Rated Vacuum Range: -100 to 100 kPa, Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: NPT 1/8, Lead Wire: w/o Lead Wire, Bracket: Panel Mount Adapter, Operation Manual: -
Construction Standard type Double acting type N.C. type N.O. type w e q q e w q e w y t r A B A B With flow rate adjustment u Component Parts No.
Leakage voltage Particularly when using a resistor in parallel with a switching element and using a C-R element (surge voltage suppressor) to protect the switching element, take note that leakage current will flow through the resistor and C-R element, etc., creating a danger that the valve may not shut OFF.
2 Single Nil R Metal seal Double FJG Rubber seal 1 (P) 5 (R1) 3 (R2) Rated coil voltage (A) 4 (B) 2 Option 3 4 24VDC FIG 12VDC Nil None 1 (P) 5 (R1) 3 (R2) Voltage other than above (50VDC or less) Indicator light with surge voltage suppressor 9 Z A02 VS1 01 Sub-plate Thread type Size Rc Nil F T 01 02 Size 01 G Size 02 NPTF Port size Symbol A01 A02 Piping specifications Size 02 Size 01 Side-ported
Turbine oil P-32 Nippon Mitsubishi Oil Corp. Turbine oil 32/Mitsubishi turbine 32 Cosmo Oil Co.,Ltd. Cosmo turbine 32 Japan Energy Corp. Kyodo turbine 32 Tightening torque Kygnus Oil Co. Turbine Oil 32 When installing fittings, etc., follow the procedures below. M5 M5 M5 M5 Kyushu Oil Co. Stork turbine 32 Showa Shell Sekiyu K.K. Turbine 32 1)When using SMCs fitting, etc.
5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil R Metal seal Double FJG Rubber seal 1 (P) 5 (R1) 3 (R2) Rated coil voltage (A) 4 (B) 2 Option 3 4 24VDC FIG 12VDC Nil None 1 (P) 5 (R1) 3 (R2) Voltage other than above (50VDC or less) Indicator light with surge voltage suppressor 9 Z A02 VS1 01
OUT IN BUS COM A COM B COM C COM D F R P B U S O I R DIA BF SOL RUN GATEWAY UNIT EX500 SERIES 18 19 Switch setting Open the station number switch protective cover and set the switches with a sharp-pointed watchmakers screwdriver etc. NOTE 1. Be sure to turn off the power before setting the switches. 2. Be sure to set these switches before use.
5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil R Metal seal Double FJG Rubber seal 1 (P) 5 (R1) 3 (R2) Rated coil voltage (A) 4 (B) 2 Option 3 4 24VDC FIG 12VDC Nil None 1 (P) 5 (R1) 3 (R2) Voltage other than above (50VDC or less) Indicator light with surge voltage suppressor 9 Z A02 VS1 01
Supply pilot air higher than 0.25 MPa to P1 port Piping Inlet side (supply side): P port, Outlet side (exhaust side): A port Supply pilot air higher than 0.25 MPa to P1 port. PA VNH 12(P1) 12(P1) Nozzle 2(A) 1(P) PAX Nozzle 1(P) 2(A) 3(B) Stop valve Tank Coolant pump PB Tank Coolant pump For reducing load to pump, coolant liquid is returned from B port to tank each time.
GR-S-010(10g) GR-S-020(20g) 6 - R/L side parallel type LEKFS16 18 26 25 Component Parts No. Description Material Note No.
Other M5 size hole at the left side of the adapter plate is a breathing port for spool valve. Do not plug or tighten it. Rc 1 1 2, 3 4, Rc 1 1 2, 3 4, (P port) (A port) Rc 1 1 2, 3 4, (R port) 1808
IDFA6E-20 12 2 12-3 Installation of heavy duty auto drain IDX-OM-W089 Air Dryer 13 Specification for Option R 13 Specification for Option R Option R installs a Ground Fault Circuit Interrupter (GFCI), it will shut off the power supply in case the product should have over current or current leakage.
SZ Type of actuation 2 position single 3 position pressure center Port size [4(A), 2(B) port] VP4 (A) 4 (B) 2 (A) 4 (B) 2 Note 1) 5 VQZ3000 VQZ2000 VQZ1000 Symbol Port size 1 C3 C4 C6 C8 C10 M5 02 3.2 one-touch fitting 4 one-touch fitting 6 one-touch fitting 8 one-touch fitting 10 one-touch fitting M5 thread Rc 1/4 1 (P) 3 (R2) 5 (R1) 5 (R1) 1 (P) 3 (R2) S0700 2 position double 3 port for
-2SY3000-OMY0001 / 1 1.5 *3) 3)1 1 () -3SY3000-OMY0001 SY Series 5 / / () ( ) () 1 DC DC N.O.( 33 AB , 3 , , () 3 EXH 0.1 2 () () C-R ( ) C-R 3 3 1) 2 , 4 No.SY3000V-OMY0001 SY Series 5 / / 2) ,1V & -10 ,1 1 3 1) M5 () 1/61/4 11.5Nm ) 2)Rc N m Rc 1/8 35 Rc 1/4 812 Rc 3/8 1416 5 No.SY3000V-OMY0001 SY Series 5 / DC () m [] ()ISO VG32 (MSDS) IP65 IP67(IEC60529
() C-R DC 3% AC 20% ( ) () () 3 3 EXH (VVFS5000-R-04-1,2) ( ) () 3 4 No.VFR5000-OMN0001 VFR5000 Series 5 / (SSR )AC 1) (C-R ) OFF 2)() 1 -10 1 1) M5 1/6~1/4 1~1.5Nm ) ( ) 2 Rc Nm Rc 1/8 7~9 Rc 3/8 22~24 Rc 1/2 28~30 Rc 3/4 28~30 5 No.VFR5000-OMN0001 VFR5000 Series 5 / ( ) 5m 1) 2)1 ()ISO VG32 (MSDS) 3) 2 ()ISO VG32 \ 6 No.VFR5000-OMN0001 VFR5000 Series 5 / ( ) 3 30 (
Construction (2) VHK2A(R) VHK3A(R) (9) (4) (1) (5) (3) (11) (10) (7) (8) (6) No.
2) Option R is not available with the MXS6 series.
Surge Suppressor Nil No light or surge suppressor R With surge suppressor (non-polar) Rated Voltage U With light and surge suppressor (non-polar) 5 24VDC S With surge suppressor 6 12VDC Z With light and surge suppressor V 6VDC U type only available for 12 and 24VDC S 5VDC R 3VDC Electrical Entry G Grommet, 300 mm lead wire H Grommet, 600 mm lead wire L L type connector w/ plug and 300 mm
Note4) Two O-rings (8) are require per valve. 6 XL-OMP0001 Additional symbols of the seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA ULTIC ARMOR R Combination No. 2101-80. 70W 4079 SS592 SS630 SSE38 1232-70. 3310-75.
Note2) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of Dupont Co.,Ltd. Chemraz R is a registered trademark of Greene, Tweed & Co., ULTIC ARMOR R is a registered trademark of NIPPON VALQUA INDUSTRIES, LTD. Note3) MITSUBISHI CABLE INDUSTRIES, LTD. 6 XL-OMP0003-A 3.