AMH

Max. air flow rate (m3/min (ANR)) JIS Symbol P . 14-20-55 Inlet pressure (MPa) Caution Be sure to read before handling.

Air cylinder

As the indicator LED protrudes from the switch unit, mounting the switch bracket above the LED may cause damage to it. (4) Insert the auto switch mounting screw (M3) included in accessories from the mounting hole of the auto switch mounting band, inserting the through hole of the switch bracket.

Micro Mist Separator with Prefilter AMH Model Model AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Series AMH can separate and (1) remove aerosol state oil mist in 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) compressed air and remove Po

Compressed air 1.0MPa Fluid Max. operating pressure Min. operating pressure (1) 0.05MPa 1.5MPa Proof pressure Ambient and fluid temperature Filtration rating 5 to 60C 0.01m(95% particle size collection) Oil mist removal rate Max.0.1mg/m3 (ANR) (2) (At saturation of element oil, less than 0.01mg/m3(ANR){0.008ppm}) 2 years or when pressure drop reaches 0.1MPa Element life Note 1) With N.O.auto

Stainless Steel Heat

(Operation of auto drain will stop and water will flow out through the air outlet.) 12 Series IDUS/IDFS Specific Product Precautions 2 Air Preparation Equipment Precautions Refer to pages 12 through 14 for safety instructions and cleaning equipment precautions. Protection Circuit Time Delay for Restarting Caution Caution Allow at least three minutes before restarting the dryer.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations

NCA1

12 3 3.125 1/2 1 1/2 3 7/16 10 1 3/4 1 1/4-12 2 2.375 3/8 1 1/8 3 1/8 10 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 10 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 1/2 12 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 12 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 1/2 12 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 1/2 14 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 13/16 14 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 13/16 14 3 1/2 2 1/2-12 3 1/2 4.25

Air Cylinder NCA1 Series

-12 3 3.125 1/2 1 1/2 3 7/16 10 1 3/4 1 1/4-12 2 2.375 3/8 1 1/8 3 1/8 10 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 10 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 1/2 12 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 12 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 1/2 12 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 1/2 14 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 13/16 14 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 13/16 14 3 1/2 2 1/2-12 3 1/2

Electric Actuator/Slider Type

Note 12) For an actuator with lock, add the power consumption for the lock.

LEF-OM007xx

LEFS25S LEFS32S LEFS32 Speed 500mm/sec 0 [/min] LEFS40 Speed 500mm/sec 0 [/min] 10,000,000 20 [/min] 20 [/min] 10,000,000 30 [/min] 40 [/min] ISO4 50 [/min] ISO CLASS4 ISO5 ISO CLASS5 ISO6 1,000,000 ISO CLASS6 1,000,000 Particle concentration [particles/m3] Particle concentration [particles/m3] 100,000 100,000 10,000 10,000 1,000 1,000 100 100 10 10 1 1 0 0.1 0.2 0.3 0.4 0.5 0.6 Particle

C76

+0.036 0 10 +0.043 0 12 30 0 0.033 M30 x 1.5 G 1/8 30 58 23.8 10 M8 x 1 9 32 40 12.2 M10 x 1.5 38 0 0.039 M38 x 1.5 G 1/4 35 69 28.3 12 M10 x 1 12 14.2 M12 x 1.75 With Rod Boot (mm) AM C e f K KK Item h 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 77 90 102 115 140 165 190 88 101 113 126 151 176 201 Stroke Bore 32 20 12 35 30 10 M10 x 1.5 40 24 14 46 35 12 M12

C76

: (800) 258-9200-www.stevenengineering.com MB (mm) (mm) MB1 a 20 24 j 12 15 c 20 24 g 18 23 f 10 12 d 40 48 b 10 12 Thread e M10 x 1.5 M12 x 1.75 0 l3 14 16 Model GKM10-20A GKM12-24A Thread d3 M10 x 1.5 M12 x 1.75 h 43 50 d6 20 30 b3 b1 14 16 l 20 22 d7 19 22 Bore 32 40 Model KJ10DA KJ12DA Bore 32 40 dH71 10 12 10.5 12 13 13 CA2 CS1 C76 C85 Floating joint/Series JA JA25/40 C95 CP95 NCM NCA

VQ4000

44 62 9 9 91 44 62 Station number 50.5 59 2-Rc 1/8 (External pilot port) R4.5 R4.5 50.5 9 9 U side entry (LU) U side D side D side U side n 15 X X n X 12 12 12 12 8 B 2 A 4 B 2 A 4 8 Manual override 7 B 2 A 4 SMC SMC SMC SMC SMC SMC SMC B 2 A 4 7 A B A B A B A B A B A A A B A B A B A B A B A A SMC SMC SMC SMC SMC SMC SMC B B B A A A A A A A B A B 2 A 4 6 B 2 A 4 6 B B A A A A A A 215 15

LEC-OM02704CN

12 .2 12.1 .2 12.2 .3 12.3 .5 12.3.1 .5 12.3.2 .6 12.4 .7 12.5 .8 12 1 12 12 12.1 12.11(A50) 2(A51) 70% 04575 1000 1000 100 100 10 10 [s] [s] 1 1 0.1 0.1 0 50 150 200 250 300 100 0 50 150 200 250 300 100 ()[] ()[] LECSC-S5 LECSC-S7, LECSC-S8 . ()30r/min100% 12.1 12 2 12 12.2 (1) 12.1 12.1 1 (2)[W] (1) [m2] [kVA] LECSC-S5 LE-S5LE-S60.3 25 15 0.5 LECSC-S7 LE-S70.5 25 15

VQ5000

12 stations F 1 to 12 Manifold is 12 stations max.

Fieldbus System

A 14 A B A 14 A B A B A 14 A B A 14 A B 2 3 A 14 U side D side PWR OUT 0 1 4 5 Mounting 2 3 B 12 B 12 B 12 B 12 B 12 PCI BUS IN BUS OUT Nil D D0 D3 Direct mounting DIN rail mounting (With DIN rail) DIN rail mounting (Without DIN rail) 8 7 1 2 3 4 5 Valve stations I/O Unit stations 1 2 For 3 stations Specify a longer rail than the standard length.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Note 12) For the manufacture of intermediate strokes, please contact SMC.

VQ5000

Maximum stations are 12.

LEC-OM07605CN

PA03] 1 0:() 1:() 12 3 12. 12.3 15PN ONON 12.4 12 4 12. 12.4 (1) CN4 (2) LEC-MR-BAT6V1SETCN4 LEC-MR-BAT6V1SET LEC-MR-BAT6V1SET 12 5 12. 12.5 (MR Configurator2) Monitor"-"ABS Data Display" 12 6 13.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Refer to the terminal block connection instructions.) 12 stations maximum Piping specifications Applicable stations A, B port location Port size Series P, R A, B 3/4 3/8,1/2 Side 12 stations max.

LEC-OM02904

12.5 . 5 12 1 12 12 (AE3) LE-S6-LE-S7-LE-S812.1 1 ON/OFF CYC CYC LS LS 1 1 LS0 CYC0 LEC-MR-J3BAT MR-J3BAT 1pul se/rev 1pulse/rev 1 1 12 2 12 12.2.