AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel (SUS304) M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

02 03 Indicator light 300 89.5 (Lead wire length) Cross section 0.23 mm2 Cover diameter 1.5 Pg.7 55 <60> 92.5 Max. 10 Applicable cable O.D. 3.5 to 7 Indicator light < >: AC 78.5 86 M plug connector (M): VQZ35(R)-M02 03 (Lead wire length) Cross section 0.23 mm2 Cover diameter 1.5 62 <67> 300 95 Indicator light 83.5 < >: AC 4-14-32 33 3 Port Solenoid Valve Metal/Rubber Seal, Base Mounted,

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

) 56.5 54.5 26.5 A port 20.5 17.5 11.5 11.5 9 PE port M5 X 0.8 External pilot port (Only external piot style (R)) 19 14 (Rc(PT)1/4) (Rc(PT)1/4) 3-Rc(PT)1/4,3/8 P/A/R port 21 13 (Rc(PT)3/8) (Rc(PT)3/8) DIN terminal (Y): VQZ3l5(R)-lYl02 03 02 03 L plug connecter (L): VQZ3l5(R)-lLlIndicator light 88.5(89.5) 300 (Lead wire) Cover dia 1.5 Cross section 0.23mm2 Pg.7 56.5(60) 92.5 MAX.10 Applicable

Air Cylinder

10 26 0 0.033 13 10.5 8 45 6 33.5 5.5 8 M10 x 1.25 30 M26 x 1.5 1/8 32 22 19.5 17 32 12 26 0 0.033 13 10.5 8 45 6 37.5 5.5 10 M10 x 1.25 34.5 M26 x 1.5 1/8 40 24 21 22 41 14 32 0 0.039 16 13.5 11 50 8 46.5 7 12 M14 x 1.5 42.5 M32 x 2 1/4 With Rod Boot (mm) (mm) B3 e h Bore size S TD TT TX TY TZ Z ZZ 20 62 8 10 32 32 52 36 116 25 62 9 10 40 40 60 40 120 32 64 9 10 40 40 60 40 122 40 88 10

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

40 50 63 80 100 125 AB E1 TR AH AO AT XA R 0.2 0.6 0.2 0.6 0.2 0.6 0.2 0.6 0.2 0.6 0.2 0.6 0.5 1.2 48 32 32 10 4.5 7 142 144 32 64 7 50 79 16 10 130 45 26 26 10 12 9.5 142 65 55 36 36 11 4.5 10 161 163 36 72 9 55 90 20 10 145 52 28 28 12 15 12 160 75 68 45 45 12 5.5 10 170 175 45 90 9 70 110 25 12 155 60 32 32 12 15 12 170 80 80 50 50 12 5.5 10 185 190 50 100 9 80 120 25 12 170 70 40 40

C95

Contents CK95-32 CK95-40 CK95-50 CK95-63 CK95-80 CK95-100 32 40 50 63 80 100 Kits include items 13 to 17 for 32, 12 to 18 for 40 to 100 from the table above.

MNB

Auto Switch Mounting Bracket Part No. 32 40 50 63 80 100 Auto switch model Bore size (mm) Bore size (mm) 40 32 50 63 80 100 Foot (1) MNB-L06 MB-L03 MB-L04 MB-L05 MB-L08 MB-L10 D-A5/A6 D-J5/F59F Flange MNB-F03 MNB-F04 MNB-F05 MNB-F06 MB-F08 MB-F10 BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 Single clevis MB-C08 MB-C10 MB-C03 MB-C04 MB-C05 MB-C06 D-A3/A44 D-G39/K39 BMB2 -032 BMB2 -040 BMB1 -050 BMB1

MNB

Auto Switch Mounting Bracket Part No. 32 40 50 63 80 100 Auto switch model Bore size (mm) Bore size (mm) 40 32 50 63 80 100 Foot (1) MNB-L06 MB-L03 MB-L04 MB-L05 MB-L08 MB-L10 D-A5/A6 D-J5/F59F Flange MNB-F03 MNB-F04 MNB-F05 MNB-F06 MB-F08 MB-F10 BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 Single clevis MB-C08 MB-C10 MB-C03 MB-C04 MB-C05 MB-C06 D-A3/A44 D-G39/K39 BMB2 -032 BMB2 -040 BMB1 -050 BMB1

MNB

Note 1) l (Drill through) Cotter pin d D m Dd9 L H B C 3 x 18l 4 x 25l 4 x 35l M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 16.5 21 26 31 39 10 14 22 32 40 50, 63 80 100 32, 40 50, 63 80, 100 36 51 72 4 4.5 5 3 4 4 44 60 82 6 8 11 13 16 17 22 27 32 41 19.6 25.4 31.2 37.0 47.3 NT-03 NT-04 NT-05 NT-08 NT-10 CD-M03 CD-M05 CD-M08 -0.040 -0.076 -0.050 -0.093 -0.065 -0.117 Note 1) A cotter

