3

3-Color Display Digital Flow Monitor for Water 0 0 0 90 100 80 70 60 50 40 30 20 10 0 90 100 80 70 60 50 40 30 20 10 Fluid temperature [oC] Fluid temperature [oC] PF3W3 Function Details 4 Series PF3W Flow-rate Characteristics (Pressure Loss: Without Flow Adjustment Valve) PF3W704/504 PF3W720/520 PF3W740/540 0.04 0.04 0.04 Pressure loss [MPa] Pressure loss [MPa] Pressure loss [MPa] 0.03 0.03

Mini Free Mount Cylinder

l M5 x 65 l M5 x 70 l M5 x 75 l C D CUJS12-5 -10 -15 -20 -25 -30 CUJS16-5 -10 -15 -20 -25 -30 CUJS20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CUJB12-5 -10 -15 -20 -25 -30 CUJB16-5 -10 -15 -20 -25 -30 CUJB20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 25 30 35 40 45 50 25 30 35 40 45 50 30 35 40 45 50 55 60 65 70 75 20 8.5 8.5 M4 x 20 l 7.5 9.5 25 M4 x 25 l 10.5 7.5 25 M5 x 25 l With Auto Switch (Built-in

MRHQ

0 10 20 30 40 50 60 0 10 20 30 40 50 F F Gripping point L mm Gripping point L mm MRHQ16D MRHQ16D Pressure 0.7MPa External gripping 60 50 0.6MPa 50 Pressure 0.7MPa Gripping force N Gripping force N 0.5MPa 40 0.4MPa 0.5MPa 0.6MPa 40 0.4MPa 30 30 0.3MPa 0.3MPa 20 20 0.2MPa 0.2MPa 10 10 L L 0 10 20 30 40 50 60 0 10 20 30 40 50 60 Gripping point L mm Gripping point L mm MRHQ20D MRHQ20D Internal

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Page Series Guide type Motor type Model Mounting orientation Ground ball screw Rolled ball screw 6 10 20 10 20 6 10 20 10 20 LTF6 LTF8 LTF6 LTF8 Page 60 to Horizontal 10 10 Page 68 to Standard Frame-type LTF motor linear guide 6 6 Page 76 to Vertical 10 10 Page 84 to Construction Page 92 Mounting Page 93

Compact

LEC SS-T Top mounting Bottom mounting LEC Y With lock LEMH25T-BWith lock LEMH25UT-BMotorless LAT Motor cable length 300 LZ 20 65 145.3 (145) 0.3 (145) 15 117.3 20 LC3F2 65 20 Lock cable length 300 Table details Bottom mounting LEMH25UT-50.4 (Table width) 40 70 80 3 3 (27.2) 4H9 (+0.030 0 ) depth 5 (102) Workpiece mounting center line 74.3 (47.2) 40 56 6 4 x M4 x 0.7 Thread depth 7 4H9 (

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Maximum Allowable Load MY3A, MY3B/m1 MY3A, MY3B/m2 MY3A, MY3B/m3 200 50 40 30 100 100 50 40 20 30 50 40 10 20 30 63 63 5 4 20 10 Load weight kg Load weight kg Load weight kg 63 3 40 10 40 5 4 2 3 25 5 4 1 25 40 2 3 25 0.5 0.4 16 2 1 16 0.3 16 1 0.2 0.5 0.1 0.5 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max. MY3A max. MY3B max.

Compact Type

Bore size/Stroke (mm) Bore size 6 10 15 20 25 32 Standard strokes 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 Applicable Auto Switches/Refer to page 15 for detailed auto switch specifications.

F

~60OC -20~60OC -20~60OC -20~60OC -20~60OC -20~60OC -20~60OC -20~60OC -20~60OC -20~60OC Material Polyurethane Polyurethane Polyurethane Polyurethane Polyurethane Polyurethane Polyurethane Polyurethane Polyurethane Polyurethane Courtesy of Steven Engineering, Inc. !

Air Slide Table Series MXQ

MXQ 6 MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 2 Series MXQ Theoretical Output IN OUT Application of the dual rod system generates double the output of conventional cylinders.

Table of Contents

Auto switches are shipped together but not assembled. 6 10 16 20 25 32 6 mm 10 mm 16 mm 20 mm 25 mm 32 mm Action D Double acting Port thread type Type M5 x 0.8 Rc1/8 NPT1/8 G1/8 Bore size 6, 10, 16, 20, 25 32 32 32 Symbol Standard stroke (mm) 6, 10, 16 20, 25, 32 5, 10, 15, 20, 25, 30, 40, 50, 60 5, 10, 15, 20, 25, 30, 40, 50, 60, 70, 80, 90, 100 Nil TN TF Applicable Auto Switches/Refer

Rotary Cylinder Series MRQ Size: 32, 40 1

(mm) (mm) Stroke 5 10 15 20 25 30 40 50 75 100 Y 12.5 15 15 20 20 15 17.5 17.5 25 30 Q 20 20 20 20 30 E 68 68 70.5 68 70.5 68 70.5 75.5 80.5 83 11-10-15 16 Refer to page 11-11-1 concerning further information on specifications of the auto switch single body.

