High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

10 ISO Class 8 10 10 0 L/min (ANR) ISO Class 7 ISO Class 7 10 10 Particle concentration [particles/m3] Particle concentration [particles/m3] ISO Class 6 ISO Class 6 10 10 0 L/min (ANR) 50 L/min (ANR) ISO Class 5 ISO Class 5 10 10 1000 1000 20 L/min (ANR) ISO Class 4 ISO Class 4 100 100 70 L/min (ANR) 30 L/min (ANR) 10 10 1 1 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0.1 0.2 0.3 0.4 0.5 0.6 Particle diameter

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet M5 x 0.8 Effective thread depth 4 3 40 22.5 1.2 11 6 46 25 14.5 10 56 29 20.5 04 A J K 3 40 22.5 1.8 11 6 46 25 14.5 10 56 29 20.5 06 08 N S U F GN GS HS 18 11 15 59 42.5 1.2 10 20 66.5 50 06 08 15 59 42.5 1.8 20 66.5 50 04 JB K ZP3 Y UM B5 3 41 23.5 11 6 47 26 14.5 10 57 30 20.5 JB K 15 60 43.5 10 20 67.5 57 J K 4 10 13 16 D

Base Mounted Metal Seal/Rubber Seal Series VQ

AXT661-14A-10 3 pcs.

Hygienic Design Cylinder Series HY

27 14 16.5 20 26 32 38 50 60 8 10 12 16 20 20 25 30 18 18 20 26 32 32 37 42 12 14 18 25 30 32 40 50 3 3 3 3 3 3 3 3 2 2 2 2 2 2 3 3 13 13 10 10 10 10 12 12 16 16 10 10 10 15 15 15 20 20 26 31 38 47 58 72 89 110 M4 x 0.7 depth 7 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M6 x 1.0 depth 12 M8 x 1.25 depth 16 M10 x 1.5 depth 16 M10 x 1.5 depth 22 M12 x 1.75 depth 22 11 10 14 12 17 17 12 13 14 14 20

Flow Control Equipment

AS42l1FE AS43l1FE Model 8 10 6 8 10 12 12 10 6 8 10 Tube O.D.

MLGP

m (kg) 25 20 20 0.1 10 50 50 100 200 1 10 100 200 Eccentric distance l (mm) Eccentric distance l (mm) MLGPL32 to 100 23 50mm stroke or less V = 400mm/s 24 Over 50mm stroke V = 400mm/s 100 100 100 80 100 80 63 63 10 Load weight m (kg) 50 50 10 40 40 32 1 32 2 10 100 200 0.3 10 50 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) Features 10 Series MLGP Horizontal Mounting Slide

MLGP

m (kg) 25 20 20 0.1 10 50 50 100 200 1 10 100 200 Eccentric distance l (mm) Eccentric distance l (mm) MLGPL32 to 100 23 50mm stroke or less V = 400mm/s 24 Over 50mm stroke V = 400mm/s 100 100 100 80 100 80 63 63 10 Load weight m (kg) 50 50 10 40 40 32 1 32 2 10 100 200 0.3 10 50 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) Features 10 Series MLGP Horizontal Mounting Slide

Fieldbus system EtherNet/IP compatible SI Unit

Unit 1 Disable Does not generate an error. -10..10 V -5..5 V -10..10 V Selects the analogue input range. (AXB: Cannot select -10..10 V/-5..5 V/ -20..20 mA) -20..20 mA (AXA) Sets the analogue input device range. 0..10 V 2 Analogue input range Channel 0..5 V 1..5 V (AXB) 1..5 V 0..20 mA 4..20 mA Offset binary Offset binary. Sign & Magnitude Signed binary.

17

Note 1) 5 10 5 10 D-A9 D-A9V D-M9V 5 Note 1) 5 D-M9 10 Note 1) 10 5 Note 2) D-M9W 10 Note 2) 10 5 Note 2) D-M9WV D-M9AV 10 5 Note 2) D-M9A 10 Note 2) 15 15 D-P3DW Note 1) Confirm that it is possible to secure the minimum bending radius of 10 mm of the auto switch lead wire before use.

Secondary Batteries

, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50,7 5, 100, 125, 150 *90and 91-series MXQ6 products do not have shock absorbers.

