HRX-OM-R039

Weight9 kg 32 For option T : 39 *1 Use the product in conditions where freezing will not occur.

Vacuum System Peripherals:

32 e Valve Model Fill in the blanks below with symbols of necessary specifications.

Title not found

E 03 05 07 09 't't 5132" 1l4', 5/16' 3t8" 1/2" 6mm 8mm H , T , U , X , N 1 3 06 08 t0 1 2 1 6 32 i10-32 UNF Thread 3 5 I l t N P r H ' L . W , r .

Silencer Series AN

Performance Sonic conductance C [dm3/(sbar)] Effective area mm2 Weight g Recommended flow m3/min(ANR) Model AN500-06 AN600-10 AN700-12 AN800-14 AN900-20 32 12 or less 160 165 54 20 or less 270 220 88 30 or less 440 435 118 50 or less 590 510 192 80 or less 960 740 Note) Recommended flow rate is the flow at 72.5psi (0.5 MPa) in the inlet pressure.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

OFF: Lock is activated. 3 32 3.

3 Port Solenoid Valve/

Symbol M12 connector pin number Wiring specication G1/2 terminal number Wiring specication r w (32) (12) (11) q 12 11 (12) e w w (31) e (31) (11) r q 32 31 q e (32) r VP542(R)/742(R)-X536 Internal pilot External pilot External pilot/With check valve r (32) w (12) r (32) w (12) r (32) w (12) 2(A) 2(A) 2(A) (31) e (11) q (31) e (11) q (31) e (11) q 3(R) 1(P) 3(R) 1(P) 3(R) 1(P) Safety limit

Dual Speed Controller with One-touch Fitting Series ASD 1

Metric size Inch size With One-touch fitting 04 06 08 10 12 01 03 05 07 09 11 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT AS N ASP Bore size ASN M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AQ ASV AK ASS Needle Valve/Flow Characteristics (Inlet Pressure: 0.5 MPa) ASR ASD230F ASD330F ASD430F ASF 100 200 400 1.5

Modular Type Lubricators Series AL

Modular Type Lubricators Series AL AC-A Lubricator Series AL Model AF-A Port size Option AF-A AL10 M5 x 0.8 AR-A AL20 1/8, 1/4 AL-A AL30 1/4, 3/8 AW-A AL40 1/4, 3/8, 1/2 Bracket AC AL40-06 3/4 AF AL50 3/4, 1 AF AL60 1 Pages 508 through to 513 AR AL AL AW AG E AV AF 507 Lubricator AL10 to AL60 Symbol Lubricator AL20 AL40 How to Order AL 30 03 B Option/Semi-standard: Select one each for a

LEC-OM02904

) 36) 32) () 10m IP65 LEC-MR-J3BAT DC24V LE-CNP3 1. 3.5kW5kW 11 3 11 No.

AS-FG

Note) Metric size Inch size 23 04 06 08 10 12 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Port size AS-FE KE 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 3.2 4 6 8 10 12 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 N AS-FG AS-FG AS-FP AS-FM Note) For applicable tubing O.D. selection, refer to the Model on page 542. Use 1/8" tube.

AS-FG

Metric size Inch size Meter-out Meter-in 0 1 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 03 05 07 09 11 13 23 04 06 08 10 12 4 6 8 10 12 With One-touch fitting Stainless steel specifications (SUS303) Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Use 1/8" tube.

AS-FG

Note) Metric size Inch size 23 04 06 08 10 12 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Port size AS-FE 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 3.2 4 6 8 10 12 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 KE N AS-FG AS-FG AS-FP Note) For applicable tubing O.D. selection, refer to the Model on page 680. Use 1/8" tube.

Body Size: 2 (M5), Socket, Plug Type: P (Plug), Port Size: M5 (M5 X 0.8), Connection: F (Female Thread)

Body Size: 2 (M5), Socket, Plug Type: S (Socket), Port Size: M5 (M5 X 0.8), Connection: F (Female Thread)

Type: Standard, Body Material: C36000 Brass, Compatible Fluid: Water / Air, Valve Structure: Single Passage Opening/Closing, Thread Type: Female Threaded Tapped, Operating Environment Application: Standard, Size of Body: M5, Pipe Connection Bore Dia.: M5 × 0.8, With or Without Check Valve: Yes

Type: Standard, Body Material: C36000 Brass, Compatible Fluid: Water / Air, Male/Female: Plug, Valve Structure: Single Passage Opening/Closing, Thread Type: Female Threaded Tapped, Operating Environment Application: Standard, Size of Body: M5, Pipe Connection Bore Dia.: M5 × 0.8, With or Without Check Valve: No

Type: Standard, Body Material: C36000 Brass, Compatible Fluid: Water / Air, Valve Structure: Single Passage Opening/Closing, Thread Type: Female Threaded Tapped, Operating Environment Application: Standard, Size of Body: M5, Pipe Connection Bore Dia.: M5 × 0.8, With or Without Check Valve: Yes

Type: Standard, Body Material: C36000 Brass, Compatible Fluid: Water / Air, Male/Female: Plug, Valve Structure: Single Passage Opening/Closing, Thread Type: Female Threaded Tapped, Operating Environment Application: Standard, Size of Body: M5, Pipe Connection Bore Dia.: M5 × 0.8, With or Without Check Valve: No

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

A L D VQZ D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 VQD Color: White VZS VFS EXH port silencer VS 63 Silencer is installed in the EXH port.

5 Port Solenoid Valve Series SV

-01-06 AS2200-01 100 50 0 ANA1 -C08 T0604 200 CM2 32 150 Stroke mm AS2201F -01-06 AS2200-01 100 50 0 200 CM2 40 150 Stroke mm AS2201F -02-06 AS2200-02 100 50 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details regarding different conditions, make determinations after using the P/A