RSQ

, Chamfered, Roller 0.74 0.80 0.86 Double acting with spring loaded REC 40 Model C 5 D 40 48 53 55 60 65 60 65 70 75 80 85 75 80 85 Mounting bolt M3 x 45l M3 x 55l M3 x 60l M5 x 55l M5 x 60l M5 x 65l M5 x 60l M5 x 65l M5 x 70l M5 x 75l M5 x 80l M5 x 85l M6 x 75l M6 x 80l M6 x 85l Lever with built-in shock absorber 0.97 1.01 1.05 RSQB12-10 RSQB16-10 -15 RSQB20-10 -15 -20 RSQB32-10 -15 -20

E-P HYREG

IRV 1 to 4 V 67 k 6 0 to 7.5 V 10 k 7 4 to 16 mA 120 8 0 to 15 mA 12 V VEX SRH Body size Port size Rc Option Mounting Symbol Symbol Port 1(P), 2(A) Port 3(R) B (Bracket) F (Foot) G (Pressure gauge) N (Silencer) Applicable pilot valve (4) SRP D 00 Without sub-plate M5 M5 SRF B 00 Without sub-plate M5 M5 01 18 ITV 2 00 Without sub-plate 01 18 02 14 Base mounted IC VY1D0-X39 (5) 00 Without

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

A Black zinc chromated MY-16B-Stroke B Nickel plated MY-16BW-Stroke 8-12-17 18 Series MY1W Dimensions: 16, 20 L (LL) 4-MM depth M 4-B counterbore depth C LD through-hole bottom side J depth K PA YW PB QW LW PG Q+ Stroke M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) W CH LH RR SS NE H RR SS QQ NH NC M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) 2 x 2-M5 x 0.8 PP TT UU This port

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

GB TT UU (Hexagon socket head plug) G NW GB 10 A N Z + Stroke M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) (WW) QQ (WW) M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) GB PP XX XX G Centralized piping type Centralized piping type 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) VV VV 1.1 S WX 8.4 2-4 Bottom ported (Applicable O-ring) Y J M5 x 0.8 M6 x

5 Port Solenoid Valve SY Series

M5 port block assembly Pilot valve assembly A Bracket Assembly No. B Description No. Caution 3 5 7 SX 000-16-1A (with mounting screw) 3 5 7 SY9000 has no bracket.

CLQ

x 0.8 Cap bolt 5 Hole: 10 H10 Shaft d9 52.7 A + Stroke CL+ Stroke 20 14 10 7 32 B + Stroke 0.1 0.3 18 +0.4 +0.2 36 Double Clevis Style Stroke range Without auto switch With auto switch Bore size (mm) A B CL A B 82 92 CL 102 23 33 92 102 10 to 50 75, 100 33 92 32 Rod end nut 28.5 9-10-17 17 Series CLQ Dimensions: 40 Both ends tapped style: CLQA40 16 3.2 16 3.2 2 x 4-M5 x 0.8 Basic style (

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

How to Order Manifold Assemblies (Example) Double solenoid (24VDC) SY3260-5G-C6 (2 sets) Cylinder port size M5: M5 x 0.8 Example Single solenoid (24VDC) SY3160-5G-M5 (2 sets) Cylinder port size C6: With 6 One-touch fitting Manifold base (4 stations) SS5Y3-60-04U R D side Port R C8: With 8 One-touch fitting P Stations 1 2 n Port P C8: With 8 One-touch fitting U side SS5Y3-60-04U 1 set (type

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

How to Order Valve T VQZ212 5M N7 Example/Valve VQZ212R 5M C6 External pilot specification Thread (Cylinder ports, and P/R ports) Rc(PT) N NPT External pilot port T NPTF M3 X 0.5 (VQZ200) M5 X 0.8 (VQZ300) F G(PF) Note) R port of VQZ200 is only PF 1/16 Cylinder ports Symbol M5 02 N1 N3 N7 N9 N11 3/8" 1/8" 5/32" 1/4" 5/16" M5 Tube O.D.

High Vacuum Angle Valve, XL Series

When the valve is open, an orange marker about 1mm in height appears in the center of the name plate (16).

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

A RR1 A1 L1 MM RR1 U1 NZ L L1 E1 10 12 16 20 +0.048 0 0.2 0.4 0.1 0.3 0.2 0.4 0.2 0.4 +0.048 0 5 6.5 8 10 0.4 0.2 0.2 0 0.4 0.2 0.4 0.2 10 12 16 20 12 16 20 25 12 16 20 25 5 6.4 8 10 21.5 32 34 41 6 8 8.5 10.5 16 25 25 30 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.25 6.3 8.1 10.3 12.8 7 14 11.5 14 21.5 6 11 8.5 16 21 25 30 M5 x 0.8 6.3 8.1 7 10 10 14.6 I-G012 I-Z015A I-G02 I-G03 Y-G012

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

2-M6 x 1 thread depth 12 (Mounting hole) 34 45 24 27 30 8 2 +0.2 +0.1 17 26H9 +0.052 depth 3 0 30 40 21 4-M5 x 0.8 thread depth 6 M5 x 0.8 (Finger closing port) (Thread for mounting attachment) Auto Switch Mounting Groove Dimensions 30.3 45 20 O S 16 4.5 4.5 23 10 M5 x 0.8 (Finger operating port) 5 MHW2-25D1 Right angle finger type 6.45 5.5 37 18 12 6 15 16 4-M5 x 0.8 (Thread for mounting

