Air Cylinder

47 71 89 101 2.5 6 8 8 17 21 35 1.5 CG3 D-A9lV 10 9 9 16.5 28.5 40.5 2 16 8.5 8.5 17 29 41 47 71 89 101 2.5 JMB 6 7.5 16.5 20.5 34.5 1 D-H7l/H7C D-H7lW/H7BA D-H7NF 10 8.5 16 28 40 1.5 MB 16 8 16.5 28.5 40.5 46.5 70.5 88.5 100.5 2 6 8.5 17.5 21.5 35.5 2 D-C7l/C80 D-C73C D-C80C MB1 10 9.5 17 29 41 2.5 16 9 17.5 29.5 41.5 47.5 71.5 89.5 101.5 3 CA2 D-M9l D-M9lW/M9lWV D-M9lA/M9lAV 10

Compact Cylinder Series CQS

Standard stroke Long stroke B1 C1 H1 MM X L1 24 25.5 28.5 32.5 L1 14 15.5 18.5 22.5 12 16 20 25 8 10 13 17 9 10 12 15 4 5 5 6 M5 x 0.8 M6 x 1.0 M8 x 1.25 10.5 12 14 17.5 M10 x 1.25 Basic Style Long stroke range (mm) Standard stroke Without auto switch With auto switch Standard stroke range (mm) Long stroke Bore size (mm) C D E OA OB Q RA RB T H I K M N With/Without auto switch A B 32 32 41

Air Slide Table Series MXS

MTS With end lock (16) MXS16-R With buffer (16) MXS16-F 2 x M6 x 1 thread depth 10 Operating port 2 x M5 x 0.8 13 J 12 18 48 41 20 3 37.5 0.5 30 Other dimensions are the same as the basic style.

24

A0.2 Bore size [mm] A [mm] B [mm] C [mm] D [mm] Hexagon socket head cap screw MGPM MGPL/A 12* 50 18 41 10 8 M4 x 0.7 16 56 22 46 12 10 M5 x 0.8 20 72 24 54 14 12 M5 x 0.8 25 82 30 64 18 15 M6 x 1.0 32 98 34 78 22 18 M8 x 1.25 40 106 40 86 22 18 M8 x 1.25 50 130 46 110 27 22 M10 x 1.5 63 142 58 124 27 22 M10 x 1.5 80 180 54 156 33 28 M12 x 1.75 100 210 62 188 39 33 M14 x 2.0 4.

Clamp Cylinder with Lock Series CLK1

36 Ws Width across flats K Width across flats 44 0.050 0.093 +0.027 0 +0.3 0 +0.4 0 Shaft: 12d9 F Clevis width CLK1A: 16.5 R15 Hole: 12H8 CLK1B: 19.5 S + Stroke 27 1.5 40 Z + Stroke 97 2 57 T ZZ + Stroke (mm) Symbol BX BY D F GA GB L M N S T W Wc Ws Z ZZ IA K Bore size 40 56 54 16 44 77 10 55 M12 x 1.5 86 112.5 57 5 39 27.5 114 228 47 14 50 64 64 20 55 78.5 10 58 M16 x 1.5 87.5 117 60 7 41

IZx-OMP0064

40 For IZS40 For IZS41, IZS42 Symbol Cable full length 40 For IZS40 41 For IZS41, IZS42 01 02 Full length 1m Full length 2m 19 20 Total length 19m Total length 20m Model with Made-to-order power supply cable Available in 1 m increments from 1 m to 20 m.

51

178 179 Up to 300 CG3 CG3 Up to 300 Up to 300 Up to 300 JMB AL Up to 300 H A Up to 300 ZZ + Stroke ZZ + Stroke H MB Up to 300 Basic (mm) MB1 Bore size (mm) Standard stroke A AL B1 C D E F GA GB H1 H ZZ I J KA MM NA P S CA2 20 25 32 40 50 63 80 100 79 85 87 93 121 121 151 152 12 12.5 11 10.5 15 15 17 20 20 23 23 29 35 35 44 44 Up to 200 12 15 15 20.5 26 26 32.5 32.5 13 17 17 19 27 27 32 41

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

11 11 5.5 B A 3.2 6.5 7 7 12 1 4 NN x M4 x 0.7 thread depth 8 B A 3H9 ( ) depth 2.5 +0.025 0 3H9 ( ) depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 ZZ 64 74 84 106 122 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 HA 20 20 20 30 48 N 4 4 6 6 6 GA 11 21 31 43 41

High Vacuum Angle Valve

G G Heater A A [mm] Series Valve size A B C D E Fn G H J K 25 50 121 48 27 12 40 26 44 21 40 65 171 66 39 11 55 41 67 29 50 70 185 79 31 11 75 52 76 29 9 XLC XLG 19 Heat-resistant 2-Color Indicator Solid State Auto Switch: Direct Mounting Type D-M9NJ/D-M9PJ RoHS Refer to the SMC website for details on products that are compliant with international standards.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Allowable radial load (N) Ta = I (Nm) (a) (b) Size I: Inertial moment High precision type High precision type High precision type High precision type Basic type Basic type Basic type Basic type Refer to page 11-9-7. . : Angular acceleration 1 2 3 7 10 20 30 50 70 100 200 41 41 0.56 31 41 41 0.84 31 . 2 = (rad/s 2) Load 45 45 32 45 45 0.82 32 1.2 t 2 : Rotation angle (rad) 48 48 33 48 48

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 39 39 40 40 41 41 43 45 47 54 54 55 55 56 60 65 68 70 70 71 71 72 77 78 82 84 87 89 91 93 96 97 98 99 99 100 101 102 Series MSUB Rotary Table: Basic Type Vane Style Size: 1, 3, 7, 20 . How to Order . Specifications. Construction. Dimensions .