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

For details, please contact SMC. 3-11-17 18 Manifold Specifications Standard Specifications ISO Size 1 ISO Size 2 ISO Size 1 Maniflod block size VSR/S8-6 VSR/S8-8 VSR/S8-6 Applicable solenoid valve 1 to 10 Number of stations 1/4, 3/8, 1/2, 3/4, 1 A, B port Port size 1/4, 3/8, 1/2, 3/4, 1 P , EA, PB port VV82-P-03/04/06 VV81-P-02/03/04 Individual SUP spacer VV82-R-03/04/06 VV81-R-02/03/04

Modular F.R.L. Units

-03-A (04)-A Y610-(03)-A 04-A 02A VHS40-03A 04A VHS40-06A VHS50-06A 10A Pressure relief 3 port valve 6 VHS20-01A 02A VHS30-02A 03A Attachment 02-A E400-03-A 04-A 06-A Piping adapter 6 E100-M5-A 01-A E200-02-A 03-A 02-A E300-03-A 04-A E500-06-A E600-06-A 10-A 02-A IS10E-4003-A 04-A 06-A Pressure switch with piping adapter 6 01-A IS10E-2002-A 03-A 02-A IS10E-3003-A 04-A Cross spacer 6 Y14

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

AS121FM-U10/32-01 AS121FM-U10/32-03 AS121FM-U10/32-05 AS121FM-U10/32-07 AS221FM-N01-01 AS221FM-N01-03 AS221FM-N01-05 AS221FM-N01-07 AS221FM-N01-09 AS221FM-N02-03 AS221FM-N02-05 AS221FM-N02-07 AS221FM-N02-09 AS221FM-N02-11 1/8" 5/32" 3/16" 1/4" 1/8" 5/32" 3/16" 1/4" 5/16" 5/32" 3/16" 1/4" 5/16" 3/8" 8.4 9.3 11.4 12 12.7 22.1 12.3 17.3 7 9.6 30.1 28.8 25.1 8 33.8 10-32 UNF 16.5 13.5 26.1 23.1

NCA1

0 1/2 1.57 27/64 3.32 1 3/8 2.34 4.64 2.72 9.38 (in) Bore (in) b c d SN NT ND TN 150 (1.5) 1 1/2 1.25 1.80 2 1/4 1/4-20 9/32 5/8 200 (2) 1 21/32 1.64 2.19 2 1/4 5/16-18 7/16 7/8 250 (2.5) 1 21/32 1.64 2.19 2 3/8 3/8-16 19/32 1 1/4 325 (3.25) 2 9/32 2.48 3.37 2 5/8 1/2-13 5/8 1 1/2 400 (4) 2 9/32 2.48 3.37 2 5/8 1/2-13 5/8 1 3/8 37 Series NCA1 Medium Duty Air Cylinder Adjustable Stroke Return

I

www.stevenengineering.com I 7.24 INSTRUMENTATION ELECTRO-PNEUMATIC REGULATOR D I M E N S I O N S S E R I E S VY140 0 102 03 04 D I M E N S I O N S S E R I E S VY150 0 102 03 04 D I M E N S I O N S S E R I E S VY170 0 110 12 D I M E N S I O N S S E R I E S VY190 0 114 20 Courtesy of Steven Engineering, Inc. ! 230 Ryan Way, South San Francisco, CA 94080-6370 !

VQ5000

U D U D Kit/Electrical entry/Cable length F L Cylinder port kit (D-sub connector) kit (Lead wire cable) 03 04 B CM Rc 3/8 Rc 1/2 Bottom ported Rc 1/2 Mixed Note) Note)In case of mixed specification, indicate on the manifold specification sheet. .

AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel 304 M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel plated

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel (SUS304) M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel

125

. * The load ratio is obtained by the following formula: ((Load mass x 9.8)/Theoretical output) x 100% VEX VEX Conditions System Solenoid valve Speed controller Silencer Tubing diameter x Length A VEX31 22-02 AS4000-02 AN20-02 10 x 1 m B 12 x 1 m C VEX33 42-03 04 AS420-03 AN30-03 12 x 1 m D AS420-04 AN40-04 SGP15A x 1 m 1723 3 Port 3 Position Valve Body Ported VEX3 Series How to Order Air

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric size Inch size Nil S Resin Stainless

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

21.7 21.7 Screw-in connection S type: White color L type: Black color (Mounting hole) B C D E F G H Model A 3 8 Rc3 8 Rc3 8 Rc3 8 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1 2 Rc1 2 ZH18DS-03-03-03 ZH18DL