Programless controller Step motor (servo 24 VDC)

LEP6 LEP10L LEP10 J K J K J K Low 7 14 12 24 12.5 25 Pushing force [N] Middle 8.5 17 16 32 19 37.5 High 10 20 20 40 25 50 Pushing speed [mm/s] 20 10 20 10 20 10 Pushing force accuracy is 30%F.S. for the LEP6 and 25%F.S. for the LEP10. Refer to the operation manual of the electric actuator for details.

MK

/Flange Rod end width across flats 10 10 21 21 46 46 Data Part no.

Vacuum System Peripherals:

8, R 10, R 10, R 10, R 6 8 10 4 6 KM11 6, 10 One-touch fitting One-touch fitting 1 4 3 8 KM12 6, 10 One-touch fitting Rc KM13 3 One-touch fitting One-touch fitting KM11 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 4 One-touch fitting R male thread KM12 KM14 3 One-touch fitting KM15 KM15 3 One-touch fitting One-touch fitting rod KM16 KM14 KM16 One-touch fitting 3 One-touch fitting KM13 Miniature fittings

Title not found

9/16 21/32 21/32 11/32 11/32 9/32 9/32 10-FB3 10-FB2 10-FB4 10-FB1 10-FLB1 (Short) 10-FLB2 10-FLB2 (Short) 10-FLB1 21 Page 5 Distributed by Power Aire, Inc.

Angular Style Air Gripper Series MHC2/MHCA2/MHCM2

Body option (Only for MHCA2-6) Port 48 mm x 20 mm x 10 mm 22 g Side piping Port MHCA2-6 Short body. With 4 One-touch fitting 41 mm x 20 mm x 10 mm 19 g Port With 4 hose nipple Port MHCM2-7S Smallest size and lightest mass in MHC series.

MTS

(17) 0 0 28 33 (45) 18 28 (35) 5 (17) D-F9W, D-F9WV 10 (17) 0 0 28 33 (45) 18 28 (35) 5 (17) D-A9, D-A9V 0 (15) 0 0 32 32 (47) 22 22 (37) 0 (15) 16 D-M9, D-M9V 10 (17) 0 0 32 37 (49) 22 32 (39) 5 (17) D-F9W, D-F9WV 10 (17) 0 0 32 37 (49) 22 32 (39) 5 (17) D-A9, D-A9V 0 (15) 0 0 38 38 (53) 26 26 (41) 0 (15) 20 D-M9, D-M9V 10 (17) 0 0 38 38 (55) 26 36 (43) 0 (17) D-F9W, D-F9WV 10 (17) 0 0

MHC2

A part z1 m1 = 20 x 3 x 4 x 2.7 x 10-6 = 6.48 x 10-4 (kg) Weight calculation m1 = a x b x c x Relative density IZ1 Inertial moment around Z1 axis IZ1 = {m1 (a2 + b2) / 12} x 10-6 = {6.48 x 10-4 x (202 + 32)/12} x 10-6 = 2.21 x 10-8 (kg.m2) = 2.21 x 10-8 + 6.48 x 10-4 x 16.42 x 10-6 = 0.20 x 10-6 (kg.m2) IA Inertial moment around Z axis IA =IZ1 + m1r12 x 10-6 z f2 z2 B part r2 = 23.5(mm)

MHC2

A part z1 m1 = 20 x 3 x 4 x 2.7 x 10-6 = 6.48 x 10-4 (kg) Weight calculation m1 = a x b x c x Relative density IZ1 Inertial moment around Z1 axis IZ1 = {m1 (a2 + b2) / 12} x 10-6 = {6.48 x 10-4 x (202 + 32)/12} x 10-6 = 2.21 x 10-8 (kg.m2) = 2.21 x 10-8 + 6.48 x 10-4 x 16.42 x 10-6 = 0.20 x 10-6 (kg.m2) IA Inertial moment around Z axis IA =IZ1 + m1r12 x 10-6 z f2 z2 B part r2 = 23.5(mm)

EXxx-OMY0004

-10 Block diagram of the EX245-FPS1 68 No.EX##-OMY0004 Fig. 10-11 Block diagram of the EX245-FPS2 Fig. 10-12 Block diagram of the EX245-FPS3 69 No.EX##-OMY0004 11.

LEH_C

LEHZ(J) 10,16 20,25 32,40 LEHF 10 20 32,40 LEHS 10 20 32,40 / () 8.2 !