Rated Flow Range: 21 (50 to 250 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 12 (1 1/4), Output Specification: L (Out 1: IO-Link: Switch Output, N/P, Out 2: None; Temperature Sensor ), Temperature Sensor: T (Temperature Sensor), Lead Wire: Q (w/M12-M8 Conversion Lead Wire, 0.1 m), Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C)

Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 10 (1), Output Specification: L (Out 1: IO-Link: Switch Output, N/P, Out 2: None; Temperature Sensor ), Temperature Sensor: T (Temperature Sensor), Lead Wire: Q (w/M12-M8 Conversion Lead Wire, 0.1 m), Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C), Bracket

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 03 (3/8), Output Specification: L (Out 1: IO-Link: Switch Output, N/P, Out 2: None; Temperature Sensor ), Temperature Sensor: T (Temperature Sensor), Lead Wire: Q (w/M12-M8 Conversion Lead Wire, 0.1 m), Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C), Bracket

Rated Flow Range: 21 (50 to 250 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 14 (1 1/2), Output Specification: L (Out 1: IO-Link: Switch Output, N/P, Out 2: None; Temperature Sensor ), Temperature Sensor: T (Temperature Sensor), Lead Wire: Q (w/M12-M8 Conversion Lead Wire, 0.1 m), Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C), Bracket

Rated Flow Range: 21 (50 to 250 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 14 (1 1/2), Output Specification: L (Out 1: IO-Link: Switch Output, N/P, Out 2: None; Temperature Sensor ), Temperature Sensor: T (Temperature Sensor), Lead Wire: Q (w/M12-M8 Conversion Lead Wire, 0.1 m), Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C)

AU

1 Filter Bowl assembly Lubricator AF11-2 AF11-3 AL12-2 AL12-3 14-3-11 2 Series AU Flow Characteristics Inlet pressure: 1.0 MPa Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Pressure Characteristics Inlet pressure: 0.7 MPa, Outlet pressure: 0.2 MPa, Flow rate: 20 l/min (ANR) Courtesy of Steven Engineering

Slit Valve

L motion structure Gate open Gate blocked Gate clamped (seal) Clamp Upward The adoption of a wiper decreases the intrusion of foreign objects, resulting from wafer damage and or other sources.

Rated Flow Range: 50 (0.5 to 50 L/min), Flow Adjustment Valve: L (No Flow Adjustment Valve, Rear Ported), Port Size: C6 (ø6), Output Specification: L (Out 1: IO-Link or NPN/PNP), Lead Wire: Q (w/M12 Conversion Lead Wire and Connector, 0.1m), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve)

Large Flow Lubricator AL800/900 Series

min (ANR)) Flow rate (L/min (ANR)) AEP HEP Construction i e AL800/900 r y q IN OUT t o !

Manifold Regulator ARM1000/2000 Series

Note Description Material Body Manifold Valve guide Piston Adjusting spring Adjusting screw Chromate treated Chromate treated Aluminum die-casted Aluminum alloy Brass Brass Steel wire Steel 1 2 3 4 5 6 Zinc chromated Electroless nickel plated Flow rate (L/min (ANR)) Replacement Parts Pressure Characteristics (Representative value) No. Part no.

PF3WBCSR.eng

Otherwise it can cause failure or malfunction of the system. 1 L+ Brown 18 to 30 VDC 2 N.C.

PA300/500/700

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Vacuum (Option) Body ported Base mounted Component Parts Description Body Adapter plate End plate Retainer Spool valve Piston Spring Sub-plate Note Platinum silver Platinum silver Platinum silver No. q w e r t y u i Material Aluminium die-casted Aluminium

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

How to Calculate the Flow Rate For obtaining the flow rate, refer to page 4-1-6. 4-16-1 2 Series VS3115/3110 How to Order VS311 D L 5 01 5 Thread type Accessory (Option) Nil Rc Mounting With indicator light L P With manual override N NPT T NPTF E Nil Without bracket Port size Piping Electrical entry B With bracket G 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Without sub-plate Rc 01 02 02 03 00 Body ported

Rated Flow Range: 50 (0.5 to 50 L/min), Flow Adjustment Valve: L (No Flow Adjustment Valve, Rear Ported), Port Size: C6 (ø6), Output Specification: L (Out 1: IO-Link or NPN/PNP), Lead Wire: Q (w/M12 Conversion Lead Wire and Connector, 0.1m), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: No Bracket, Calibration Certificate: None, Made to Order: X731 (Compatible

Rated Flow Range: 21 (50 to 250 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 14 (1 1/2), Output Specification/Temperature Sensor: L2T (Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: Yes), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature

Rated Flow Range: 21 (50 to 250 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 14 (1 1/2), Output Specification/Temperature Sensor: L2 (Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: None), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

HOW TO ORDER N V F 1 1 0 H s D Z O 0 1 T F T T Opo.afing Pressure -J I 0 100 psi (CrP.055) | ' H 0 r 150 psi (C\p.05) | Solenl '1 '100 vAc ,2 2OO VAC 5 24 VDC s 'r io vAc 3 _ KYPS" 4-2mVAC E l{vF 1100-oc{17 @io.rg None F Foot Bracket --R(PT),Mekic' T NPTF (Std.) N _ N P T Ii ; o Electrical Corinsctioi G 12'Lead (Sd.) D .

Silencers NAN, NAMC Series Compact Mufflers, Exhaust Cleaners

e E , q 1.5 8 1 2 1 6 2 0 Cylinder speed (in/sec.) Sl6ct a propr unit sccording to exhaust flo/, in lh6 following ordr: (l) Oete|mine air con6umplion ot actuaicrs uaed in tl|e ckc\rii.

Valve; w/Stop Valve), Supply/Return Port Size: 04 (1/2), Return Unit Flow Switch Output Specifications: F (Out 1: PNP; Out 2: Flow Rate: Analog 4 to 20 mA; Temp.: None; Temperature Sensor: None), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Return Unit Flow Switch Unit Specifications: J (Integrated Display: L/min; Accumulated Flow: L; Temp.: °F)

Override: Non-locking Push Style, Vacuum Switch Model: E55 (1 Output w/o Analog Output, 200° Setting, PNP Output), Vacuum Switch Electrical Entry: Grommet Type, Lead Wire (ZSE1: 0.6m, ZSM1: 0.5m), Release Flow Rate Adjusting Needle: L (With Lock Nut), Made to Order: None, CE Compliant: Q (CE compliant)