EX260-SEC-A_eng (SI unit side) Valve manifold Output No. 1 3 5 7 9 17 29 31 Solenoid on side B Accessories Bit No. 1 3 5 7 1 1 5 7 Replacement of the SI unit Remove the M3 hexagon screw from the SI unit and release the SI unit from the valve manifold. Replace the SI unit.
Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations
BUS IN BUS OUT DRAIN 1 1 1 5 4 3 2 5 4 3 2 V+ 2 2 2 0 0 0 Bit No. 6 4 6 4 3 VSolenoid on side A Output No. 0 2 4 6 8 16 28 30 CAN_H 4 Side D 5 CAN_L (SI unit side) To obtain more detailed information about operating this product, please refer to the SMC website (URL http://www.smcworld.com) or contact SMC directly. 4 5 Solenoid on side B 1 3 5 7 9 17 29 31 Output No.
M3 hexagon screw Tightening torque 0.6 Nm Troubleshooting If using the product in an interlocking circuit: Provide a double interlocking system, for example a mechanical system. Check the product regularly for proper operation.
Please download the Operation Manual via our website: https://www.smcworld.com 18 HRLE Series Options Option symbol C With Inverter for Compressor HRLE090 C With inverter for compressor The inverter for compressor increases the cooling capacity of the 50 Hz area to that of the 60 Hz area.
E BD 75st, 100st Larger than 100st 37 57 63.5 64 75st, 100st Larger than 100st 50st 25st 50st 25st 50st 75st, 100st 25.50st Larger than 50st 25.50st Larger than 50st 25st Larger than 100st 114 134 160 180 25.50st Larger than 50st 147 168 188 93 63 80 100 63 80 100 41 45.5 46 118 142 162 106.5 115 137 172 198 233 20 25 30 16 160.5 171 208 29.5 18.5 21 25 30 36 109.5 121 130 147 13 5 33.5 31
(LEC)7.1 RWwn [bit0-7]1 (LEC) (RWrn+8[bit 8])1 INP(Rx8B)1 INP (LEC*6)6.3 IO RWwn [bit0-7]0(RWrn+8[bit 8])0 () INP 31 - 11.4 (LEC) IO No (LEC*6) IO IO (LEC) RWwn [bit8-F]0 RWwn+18 (LEC)7.1 RWwn [bit0-7](063) RWwn [bit8-7](LEC) (RWrn+8[bit 8])1 RWwn [bit8-F]0(RWrn+8[bit 8])0 32 - 12. 12.1 [IN] () IO ID No Rx00Rx2F Modbus Rx30Rx7F Rx80 OUT0 Rx81 OUT1 Rx82 OUT2 Rx83 OUT3 Rx84
40.7 41.2 54 46.5 5 10 10 11 18 16 24 43 47 40 79 87 85 2.8 5/32 12.7 2.8 6.5 6.5 6.5 11.11 13.6 1/4 H 14.29 17 M 14.29 5/16 18.5 A 14 42 L 17.46 54.2 47.2 49.2 60.5 54.5 17.46 24 3/8 21 22.23 34 1/2 22.23 22 Connection thread Reference dimension after screwing into NPT threads.
How to Order VS31 3 02 1 5 Thread type Caution Nil Rc N NPT Standard 3 Body size For Safety Instructions and Solenoid Valve Precautions, refer to pages 4-18-2 to 4-18-6.
40.7 41.2 54 46.5 5 10 10 11 18 16 24 43 47 40 79 87 85 2.8 5/32 12.7 2.8 6.5 6.5 6.5 11.11 13.6 1/4 H 14.29 17 M 14.29 5/16 18.5 A 14 42 L 17.46 54.2 47.2 49.2 60.5 54.5 17.46 24 3/8 21 22.23 34 1/2 22.23 22 Connection thread Reference dimension after screwing into NPT threads.
Switch connection side 0.5m Load connection side 0.5m 4.4 3.4 CD-P SWITCH 18 9 VOLT 38 46 3.4 15.5 Contact protection box connection To connect a switch unit to a contact protection box, connect the lead wire from the side of the contact protection box marked SWITCH to the lead wire coming out of the switch unit.
5 11 11.6 22 38.4 11.6 0.75 6000 JS63-18-150 M18 x 1.5 74.5 23 41 7 14 14.3 27 49.2 14.3 1 11000 3
Product Specifications . 18 4-1. Magnet gripper . 18 4-2. 3-port solenoid valve . 19 4-3. Auto switch . 20 5.Operating method or operation . 21 5-1Precautions for Design . 21 5-2. Installation . 22 5-3. Wiring example to robot controller (common to NPN/PNP) . 28 5-4.YASKAWA Plug & Play Kit . 29 5-4-1. Installing YASKAWA Plug & Play Kit . 29 5-4-2. Tool Presets . 34 5-4-3.
17 K 15 15 L N Rc 1/16 Rc 1/8 M 31 40 Model Port size Rc 3/8 Rc 1/2 VBA2100-03 VBA4100-04 20 14-9-6 7 Booster Regulator Series VBA1110 to 4200 Air Operated Type VBA2200-03, VBA4200-04 I Pressure gauge (Option) Pilot port IN port F.R.L.
mouting hole Applicable flange Pilot port Rc A Model L K J H F E D C B VNC5-32F VNC6-40F VNC7-50F 1 8 1 4 1 4 32 40 50 278 293.5 317.5 310.5 326 350 12 12 14 36 42 54 100 105 120 20 24 24 134 146 162.5 135 140 155 210.5 226 250 130 150 180 Flange Type Port size: 65F, 80F Electrical entry hole: G1/2 Manual override (Non-locking) 4 x 2-18 mouting hole (80F: 8 x 2-18) Model Applicable flange
2 x 3.4 33 IZH 30 30 52 46 44 26 17 11 40 5 8 x 3.4 20 26 12 2 x Hexagon socket head cap screw M3 x 6 (Accessory) Internal mounting Pivot mounting 21 33 (Mounting angle adjustable range) (90) 61 61 30 Pivoting bracket/IZN10-B2 20 3.4 56 64 28 20 (Mounting angle adjustablerange) 20 9.5 9 90 24 3.4 4 14 40 2 x Hexagon socket head cap screw M3 x 16 59 11 (Accessory) 18 457 IZN10 Series Dimensions
Relation between Operating Temperature and Maximum Operating Pressure Particulate Generation Classifications 105 1.2 Particle concentration (Particles/m3) Maximum operating pressure MPa ISO class 6 1.0 104 ISO class 5 0.8 103 ISO class 4 0.6 102 ISO class 3 0.4 10 0.2 0.1 0.5 1 1 0 -5 0 20 40 60 Operating temperature C Particle diameter (m) Note) Refer to SMC Pneumatic Clean Series (CAT.E02
A B 18 - 43 Timing diagram (Example) The figure shows the timing diagram of operation for the selected step data input type and the PLC parallel input/ output signals used when power is supplied.
Material Cover Front rim Retaining rim Description Part no. includes M3 X 8 tapping screws (2 pcs.)
(MPa) Pressure drop (MPa) Max. flow line Max. flow line HA AT ID Air flow rate (m3/min (ANR)) Air flow rate (m3/min (ANR)) Air flow rate (l /min (ANR)) AMG AFF220A 4 1 2 AFF11B B B AFF 0.1 MPa Max. flow line AM 0.3 MPa Misc.