Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

+20 +15.5 50 +40 +25 +60.5 13-11-109 14 Series ZPT ZPT F 10-0-A14 (With buffer/One-touch fitting) 20 25 32 J K ZPT F 10-0-A14 (With buffer/One-touch fitting) 40 50 J K Applicable tubing O.D.Q Applicable tubing O.D.Q Hexagon width across flats P Rc 1/8 Hexagon width across flats P Rc 1/8 M14 x 1 M14 x 1 Hexagon width across flats 19 Hexagon width across flats 19 5 5 I I 5 D C K K 5 D C J J

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

M14 x 1 Width across flats 19 I 5 Width across flats 19 5 I 5 J 5 J Width across flats 12 Width across flats 12 Applicable tube O.D.

Compact Type Dual-Rod Cylinder Series CXSJ

5 t @0 @3 r !9 !8 @1 @2 w !4 !2 !5 t @0 @3 @4 @5 !9 !8 @1 @2 @6 !4 !2 !3 y !0 !1 e q @8!6 u !7 o i !3 y !0 !1 @7 r q @8 !6 u !7 o i CXSJM10 CXSJL10 @9 !7 o i !6 r !9 !8 @2 @9 !7 o i !6 @4 @5 !8 r !9 @2 Piston rod B-side piston Rod cover Piston rod B-side piston Rod cover Parts List: Standard Piping No. Description Material No.

Non-contact Gripper

3 0.4 (MPa) 5 2.5 4 0.4 (MPa) 0.4 (MPa) Lifting force (N) Lifting force (N) Lifting force (N) 4 2 3 0.3 (MPa) 0.3 (MPa) 3 1.5 0.3 (MPa) 2 0.2 (MPa) 0.2 (MPa) 2 1 0.2 (MPa) 0.1 (MPa) 0.1 (MPa) 1 1 0.5 0.1 (MPa) 0 0 0 0 1 2 3 4 5 6 7 8 9 10 Distance from the workpiece (mm) 0 1 2 3 4 5 6 7 8 9 10 Distance from the workpiece (mm) 0 1 2 3 4 5 6 7 8 9 10 Distance from the workpiece (mm) Size: 100

Thermo-con/Rack Mount Type

Signal contents N 100-240 VAC L 100-240 VAC E PE 1. Power supply connector IEC60320 C14 (or equivalent) N L 8 7 6 5 4 3 2 Pin no. Signal contents 1-2 Unused 3 Terminal A of resistance temperature detector 4 Terminal B of resistance temperature detector 5 Terminal B of resistance temperature detector 1 E 2.

VQ4000

push style 4 1 (P) 5 (R1) 3 (R2) 5 (R1) 3 (R2) 1 (P) VP4 2 2 position double 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 5 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ 3 position double check (A) 4 (B) 2 6Note) VQ4 Light and surge voltage suppressor 1 (P) 5 (R1) 3 (R2) E With W/o light/With surge suppressor VQZ Note) Refer to p.1.11-36 for double check style.

IDX-OM-V020

. 3-7 Chapter 4 Operation/ Shutdown . 4-1 4.1 CHECK POINTS BEFORE OPERATION . 4-1 4.2 OPERATION . 4-1 4.3 STOP . 4-2 4.4 CAUTIONS FOR RE-START . 4-2 4.5 CHECK POINTS BEFORE RESTART. 4-2 4.6 CAUTIONS WHEN THE PRODUCT IS SHUT DOWN FOR AN EXTENDED PERIOD OF TIME . 4-2 Chapter 5 Checks and Maintenance . 5-1 5.1 DAILY INSPECTION . 5-1 5.2 REGULAR MAINTENANCE . 5-2 5.2.1 Clean the dustproof filter

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

mm/s Piston speed mm/s Piston speed mm/s (4) CY1F/m1 (5) CY1F/m2 (6) CY1F/m3 (7) CY1F/m4 30 30 30 30 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 3 3 3 3 CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 Piston speed mm

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

9 #1 !6 @9 r MTS $0 #6 MY A' CY $1 !1 !2 !0 !8 w $4 t e $2 !5 $3 y!7 @8 !4 !

