CUJ

Table 2 Applicable auto switch models Refer to pages 11 to 14 for detailed specifications.

VPA4

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VPA4270-14 Port size VR VPA4150-04 Port size Applicable valve model Note) 3 position is not available on Series VPA470.

Digital Flow Switches

DOWN button ( button) Use to change the mode or decrease the set value. 32 Series PF2A/PF2W Functions Refer to the Instruction Manual for information on setting and operating. Flow rate measurement selection Output types Real-time flow rate and accumulated flow rate can be selected. A flow rate of up to 9 can be accumulated.

Mini-Rotary Actuator Series CRJ Rack-and-Pinion Type/Size: 05, 1

EA) 25 1.4 32 5.5 (mm) EA EB HA Size CRJU05 CRJU 1 6.6 5.6 33.8 6.5 5.6 35.8 7.5 3.1 (mm) Rotation angle Q S JC JD BA BD A BH J BB D JB H BE BG BI JA SD BC DD UU N BF CB W CA Size 32.4 21.5 43 90 CRJB05 13.5 M4 x 0.7 5 30 11 19.5 20 M4 x 0.7 5g6 3.5 14.5 6.5 17.1 7 5.8 3.4 9.5 10h9 28 12.5 3.5 5.5 4.5 43.4 27 54 180 37.4 24 48 90 CRJB 1 16.5 M5 x 0.8 6 35 14 23.5 22 M5 x 0.8 6g6 4.5 15.5

MHx-OMY0005

MHF2-8D MHF2-12D MHF2-16D MHF2-20D mm 8 12 16 20 MPa 0.150.7 0.10.7 oC -1060 mm 1) 0.05 120 c.p.m. 120 60 2) 1 N 19 48 90 141 8 12 16 20 () mm 16 24 32 40 32 48 64 80 65 155 350 645 85 190 445 850 3) g 120 275 650 1,225 1) 0.15mm 2) 0.5MPaL=20mm 3) 4 2 2-1 1. ( ) 2. 3. 4. 2-2. 1. 2. (1) (2) (3) 5 3. 4. 5. 6. (1) (2) ,2 , 7.

Digital Flow Switches

Refer to page 14 for details. 22 Series PF2W Flow Characteristics (Pressure Loss) PF2W704T,504T PF2W720T,520T PF2W740T,540T 0.030 0.05 0.07 0.025 0.06 0.04 Pressure loss (MPa) Pressure loss (MPa) Pressure loss (MPa) 0.020 0.05 0.03 0.04 0.015 0.03 0.02 0.010 0.02 0.01 0.005 0.01 Flow rate (l/min) 10 12 14 16 2 0 4 6 8 4.0 3.5 3.0 2.5 2.0 1.5 1.0 0.5 Flow rate (l/min) 40 35 30 25 20 15 10

Booster Regulator/Air Tank

Rc 3/8 EXH: Rc 1/4 60 OUT (328) Tank OUT port Rc 1/2 278 180 170 4 x 11 32 32 Drain port Rc 1/4 120 180 312 460 Connected to VBA20A Connected to VBA22A Tank IN port Rc 3/8 Booster regulator IN port Rc 3/8 Booster regulator IN port Rc 3/8 EXH: Rc 3/8 EXH: Rc 3/8 (454) 442 (417) Tank OUT port Rc 1/2 (367) (367) OUT OUT 278 180 180 170 4 x 11 4 x 11 32 32 120 180 180 120 Drain port Rc 1/4 312

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

Applicable Fluid Process Gas Molecular Formula Process Gas Molecular Formula Ar CClF3 Argon Halocarbon 13 C2Cl2F4 CF4 Halocarbon 114 Halocarbon 14 C2ClF5 CH2F2 Halocarbon 115 Halocarbon 32 C2F6 CH4 Halocarbon 116 Methane C2H2 CHF3 Acetylene Halocarbon 23 C2H2F4 CO2 Halocarbon 134A Carbon Dioxide C2HF5 H2 Halocarbon 125 Hydrogen C3F8 He Halocarbon R218 Helium C3H6 Kr Propene Krypton C3H8 N2

VS7-6

VS7-8-FG-S AXT510-12 AXT510-21 AXT510-13 AXT510-13 AXT510-13 AXT510-14-2 AXT510-14-2 AXT510-14-2 AXT510-14-1 AXT510-14-1 AXT510-14-1 MY-16N MY-16N MY-14N Description No.

