/A Meaning Green ON Connection via Ethernet to the SI Unit via BUS IN/OUT But no transmission or reception of Ethernet telegrams on BUS IN/OUT Orange ON or Connection via Ethernet to the SI Unit via BUS IN/OUT Transmission or reception of Ethernet telegrams on BUS IN/OUT Flashing Green/Orange OFF No physical connection to the port Green Flashing Received

. / . 01$ 2 0 VXR239 2 0 17-3-53 2 The VX series will be revised shortly. Series VXR21/22/23 Normally Closed (N.C.)

D 1 10 Stations Common supply and exhaust M a i n t e n a n c e a n d a d j u s t m e n t i s p o s s i b l e w i t h o u t d i s a s s e m b l y o f the manifold H O W T O O R D E R NZM V A C U U M E J E C T O R M A N I F O L D (N)ZZM B NUMBER OF STATIONS 01 ... 1 Station 02 ... 2 Stations to 10 ... 10 Stations EXHAUST PORT 04 ... 1/2 06 ... 3/4 PORT THREAD Nil ...PT* Remove (N) when ordering

Please change the parameter in the initial setting. *3 The minimum unit of the travel distance of the actuator should be 1 [m]. *4 When the motor mounting position is right side parallel (LEY*R / LEYG*R) or left side parallel (LEY*L / LEYG*L), the rotation direction selection is 0(+: Counter motors side). -31- Recommended Value of acceleration time constant of Point table No.1 [LEY] LEY25

ON OFF IN OUT R 7 Spacer L type bracket Spacer with L type bracket T type bracket Spacer with T type bracket Spacer with L type bracket Spacer with T type bracket T type bracket L type bracket L type bracket Spacer with L type bracket Applicable model T type bracket Spacer with T type bracket Applicable model Applicable model Model Y20T AV2000 B210T Y20L AV2000 AV2000 Y20 B210L Y30T AV3000

4 4 2 2 Water drop removal type Nominal filtration rating: 80 m Large flow type Nominal filtration rating: 80 m 0 0 0 100 200 300 400 500 600 800 700 900 Flow rate [L/min(ANR)] 0 100 200 300 400 500 600 800 700 900 Flow rate [L/min (ANR)] 783 AFJ20 to AFJ40 Series Construction AFJ20 AFJ30, AFJ40 OUT IN OUT IN q q r r w w (y) e (y) t e t Component Parts No.

AME150 AME450 AME650 B 1 8B 1B 1 2 0.1 MPa 0.1 MPa 0.1 MPa Max. flow line Max. flow line Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) Max. flow line Air flow rate (l /min (ANR)) Air flow rate (l /min (ANR)) Air flow rate (l /min (ANR)) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800)

/min (ANR)) Air flow rate (l /min (ANR)) AMH550 AMH250 B B 3 4 1 4 Inlet air pressure Air pressure Pressure drop (MPa) Pressure drop (MPa) Max. flow line Max. flow line Air flow rate (l /min (ANR)) Air flow rate (l /min (ANR)) AMH650 AMH350 B 1B 3 8 Inlet air pressure Air pressure Pressure drop (MPa) Pressure drop (MPa) 0.5 Max. flow line Max. flow line Air flow rate (l /min (ANR)) Air flow

L/A indicator Table 10-22 L/A indicator L/A 1/2 Meaning Green ON Connection via Ethernet to the SI Unit via Port 1/2 (XF1/2) Green OFF No connection established via Port 1/2 (XF1/2) Yellow ON Transmission or reception of Ethernet telegrams on Port 1/2 (XF1/2) Yellow OFF No transmission or reception of Ethernet telegrams on Port 1/2 (XF1/2) Orange Flash Received Node flash request : When

L/A LED Table 10-22 L/A LED L/A 1/2 SI 1/2XF1/2PROFINETEthernet SI 1/2XF1/2PROFINETEthernet SI 1/2XF1/2 SI 1/2XF1/2 * *: Link LED Act LED 10.9.1.5. FO1/2 LED Table 10-23 FO 1/2 LED FO 1/2 2dB 0dB 2dB 0dB 10.9.2. LED 2 LED UT1 UT2 UT1 UT2 IN0, IN1, , IN7 M IO (Zone M) / Z1,Z2,Z3 (Zone 1-3) / Fig. 10-4 EX245-FPS1/2/3 LED 2 10.9.2.1.

Start flag 0: no send Numerical data input 2 1: send 1 Step data No 0 to 63 Data writting 3 Operation Note) 1 1: Absolute 2: Relative 4 H 5 L Speed 2 0 to 65500 mm/s 6 3 7 2 Position 4 +/-2147483647 0.01mm 8 1 9 0 ID1 Numerical 10 H 11 L Acceleration 2 0 to 65500 mm/s2 data input 12 H 13 L Deceleration 2 0 to 65500 mm/s2 Data writting 14 Pushing force 1 0 to 30 10% 15 Trigger LV 1 0 to 30

ID 0 1 2 1 063 1ABS() 3 1 ) 2INC() 4 H 2 065500 mm/s 5 L 6 3 7 2 4 2147483647 0.01mm 8 1 9 0 ID1 10 H 2 065500 mm/s2 11 L 12 H 2 065500 mm/s2 13 L 14 1 030 10% 15 1 030 10% 16 1 0255 mm/s 17 1 030 10% 18 H 2 065500 0.01mm 19 L ID2 2039 ID1 ID3 4059 ID1 ID4 6079 ID1 ID5 8099 ID1 ID6 100119 ID1 ID7 120139 ID1 ID8 140159 ID1 ) 0 12 36 - / Bit No.

Maintenance Caution Model Connection (Flange) 2B 8B C 2B/3B/4B 500 A 330 B 300 D 1070 E 1200 F 1290 G 20 H 720 M16 X l 400 Anchor bolt M20 X l 500 AMF800 AMF900 400 550 560 745 300 300 1070 1090 1230 1320 1335 1450 24 24 q It is not possible to indicate a definite replacement interval for the element because it varies with the odor concentration of the compressed air.

Please change the parameter in the initial setting. *3 The minimum unit of the travel distance of the actuator should be 1 [m]. *4 When the motor mounting position is right side parallel (LEY*R / LEYG*R) or left side parallel (LEY*L / LEYG*L), the rotation direction selection is 0(+: Counter motors side). -28- LEY63 LEY63D Lead symbol A B C L A B C Series Lead 5(2.86) 20 10 5 20 10 5 (Including

VQZ100 ( ( ( ( ) ) ) ) 90 VQZ200/300/1000/2000/3000 VQZ200/300/1000/2000/3000 VQZ200/300/1000/2000/3000 VQZ200/300/1000/2000/3000 DC L,M L,M L,M L,M > > > > > > DIN DIN DIN DIN > > > YSYOS (YZ) ( ( ( ( ) ) ) ) 90 [ 0.1Nm ] 8 No.VQZ100V-OMT0001 VQZ Series/ / / / > > > (YZ) ) 1V (+-) () (1mm) 3.23.7mm 3 3 3 3

Panel mount adapter (Model: ZS-26-B) Panel mount adapter + Front protective cover (Model: ZS-26-01) 48 conversion adapter (Model: ZS-26-D) 2, Preparation of OUT1 device Prepare the sensor for which OUT1 is to be set. ON OFF Selection of Pressure range, Output style, Response time and Pressure setting method.