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

Groove Dimensions 30.3 45 20 O S 16 4.5 4.5 23 10 M5 x 0.8 (Finger operating port) 5 MHW2-25D1 Right angle finger type 6.45 5.5 37 18 12 6 15 16 4-M5 x 0.8 (Thread for mounting attachment) 30 45 21 12-10-20 20 180 Angular Style Air Gripper Rack & Pinion Style Series MHW2 MHW2-32D Flat finger type (Standard) 24 MHZ MHF 2-M6 x 1 thread depth 10 (Mounting hole) 21 MHL 61.5 83.5 MHR 4-M6 x 1

VFS

16 14 16 17 14 16 17 9.0 9.0 9.0 VFS600 0.30 0.15 0.15 0.30 0.15 0.15 0.25 0.25 0.25 0.32 0.17 0.20 0.30 0.23 0.25 15 16 17 15 16 17 14 16 16 14 16 17 14 16 18 9.0 9.0 9.0 3.7 3.7 3.9 3.7 3.7 3.9 4.0 4.1 4.1 3.8 3.8 4.2 3.7 3.9 4.6 0.30 0.15 0.13 0.30 0.15 0.13 0.24 0.24 0.23 0.25 0.18 0.13 0.31 0.22 0.22 3 8 4.1 4.5 4.7 4.1 4.5 4.7 4.1 4.1 4.1 3.5 4.1 4.1 3.8 4.1 4.3 Single 1 2 3 4 VFS5100

VQ7-6/7-8

AXT632-45-1 AXT632-45-2 AXT632-45-4 AXT632-45-5 AXT632-45-6 AXT632-45-7 AXT632-45-8 AXT632-45-9 AXT632-45-10 AXT632-45-11 AXT632-45-12 AXT632-45-13 Mounting bolt Size M5 x 35 with SW M5 x 15 with SW M5 x 45 with SW M5 x 60 with SW M5 x 65 with SW M5 x 70 with SW M5 x 75 with SW M5 x 90 with SW M5 x 95 with SW M5 x 100 with SW M5 x 105 with SW M5 x 115 with SW VK Option mounting diagram SMC

Modular F.R.L. Unit

E F F E E B C Cross interface E: 4-Rc F: Without thread A D E Model Y14-M5 Y24-01 Y24-02 Y34-01 Y34-02 Y44-02 Y44-03 Y54-03 Y54-04 Applicable model AC10 Port size M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 C 14 D 25 B 16 A 23 AC20 22 40 40 40 AC25, AC30 28 48 43 49 AC40 Cautions in Mounting 36 54 48 60 62 When mounting a cross interface directly on the IN side of the lubricator, be sure to use a

Compact Guide Cylinder

175, 200 50.5 75.5 50.5 52.5 39 41 10 10 0 25 23 9 2.5 25 50.5 77 50.5 53.5 37.5 40.5 10 14 0 26.5 23.5 10 3 Bore size [mm] G GA GB GC H HA J K L MM ML NN OA OB OL P PA PB PW Q 100 st or less Over 100 st Nil TN TF 12 25 10 6 7 10 54 M5 12.5 12.5 17 M4 x 0.7 10 M4 x 0.7 4.3 8 4.5 M5 x 0.8 11.5 8 16 14 16 29 12.5 5.5 7.5 11.5 59 M3.5 14.5 14.5 20 M5 x 0.8 11 M5 x 0.8 4.3 8 4.5 M5 x 0.8 11.5

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) PP TT UU GB TT UU G NW GB 10 N A Z + Stroke M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) (WW) QQ M5 x 0.8 (Hexagon socket head plug) M5 x 0.8 (Port) (WW) GB PP XX XX G Centralized piping Centralized piping 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) VV VV 1.1 S WX 8.4 2-4 Bottom port (Applicable O-ring

VQ7-6/7-8

Mounting bolt M5 X 115 with SW M5 X 35 with SW M5 X 15 with SW M5 X 45 with SW M5 X 60 with SW M5 X 65 with SW M5 X 70 with SW M5 X 75 with SW M5 X 90 with SW M5 X 95 with SW M5 X 100 with SW M5 X 105 with SW Size SMC SMC SMC SMC SMC Option mounting diagram SMC SMC SMC SMC Spacer 2 SMC Spacer 2 Interface regulator Spacer 1 Throttle valve spacer SMC Release valve spacer Spacer 2 Spacer 1 Spacer

MHY2/MHW2

position 30.3 45 16 O S 4.5 4.5 23 10 M5 X 0.8 (Finger opening port) 5 6.45 MHW2-25D1 5.5 Right angle finger 37 18 12 6 15 16 4-M5 X 0.8 (Thread for mounting attachment) 30 21 45 MHW2-25D.SMHW2, #2 MHW2-25D1.SMHW2, #6 2.8-20 180 Angular Gripper Series MHW2 MHW2-32D Flat finger (Standard) 24 2-M6 X 1 Depth 10 (Mounting thread) 21 61.5 83.5 4-M6 X 1 Depth 12 (Mounting thread) Bottom through

3 Port Air Operated Valve Series SYJA300 1

M5 x 0.8 Body side VZA222-P-M5 M5 x 0.8 0.13 0.35 0.52 0.15 0.43 0.60 N.O. M5 x 0.8 Body side VZA214-1P-01 M5 x 0.8 0.22 0.35 0.85 0.25 0.30 1.0 N.C. Rc 1/8 Sub-plate side VZA214-2P-01 M5 x 0.8 0.22 0.35 0.85 0.25 0.30 1.0 N.C. Rc 1/8 Body side VZA224-1P-01 M5 x 0.8 0.22 0.35 0.85 0.21 0.25 0.90 N.O. Rc 1/8 Sub-plate side VZA224-2P-01 M5 x 0.8 0.22 0.35 0.85 0.21 0.25 0.90 N.O.