VZ Edition B Safety Instructions Be sure to read the Handling Precautions for SMC Products (M-E03-3) and Operation Manual before use.
OUT Standard specification Option Note) Water (Standard, up to 40C) Air (Standard, Dry) Turbine oil Vacuum (up to 1.3 x102 Pa) Carbon dioxide (CO2), Nitrogen gas (N2) Vacuum (up to 1.3 x101 Pa) (V, M) Non-leak (106 Pa m3/s or less) (V, M) IN N.O.
8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 2 M5 M5 AMR 1 4 2 1 (5) (5) Weight (kg) 0.15 0.18 0.2 0.3 0.5 1.4 2 4 ITV Note 1) No condensation.
NO m: Refer to "Operating Conditions (Allowable eccentric load)" on page 12. m < Wo NO mo Wo m Wo mo < Wo YES mo Wo YES m Wo Model selected Allowable rotational torque Non-rotating accuracy T T (Nm) Non-rotating accuracy Bore size (mm) Stroke (mm) Bore size (mm) 40 0.08 100 75 50 30 63 40 0.06 3 4 5 7 100 63 0.05 10 12 16 22 100 13 17 22 30 Note) The value given for the non-rotating
Altitude [m] 1. Max. ambient 2. Cooling capacity temp.
Example) Boll M5 x 65L frzr,r 4 bolts Diagram 1 D agram 2 Lever (with shock absober) Roller/round bar/non-rotaling Mounling bolt 50 40 30 25 20 15 ' 2 0 E 6 6 B r n 10 5 1 0 2 0 Load speed v (m/m n) Lateral load and operating pressure at Flush piping thoroughly beiore connection in orderlo preventdustorchipsf rom entedng the cylinder. Do not mark or damage lhe piston rod.
Example) Boll M5 x 65L frzr,r 4 bolts Diagram 1 D agram 2 Lever (with shock absober) Roller/round bar/non-rotaling Mounling bolt 50 40 30 25 20 15 ' 2 0 E 6 6 B r n 10 5 1 0 2 0 Load speed v (m/m n) Lateral load and operating pressure at Flush piping thoroughly beiore connection in orderlo preventdustorchipsf rom entedng the cylinder. Do not mark or damage lhe piston rod.
ZS-22-B Response frequency 200Hz 200Hz 200Hz 200Hz 200Hz 200Hz (5ms) (5ms) (5ms) (Sms) (Sms) (5ms) (With two M4 mounting thread) Noj. l) Hysteresis Adjustable AdjlJSlable A~uslable Adjustable A~US1ab' A~lJstabte mode m;1 Cf rm: (}i jl t(rml t~,~I~IIm] Cldj.t;,' II"mI l~j~Cf nn'e:, 1: &ij. orm::fe,1 Hysl21 esls Wmdow Fixed Fi xed Fixed Fixed Fixed Fixed co6:rearator m e (3digit) (3digit)
5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !
5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !
IRV1000 IRV2000 IRV3000 P538010-6 P538020-3 P538030-5 q w e r t y u i o !0 !1 !2 !3 !4 !5 HNBR, etc.
1 y y y t t t u u i i u i o o !3 !3 o !3 r r r e e w w e w q !4 !4 q q !4 LVM115 Description No. Material Part list/LVM13R, 14R, 16R, 115 !2 !0 Plate 1 PEEK/PFA !1 Diaphragm assembly 2 EPDM/FKM/Kalrez Body 3 PBT Slide bush assembly 4 POM/Stainless steel y Armature assembly 5 Stainless steel/PBT Coil assembly 6 t Sleeve 7 Iron u Spacer 8 i !
1 y y y t t t u u i i u i o o !3 !3 o !3 r r r e e w w e w q !4 !4 q q !4 LVM115 Description No. Material Part list/LVM13R, 14R, 16R, 115 !2 !0 Plate 1 PEEK/PFA !1 Diaphragm assembly 2 EPDM/FKM/Kalrez Body 3 PBT Slide bush assembly 4 POM/Stainless steel y Armature assembly 5 Stainless steel/PBT Coil assembly 6 t Sleeve 7 Iron u Spacer 8 i !
Rated Vacuum Range: -101 to 0 kPa, Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A1 (Bracket A, Vertical Mounting), Operation Manual: Y (w/o Operation Manual, w/o Calibration Certificate)
Length should be shorter than 5 m. Do NOT pipe upwards. AU200/300 Effective thread depth 6.5 4-M5 x 0.8 AU200, 300 Float type auto-drain Port size H G F E D C B A Model Port size 1 4 / 3 8 AU200 / 50 70 61 30 40.5 31.5 164 165 AU300 50 70 61 30 40.5 31.5 188.5 165 14-3-12
H4 S y m b o l Initial power / Power consumption (W) 100 VAC 200/40 200/50 400/100 600/150 200 VAC 800/40 800/50 1600/100 2400/150 Heater assembly number XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 XL1A25-60S-3 XL1A25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs.
Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: None, Operation Manual: Y (w/o Operation Manual, w/o Calibration
Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)
Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: F (Panel Mount Adapter + Front Protection Cover)
Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)