1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

PAX PB Tubing size Symbol 03 04 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 Body class Tubing O.D. 1/8", 3 4 1/8" 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 Body class 1 Symbol 1 2 3 4 5 Body class 1 2 3 4 5 Type of part Symbol U B N Type of part Nut & Insert bushing Insert bushing Nut 2 3 4 5 17-5-53 12 Series LVD Special Tools How to order fitting jigs LQ G

VQ7-6/7-8

Release valve spacer AXT502-17A 1 1' 5 3 11 Series VQ7-6 Double check spacer Double check spacer with residual pressure release valve VV71-FPG VV71-FPGR By combining a 3 position exhaust center valve with a double check spacer, an intermediate stopping position of a cylinder can be held for an extended period.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 VS 260.5 285.5 21 273 No.

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Trunnion mounting should be utilized in a position which will balance the cylinder weight when extended. www.poweraire.com 1-800-526-7661 11 Section II: Cylinders Pneumatic Cylinder Force Cylinder forces are shown in pounds for both extension and retraction. Lines standard type show extension forces, using the full piston area.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

12 14 Model QQ SS UU XX 16 16 24 MY1H25 MY1H32 MY1H40 26.5 40 47 6 11 12 18 32 35 WXX WX V V R D Hole Size for Centralized Piping on the Bottom (Machine the mounting side to the dimensions below.)

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Trunnion mounting should be utilized in a position which will balance the cylinder weight when extended. www.poweraire.com 1-800-526-7661 11 Section II: Cylinders Pneumatic Cylinder Force Cylinder forces are shown in pounds for both extension and retraction. Lines standard type show extension forces, using the full piston area.

Power Valve: Economy Valve Series VEX5

VEX5511-062EZ-BG Body size 5, Select, External pilot solenoid Port size 3/4 200 VAC, Grommet terminal, with light/surge voltage suppressor OptionBracket, with pressure gauge 5 3 4 200 VAC 50/60 Hz 1 1 1 110 VAC 50/60 Hz 4 7 220 VAC 50/60 Hz 24 VDC 12 VDC 11 4 11 4 5 6 11 2 9 2 2 7 240 VAC 50/60 Hz Other 9 Option Thread type Nil F N T Rc G(1) NPT NPTF Note 1) Not conforming to ISO1179-1.

Series CXS 10-/11-/12- ø6, ø10, ø15, ø20, ø25, ø32 21-/22- Dual Rod Cylinder

-/22-CXS6 6 Vacuum suction type Relief type 11-/22-CXS10 11-/22-CXS15 11-/22-CXS20 11-/22-CXS25 11-/22-CXS32 10 15 20 25 32 10, 20, 30, 40, 50 M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 Single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8 10, 20, 30,

20

-X53 X-number With One-touch tube fitting VMG11-H06-11-X35m 23 Lever stroke Width across flats 22 23 27 30 B Note) 102 14 (Hex.) 117.5 KQ2H06-11 (02S, 35S) (mm) Type Connection size Model B 17 20.5 27.5 17 20.5 27.5 17 20.5 27.5 17 20.5 27.5 H06 H08 H10 H07 H09 H11 Metric size one-touch fitting Inch size one-touch fitting Note) Reference dimensions after installation RFKSS-GAP0030 Blow-gun

ZL3-OM00601

Pneumatic Circuit 24 11. Exhaust Characteristics,Flow Characteristics, And Time required to reach the specified vacuum 25 11.1. Exhaust Characteristics 25 11.2. Flow Characteristics 26 11.3. Time required to reach the specified vacuum 26 12. Handling Precautions 27 13. Trouble shooting 28 1 - Doc.

ZL3-OM00801

No 1 2)3) 4) 5)6) 6) 5)6) 7) O 8) 9) 10) 11) 12) 13) 1 2)3) 4) 14) 15) 10) 11)16) 28 No.ZL3-OM00801-A No 1 ON 10 2) 3) 4) 5) 6) 7) 8) O O 9) 10) 11) 12) 13) 14) 15) ON/OFF 16) 29 No.ZL3-OM00801-A Revision history AUKCA marking added 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com

IDX-OM-V022

Option R .11-1 11.1 SAFETY INSTRUCTIONS FOR USE . 11-1 11.2 EARTH LEAKAGE BREAKER SPECIFICATION . 11-1 11.3 CONNECTION OF POWER SUPPLY . 11-2 Chapter 12 Option T . 12-1 12.1 SAFETY INSTRUCTIONS FOR USE . 12-1 12.2 OPERATION / ERROR SIGNAL OUTPUT . 12-1 12.3 REMOTE OPERATION . 12-2 12.4 CONNECT THE POWER CABLE AND SIGNAL CABLE . 12-3 12.5 ELECTRIC CIRCUIT . 12-4 Chapter 13 Option V . 13-1