CS1

40 90 59 43 14 39 36 40 32 to 1200 3/4 M40 X 1.5 60 63 41 90 115 18.5 204 162 M18 X 1.5 20 17 23 45 70 48 39 44 50 40 to 1200 3/4 1 Lube Non-lube M45 X 1.5 60 63 90 115 18.5 46 20 226 182 M20 X 1.5 17 50 48 44 25 74 39 50 40 to 1200 M56 X 2 71 67 140 25 56 277 225 23 M24 X 1.5 110 60 60 20 55 30 86 49 63 50 to 1200 1 M64 X 2 80 76 65 140 30 330 270 M30 X 1.5 23 130 37 70 96 60 20 49 68 80

AC Servo Motor Driver (CC-Link Type ）

50 20 9 15 9.

PF2A/PF2W

Note 6) The flow switch is comformed to CE mark. 16-11-17 14 Series PF2W How to Order Remote type Sensor unit PF2W5 20 03 Flow rate range 0.5 to 4 l/min 2 to 16 l/min 5 to 40 l/min 10 to 100 l/min Nil 1 2 04 20 40 11 Output specifications Output for display unit (sensor output) only Output for display unit + Analog output (1 to 5V) Output for display unit + Analog output (4 to 20 mA) Thread

air-filter-e

40 74 105 5 10 20 40 74 105 5 10 20 40 74 105 5 10 20 40 74 105 65 x L250 65 x L250 EHM19R10AY EH19R10GV 65 x L250 65 x L250 EHM15R10A EH15R10G EHM11R10A EH11R10G EHM10R10A EH10R10G EHM8R10A EH8R10G 65 x L125 65 x L125 Note) Specity seal material in place of "" (N for NBR or V for FKM).

Air Preparation Equipment

40 74 105 5 10 20 40 74 105 5 10 20 40 74 105 5 10 20 40 74 105 65 x L250 65 x L250 EHM19R10AY EH19R10GV 65 x L250 65 x L250 EHM15R10A EH15R10G EHM11R10A EH11R10G EHM10R10A EH10R10G EHM8R10A EH8R10G 65 x L125 65 x L125 Note) Specity seal material in place of "" (N for NBR or V for FKM).

Compact Type Dual-Rod Cylinder Series CXSJ

Bore size/Stroke (mm) Bore size 6 10 15 20 25 32 Standard strokes 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 Applicable Auto Switches/Refer to page 15 for detailed auto switch specifications.

Cylinder with Lock Series CLS

40 40 90 59 43 18.5 130 74 120 17 36 80 22 M16 x 1.5 +0.100 0 Up to 1200 118 30 16 5 63 60 204 106 36 167 195 3/8 162 40 23 50 45 115 70 48 17 18.5 149 86 135 20 41 90 26 M18 x 1.5 +0.100 0 +0.100 0 Up to 1200 131 34 21 5.5 60 124 48 17 46 63 226 40.5 187 216 3/8 182 40 25 50 50 115 74 18.5 165 97 135 20 90 26 M20 x 1.5 Up to 1200 155 42 35 6 20 67 152 60 56 71 277 58 237 261.5 1/2

Rotary Cylinder Series MRQ

Graph (2) Cylinder Output on the Retracting Side (Double acting) 1500 150 Tube bore size [mm] 1000 100 40 Side load Balance weight 400 500 40 50 32 200 250 300 20 25 30 Operating pressure [MPa] Cylinder output F[N] Load weight [kg] 150 15 Allowable Side Load on the Piston End (Nm) 100 10 Stroke of linear part Size 40 40 50 4 5 100 75 50 40 30 25 20 15 10 5 32 32 40 9 10 11 12 12 13 13 13

Metal Seal/Rubber Seal Series VQ Body Ported

0.14 0.19 15 or less 29 or less Double (Latching) VQ1241 Rubber seal 15 or less 0.91 0.19 0.21 1.0 0.21 0.25 20 or less 34 or less VQ1340 Metal seal 20 or less 0.67 0.13 0.16 0.73 0.13 0.17 26 or less 40 or less Closed center VQ1000 VQ1341 Rubber seal 25 or less 0.78 0.22 0.18 0.84 0.21 0.20 33 or less 47 or less VQ1440 Metal seal 20 or less 0.74 0.14 0.17 0.84 0.16 0.20 26 or less 40 or