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

(PNP) M9PAV*1 M9PA*1 M9PAV*1 M9PA*1 v v V v v 2-wire 12 V M9BAV*1 M9BA*1 M9BAV*1 M9BA*1 v v V v v Grommet Water resistant (2-color indication) With diagnostic output (2-color indication) 4-wire (NPN) 5 V,12 V H7NF F79F V V v v IC circuit 3-wire (NPN equivalent) 5 V A96V A96 A96V A96 V V IC circuit Reed auto switch Yes 200 V A72 A72H V V Grommet 100 V A93V*2 A93 A93V*2 A93

Vacuum Pad: Ball Joint Type

Q Hexagon width across flats P Rc 1/8 Hexagon width across flats P Rc 1/8 M14 x 1 M14 x 1 Hexagon width across flats 19 Hexagon width across flats 19 5 5 I I 5 D C K K 5 D C J J Hexagon width across flats 12 Hexagon width across flats 12 M8 x 1.25 M8 x 1.25 H F Hexagon width across flats 12 H F Hexagon width across flats 3 3 Y 2.5 2 A B A B Stroke: 10 mm Stroke: 10 mm Applicable tubing O.D

Digital Gap Checker

DIN rail ISA-5Part number L Number of stations ISA-5-1 73.0 1 ISA-5-2 135.5 2 ISA-5-3 173.0 3 ISA-5-4 210.5 4 ISA-5-5 248.0 5 ISA-5-6 285.5 6 Seal for extra station ISA-15 Threaded plug with seal ISA-12Piping type Part number Rc1/8 ISA-12-A : This is applicable in both G1/8 ISA-12-C piping specification C and F. -11No.PS-OMT0002-E 2 About this product Centralized lead wire ISA-21Bracket

Rotary Cylinder Series MRQ Size: 32, 40 1

1 !2 !3 !4 !5 !6 !7 !8 !

Low Profile Guide Type

/s (4) CY1F/m1 (5) CY1F/m2 (6) CY1F/m3 (7) CY1F/m4 30 30 30 30 20 20 20 20 CY3B CY3R CY1F25 CY1F25 CY1F25 CY1F25 CY1S 10 10 10 10 CY1L CY1H CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 CY1F CY1F 3 3 3 3 CYP CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 D0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 -X Piston speed

IDX-OM-U010

ABOUT REINSTALLATION . 3-7 Chapter 4 Operation/ Shutdown . 4-1 4.1 CHECK POINTS BEFORE OPERATION . 4-1 4.2 OPERATION . 4-1 4.3 STOP . 4-2 4.4 CAUTIONS FOR RE-START . 4-2 4.5 CHECK POINTS BEFORE RESTART . 4-2 4.6 CAUTIONS WHEN THE PRODUCT IS SHUT DOWN FOR AN EXTENDED PERIOD OF TIME . 4-2 Chapter 5 Checks and Maintenance . 5-1 5.1 DAILY INSPECTION . 5-1 5.2 REGULAR MAINTENANCE . 5-2 5.2.1

Electric Actuator / Slider Type 《 AC Servo Motor 》

Part name Qty (1) Electric Actuator / LEF Series 1 (2) Driver / LECS Series 1(in case with driver) (3) Motor cable Pre-installed (1) (in case with cable) (4) Encoder cable (5) Lock cable (6) I/O Connector 1(in case with I/O connector) LECSA(Pulse input / Positioning) (2) Driver (3) Motor cable (4) Encoder cable (5) Lock cable DC24V Host controller, etc (6) I/O Connector (1) Electric Actuator

Table of Contents - Tubing

Inch Sizes Metric Sizes * 1/4 3/8 1/2 5/8 4mm (5/32) 6mm 8mm (5/16) 10mm 12mm 0.7 11 13 15 04 06 08 10 12 Colors Color Red White Yellow Color Black Blue Green Natural Symbol B BU G N Symbol R W Y * * Coming soon Note: 4mm tubing is suitable for use with 5/32 SMC One-Touch fittings as are 8mm tubing and 5/16 fittings PEAPP08 8 (5/16) 5 38 PEAPP12 12 9 63.5 PEAPP66 6 4 31.8 PEAPP10 10 5 51

MK

1 4 Note 1) Above figure is for D-A73/A80.

MVGQ

MVGQM12-30-Z73-B 1 SFJ3130-5LZ-MA 1 For the applicable auto switch model, refer to page 10-16-5. Auto switches are shipped together, (but not assembled). Lead wire length for auto switch Cylinder stroke (mm) Refer to Standard Stroke on page 10-16-5.

AZ1000

100 psig (0.014 to 0.7 MPa) 5 to 150 psig (0.034 to 1.0 MPa) Bonnet option Connections (Inletq, Outletw) 02 06 10 15 Code Bonnet Standard Panel installation4) Bonnet port (NPT 1/8 inch) Connections 1/4 inch face seal (Female) 1/4 inch face seal (Male) 3/8 inch face seal (Female) 3/8 inch face seal (Male) 3/8 inch tube weld 1/2 inch face seal (Female) 1/2 inch face seal (Male) 1/2 inch tube