IDX-OM-V020

Option R .11-1 11.1 SAFETY INSTRUCTIONS FOR USE . 11-1 11.2 EARTH LEAKAGE BREAKER SPECIFICATION . 11-1 11.3 CONNECTION OF POWER SUPPLY . 11-2 Chapter 12 Option T . 12-1 12.1 SAFETY INSTRUCTIONS FOR USE . 12-1 12.2 OPERATION / ERROR SIGNAL OUTPUT . 12-1 12.3 REMOTE OPERATION . 12-2 12.4 CONNECT THE POWER CABLE AND SIGNAL CABLE . 12-3 12.5 ELECTRIC CIRCUIT . 12-4 Chapter 13 Option V . 13-1

Pressure Switch Pressure Switch with T-Spacer Pressure Switch with L-Piping Adapter Pressure Switch with Piping Adapter

Air leaks. -18- 11. Dimensions 11-1. PRESSURE SWITCHIS10M-20-D to IS10M-60-D Model IS10M-20-D IS10M-30-D IS10M-40-D IS10M-50-D IS10M-60-D A B C D 28 77.6 60.1 42 31 85.6 64.1 53 39 93.6 68.1 71 47 96.6 69.6 71 62 106.6 74.6 90 11-2.

Digital Pressure Switch ( compatible)

No.PS-OMX0002-A PRODUCT NAME Digital Pressure Switch ( compatible) MODEL / Series / Product Number ZSE20C(F)-L ISE20C(H)-L Table of Contents Safety Instructions 2 Model Indication and How to Order 9 Summary of Product parts 11 Definition and terminology 13 Mounting and Installation 17 Installation 17 Piping 20 Wiring 22 Outline of Settings [Measurement mode] 24 Pressure Setting 25 3 Step

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

8.5 13 12.7 2-2.6 (For manifold mounting) 28.1 [35.1] (Light/surge voltage suppressor) 2-2.6 (For mounting) + 14.5 3 23 20 2.3 55.6 [57.8] 12.7 28.1 [35.1] 8 9 M5 x 0.8 (P, R port) 23 7 (Bracket) R P 11 11.5 1.4 (PE port) L plug connector (L): SYJ52-L-M5 (-F) M plug connector (M): SYJ52-M-M5 (-F) DIN terminal (D): SYJ52-D-M5 (-F) M8 connector (M0): SYJ52-W0-M5 (-F) Applicable cable O.D.

Compact Hydraulic Cylinder Series CH
KGB

thread (mm) A B C D E F G H J K M P Q R S L Bore size (mm) 20 9.5 depth 5.4 51 43 8 12 10 M8 x 1.25 10 6 30 5.5 43 1/8 16.5 6 11.5 25 9.5 depth 5.4 53 45 8 14 12 M10 x 1.5 12 6 36 5.5 49 1/8 17 8 12 32 11 depth 6.5 66 56 10 18 14 M12 x 1.75 15 7 47 6.6 63 1/4 19.5 10 19.5 40 14 depth 8.6 75 65 10 22.4 19 M16 x 2 20 7 52 9 71 1/4 21.5 10 21.5 50 17.5 depth 10.8 81 70 11 28 24 M20 x 2.5 24

Sine Rodless Cylinder Series REA

SN-032B SN-040B Applicable bore size (mm) 25, 32 40 8 M26 x 1.5 32 37 11 M32 x 2.0 41 47.3 H B 6

Miniature Fittings M3, R(PT) 1/8, M5 Series M

I.D. 4 6 2.5 4 5 6 6.5 7.5 8 9 KFE04-00 KFE06-00 KFE08U-00 KFE08N-00 KFE10U-00 KFE10N-00 KFE12U-00 KFE12N-00 12 14 10 12 13 17 50.9 15.5 15.2 1.5 3 1.6 9 37.6 23 34 47 46 67 66 87 85 6 11 17 21 30 35 45 51.3 38 11 4 5 5.5 6.5 7 8 8 17 14 19 52.3 39 13 16.2 10 19 17 22 56.6 42 16 18.8 12 22 19 24 59.5 46 18 19.3 Male run tee: KFY Applicable tube (mm) A Effective orifice (mm 2) Weight (g) H1

Guide Cylinder Series MGG

M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13