Magnetically Coupled

Theoretical Cylinder Thrust Caution XB9 Low speed specification (0.6 to 2.0 inch/s) XB13 Low speed specification (0.3 to 2.0 inch/s) 6, 10 15, 20, 25, 32, 40 X116 Air Hydro specification 250 14 X132 Axial ports 40 (1-1/2") X160 High speed specification 12 32 (1-1/4") 10 (3/8") 200 X168 Helical insert thread specification 25 (1") 10 Theoretical thrust (Ibf) X206 Added mounting tap positions

Series AP3100

The connection may be a 1/8 inch NPT female thread or 10-32 female thread or M5 depending on the valve model. 3. After installation, check internal leakage (leakage across seat) with inert gases. Perform a helium leak test depending on applications. Maintenance Warning 1. If a valve requires repair, contact SMC. Operation (Air operate type) Warning 1.

CC

Turbine oil of ISO VG32 Figure 6 (Example) Idemitsu: Turbine oil P32 Nisseki: Turbine oil 32 Maruzen: Turbine oil 32 Mitsubishi: Mitsubishi turbine 32 Idemitsu: Dufny turbine oil Nisseki: FBK turbine 32 Maruzen: Turbine super 32 Mitsubishi: Diamond turbine oil 32 Piping UBefore connecting the pipes, remove any foreign matter.

5 Port Solenoid Valve Series SQ1000/2000

N1: 1/8 N3: 5/32 N7: 1/4 Top ports are indicated by LN.

Digital Flow Switches, Series PF2A, Series PF2W

Note 6) The display unit is comformed to CE mark. 14 Series PF2W Flow Characteristics (Pressure Loss) PF2W720, PF2W520 PF2W740, PF2W540 PF2W704, PF2W504 0.030 0.05 0.07 0.025 0.06 Pressure loss (MPa) 0.04 Pressure loss (MPa) Pressure loss (MPa) 0.020 0.05 0.03 0.04 0.015 0.03 0.02 0.010 0.02 0.01 0.005 0.01 0 0 0 10 12 14 16 2 0 4 6 8 40 35 30 25 20 15 10 5 0 4.0 3.5 3.0 2.5 2.0 1.5 1.0

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

Flow Rate and Effective Area AS1001F AS2001F AS3001F AS2051F AS4001F Model 3.2, 4, 6 4 6 6 8 6 8 10, 12 10 12 Metric size Tubing O.D. 1/8" 5/32" 3/16", 1/4" 3/16" 1/4" 1/4" 5/16" 3/16" Inch size 1/4" 5/16" 3/8" 3/8" 1/2" 5/32" Flow rate (l/min(ANR) 290 460 230 100 130 420 660 920 1050 1390 Controlled flow (Free flow) 4.5 7 3.5 1.5 2 6.5 10 14 16 21 Effective area (mm2) Note) Flow rate values

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

Flow Rate and Effective Area AS1001F AS2001F AS3001F AS2051F AS4001F Model 3.2, 4, 6 4 6 6 8 6 8 10, 12 10 12 Metric size Tubing O.D. 1/8" 5/32" 3/16", 1/4" 3/16" 1/4" 1/4" 5/16" 3/16" Inch size 1/4" 5/16" 3/8" 3/8" 1/2" 5/32" Flow rate (l/min(ANR) 290 460 230 100 130 420 660 920 1050 1390 Controlled flow (Free flow) 4.5 7 3.5 1.5 2 6.5 10 14 16 21 Effective area (mm2) Note) Flow rate values

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

port U10/32 port M3 port M5 port U10/32 port Meter-in type Meter-in type M3 port M5 port U10/32 port M3 port M5 port U10/32 port 15-9-4

Dedicated Controller Series LC1 Uniaxial Type

Mounting bracket Ass'y Mounting screws Controller model M3 x 0.5 LC1-1-N3 LC1-1B-N3 M5 x 0.8 LC1-1-N5 LC1-1B-N5 M3 LC1-1-L3 LC1-1B-L3 M5 LC1-1-L5 LC1-1B-L5 Note) This controller comes with either the T-nuts or T-brackets as accessories.

FREE MOUNT CYLINDER

(mm) d L 6 5 18 10 5 20 16 13 33 d 20 14 40 L 25 14 46 32 16 56 9/10 3. Maintenance ! Caution As a jig is required for bore size 6, do not disassemble when replacing seals etc. If overhaul is required, contact SMC Sales Office.

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

L1 L2 A(2) L3 H(1) T2 T1 D1 D2 Model AS1200-M3 M3 x 0.5 M3 x 0.5 4.5 6.6 23.5 21.5 8 5 5 20.5 18.5 AS1200-M5 M5 x 0.8 M5 x 0.8 25.5 8 10 28.3 10.3 9 9 25 22.2 AS1200-U10/32 10-32 UNF 10-32 UNF AS220-01 27.4 32.4 14.6 14.3 14.1 31.4 36.4 18 12 (12.7) 1/8 1/8 AS220-02 29.8 34.8 19.5 18 18 35.8 40.8 27.2 17 (17.5) 1/4 1/4 AS320-03 35.6 40.6 24.3 22.5 20.8 41.9 46.9 30 19 3/8 3/8 AS420-04 42.4