Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 17 Stations, A B Port Size: 5/32" One-touch Fitting NPTF, P R Port Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 18 Stations, A B Port Size: Base Mounted M5X0.8, P R Port Thread: NPTF

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 18 Stations, A B Port Size: 5/32" One-touch Fitting NPTF, P R Port Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 19 Stations, A B Port Size: Base Mounted M5X0.8, P R Port Thread: NPTF

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 19 Stations, A B Port Size: 5/32" One-touch Fitting NPTF, P R Port Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 20 Stations, A B Port Size: ø4 One-touch Fitting, P R Port Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 20 Stations, A B Port Size: Base Mounted M5X0.8, P R Port Thread: NPTF

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 20 Stations, A B Port Size: 5/32" One-touch Fitting NPTF, P R Port Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 4 Stations, A B Port Size: ø4 One-touch Fitting, P R Port Thread: NPT

Process Pump

Thread type Note 2) Symbol Nil N F Type Rc NPT G Port size Symbol 06 Port size 3/4" Tube extension 0 PAF541 P19 Option Actuation Note 1) Applicable actuation Automatically operated Air operated Symbol 0 3 Actuation Symbol Option Automatically operated Air operated Nil N None With silencer For AIR EXH: AN20-02 (: Either Nil or N is entered as a thread symbol.)

Electro-Pneumatic Proportional Valve

Analyzer, instrumentation Specifications PVQ10 03: 0.3, 04: 0.4, 06: 0.64, 08: 0.8 Model PVQ30 16: 1.6, 23: 2.3, 40: 4.0 Orifice (mm) Fluid Ambient and fluid temperature Port size Max. operating pressure (MPa) Hysteresis Repeatability Proof pressure Rated voltage Power consumption Coil insulation Air, inert gas 0 to +50oC M5 03: 0.7, 04: 0.45, 06: 0.2, 08: 0.1 Rc 1/8 16: 0.7, 23: 0.35, 40

Quick Exhaust Valve Series AQ

01 02 03 04 06 M5 x 0.8 AQ1500 AQ1510/2000 AQ2000/3000 AQ3000 1 8 Standard 1 4 0 1 M5 x 0.8 8 3 1 8 Note) AQ150 only 1 2 AQ5000 3 4 Thread type Metric thread (M5) Rc NPT G Nil N F Caution Be sure to read before handling.

AQ

01 02 03 04 06 M5 x 0.8 AQ1500 AQ1510/2000 AQ2000/3000 AQ3000 1 8 1 8 Standard 1 4 0 1 M5 x 0.8 8 3 1 2 Note) AQ150 only AQ5000 3 4 Thread type Metric thread (M5) Rc NPT G Nil N F 554

AS

AS Series How to Order 2 2 0 01 06 W2 AS 1F Body size 2 1 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard 3 4 Metric size Applicable tubing O.D. Note) Elbow 06 08 10 12 6 8 10 12 Control type Meter-out Meter-in 0 1 Note) For applicable tubing O.D. selection, refer to the Model on page 603.

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

ASN AQ ASV AK How to Order VCHC F S 1 0 03 06 3 2 AS ASR ASQ Hexagon lock nut Round lock nut J Nil Lock nut option Speed controller Option None Electroless nickel plated Nil N Body size 1 2 3 4 M5 standard 01, 02 standard 03 standard 04 standard Tube size Note) With seal 4 6 8 10 12 04 06 08 10 12 Made to Order Refertopage612for details.

KK

fitting Elbow with One-touch fitting Bulkhead with One-touch fitting Symbol M F N H L E Socket/Plug designation S P Socket Plug Piping port size variation Male/Female thread type One-touch fitting type Nut fitting type Thread size M5 x 0.8 R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 R, Rc 3/4 Symbol M5 01 02 03 04 06 Symbol 23 04 06 08 10 12 16 Symbol 50 60 65 80 85 110 Applicable tubing O.D

Booster Regulator Series VBA1110 to 4200 1

AM550-06, 10 P. 14-20-16 Mist separator 35 dB or more of noise reduction AMC310-03 AMC510-06 AMC610-10 Exhaust cleaner VBA2200-03 Air operated type VBAT05 (5 l, Directly connected to booster regulator) VBAT20 (20 l, Directly connected to booster regulator) VBAT38 (38 l, Directly connected to booster regulator) JIS Symbol Air tank VBAT10 (10 l, Directly connected to booster regulator) Handle

Regulator AR30 to 60

AR30 Option Thread type Port size Symbol Nil B E G P Applicable models AR30 to 60 AR30 to 60 AR30 to 60 AR30 to 40 Contents With bracket With square embedded type pressure gauge (with limit indicator) Round pressure gauge (with limit indicator) Panel mount (with set nut) Metric thread (M5) Rc NPT G Nil Note 1) 1 4 02 03 04 06 10 N F 3 8 Note 2) 1 2 3 4 1 Note 1) Bracket assembly is not

Filter Regulator AW30, 40

Applicable model AW30 AW40 AW40-06 Model Port size Fluid Proof pressure Maximum operating pressure Regulating pressure range Pressure gauge port size Relief pressure Ambient and fluid temperature Nominal filtration rating Drain capacity (cm3) Bowl material Construction Weight (kg) AW40-06 AW40 AW30 1 4 3 8 , 4 3 1 2 1 4 3 8 Accessory , , Air 1.5MPa 1.0MPa 0.05 to 0.85MPa Note 1) Bracket assembly

AS

ASD Model Meter-out type Rod and applicable tubing O.D. 4 10 8 6 Meter-in type AS1000P-04-04 AS2000P-04-04 AS2000P-06-06 AS2500P-06-06 AS3000P-08-08 AS3000P-10-10 AS1010P-04-04 AS2010P-04-04 AS2010P-06-06 AS2510P-06-06 AS3010P-08-08 AS3010P-10-10 AS AS-FE KE The lock nut provides identification.