REA/REB

Load Center Offset in Operating Direction (Lo) 25 144 9 + Lo 32 275 11 + Lo 40 520 13 + Lo Bore size (mm) RB Allowable load weight WA (kg) J DBore size (mm) Allowable load weight WA (kg) 5.6 Lo + 2.8 13.34 Lo + 2.9 10 -X 15 Lo: Distance from center of slide block to loads center of gravity (cm) 2043.2 Lo + 6 20 46.15 Lo + 3.55 Data 25 80 Lo + 4 32 188.1 Lo + 5.7 40 10-2-41 41 Series REAL

MG

Description Refer to How to Order for the standard model numbers on page 8-19-41. Part no. Applicable stroke (mm) 5 to 395 Part no.: MGPM50-35-HN A spacer 15 mm in width is installed in a MGPM50-50-HN. C dimension is 119 mm. Example Note 1) The minimum stroke for mounting auto switches is 10 stroke or more for two switches, and 5 stroke or more for one switch.

Auto Switch Guide

D-A90V OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch OUT ( ) Blue (g) Weight D-A93V D-A96 D-A96V D-A90 D-A90V D-A93 D-A93V Model 8 8 Lead wire length: 0.5 m 6 6 6 6 LED Brown (Red) OUT (+) Brown Contact protection box CD-P11 CD-P12 41 41 Lead wire length: 3 m 30 30 30 30 Resistor Reed switch Zener diode Dimensions OUT () Blue D-A90, D-A93, D-A96 Blue (Black) D-A96V DC (+

I/O Configurator (NFC version)

Detailed information of units 41 3.4.1. Information tab 41 3.4.2. Details of I/O monitor tab 50 4. Setting Function 57 4.1. Edit TAG 57 4.2. Software Control 57 4.3. Forced output 60 4.3.1. Forced output conditions 60 4.3.2. Forced output procedure 60 4.3.3. Forced output release procedure 63 4.4. Export Settings 64 4.5. Import Settings 66 4.6. Reading of the initial value 67 4.7.

LFE-OMY0008

[F20] 45 [F22] 46 OFF [F30] 47 OFF[] [F32] 48 OFF[] [F33] 50 FR0 [F34] 51 OFF [F80] 52 [] [F81] 53 OFF [F82] 54 [*] [F90] 55 OFF [F98] 56 OFF [F99] 57 OFF 30 [F10](41 ) OUT2 (20L/min ) OFF OFF OFF OFF 27 No.LFE*-OMY0008 [F 1] OUT1 OUT1 1. 1. 1. 1.

Digital Flow Switch (Remote type sensor unit)

Refer to the outline dimension drawing (page 41) for mounting hole dimensions. The self tapping screws should not be re-used. Direct mounting (PF3W511/521) Mount using the self tapping screws (nominal size: 4.0 x 4 pcs.) for installation. The tightening torque must be 1.0 to 1.2 Nm. Refer to the outline dimension drawing (page 41) for mounting hole dimensions.

CS1

100 157.5 50 36 59 15 8 35 16 85 47 90 43 14 31 19 36 Lube Non-lube Air-hydro M30 X 1.5 to 1400 1401 to 1600 100 161 128 M14 X 1.5 188 112 180.5 50 36 59 15 9 35 16 14 19 47 90 43 31 36 1/2 3/4 M36 X 1.5 to 1400 1401 to 1600 18.5 106 197 182 144 M16 X 1.5 206 118 14 19 53 90 43 36 45 56 40 59 17 9 39 M40 X 1.5 3/4 to 1800 1801 to 2000 18.5 125 227 204 162 115 M18 X 1.5 231 132 60 48 17 41

ZR

For nozzle size 10, 13, 15 + with function plate M3 x 0.35 x 93 4 6 6 6 6 For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 + with function plate For nozzle size 10, 13, 15 + with function plate M3 x 0.35 x 37 M3 x 0.35 x 41 M3 x 0.35 x 42 M3 x 0.35 x 46 !0 Precautions Components Ejector unit Be sure to read before handling.

MXS

MXU With end lock(16) MXS16-llR With buffer(16) MXS16-llF 2-M6 X 1 thread 10 deep MXS Operating port 2-M5 X 0.8 J 13 MXQ 12 18 48 MXF MXW 20 41 3 MXP 30 0.5 37.5 * Dimensions not indicated are the same as the basic sytle.