Precision: Basic, Size: 50mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, 0.5M, Lead Wire or Prewired Connector: 1m, Number: 3 pcs.

Digital Flow Switch (Remote type sensor unit)

Fitting type E P T U Union elbow Panel mount union Union tee Union Specifications Model PF2D504 PF2D520 PF2D540 11: max. +20 g 13: max. +30 g 19: max. +65 g 1113: max. +25 g 1319: max. +45 g 1925: max. +90 g Weigh (included lead wire) 1311: max. +25 g 1913: max. +45 g 2519: max. +90 g 13: max. +30 g 19: max. +65 g 25: max. +115 g : Other specifications are equal to standard product. -25No.PF-OMG0006

LFE-OMZ0013

Definition and Terminology 11 Mounting and Installation 13 Installation 13 Wiring 14 Setting the Detected Flow Rate 17 Function Setting 19 Default Setting 19 F 0 Selection of sensor 21 F 1 Setting of OUT1 22 F 2 Setting of OUT2 30 F 3 Response Time 36 F10 Sub screen display 37 F20 External input 41 F22 Analogue Output in free range 42 F30 Accumulated flow value hold 44 F80 Power saving mode 45

High Vacuum L Type Valve

H4 S y m b o l Initial power / Power 100 VAC 200/40 200/50 200 VAC 800/40 800/50 consumption (W) Heater assembly number XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. H5 Initial power / Power 100 VAC 200/40 400/70 400/80 200 VAC 800/40 1600/80 1600/80 consumption (W) Note 1) Initial power and power consumption are nominal values.

Electric Actuator / Rod Type Dust-tight / Water-jet-proof (IP65 Equivalent / IP67 Equivalent)

562 to 1058 Actuator specifications Speed [mm/s] Note 4) 18 to 400 9 to 200 5 to 100 24 to 400 12 to 200 6 to 100 24 to 400 12 to 230 6 to 110 Max acceleration/deceleration [mm/s2] 3,000 Pushing speed [mm/s] Note 5) 35 or less 30 or less 30 or less Positioning repeatability [mm] +/0.02 Lost motion [mm] Note 6) 0.1 or less Lead [mm] 12 6 3 16 8 4 16 8 4 Impact resistance/vibration Resistance

Vacuum regulator

-1.3kPa Withstand pressure Note2) 100 kPa(Except with pressure gauge) Knob resolution 0.13kPa or less Atmospheric intake consumption Note3) 0.6L/min(ANR) or less Ambient and fluid temperature 5 to 60 VAC side tubing O.D 68 6810 1/45/163/8 SET side tubing O.D 1/45/16 Standard connections 135g(IRV10-C08) 250g(IRV20-C10) Weight (No accessories) Single sided connections 125g(IRV10A-C08) 250g

Stainless Steel Heat

Assembly is required. 7 Technical Data Pressure dew point Condensed water calculation Atmospheric pressure 45 Relative humidity 100% 40 0.1MPa Amount of water in air g /m3 35 80% 60% 0.2 40% 0.3 0.4 0.5 30 0.6 0.7 0.8 25 Amount of condensed water 20% 3 8 1.0 18.2 3.0 = 15.2g/m3 20 2 3 4 1.5 15 10 5 8 7 3.0 1 6 0 5 Intake air temperature C (atmospheric pressure) Air temperature (Pressure

CJ5-S

Stainless Steel Cylinder Se ries CJ5-S 10, 16 How to Order Bore size Standard stroke (mm) 10 16 10 16 10mm 16mm 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Mounting Basic type Axial foot type Front flange type Double clevis type B L F D CJ5 L 16 S R 60 Without Auto Switch CDJ5 L 16 S R 60 H7BAL With Auto Switch With auto switch (built-in magnet) Number of

AMR3000 to 6000

N Bracket dimensions With auto-drain Model Port size A B C D E F G H J K L M U (Body) V (Adapter) L 178 211 277 321 B 260 298 366 436 T 9 9 11 11 S 8 16 21 26 R 78 97 98 115 P 50 35 45 46.5 1/4, 3/8 1/4, 3/8, 1/2 1/2, 3/4 3/4, 1 1/4, 3/8 1/4, 3/8, 1/2 1/2, 3/4 3/4, 1 AMR3000 AMR4000 AMR5000 AMR6000 100 120 130 160 180 210 246 290 264 302 370 440 10 10 45 70 101 121 131 161 51 61 66 81 28

VVX31/32/33

% % :; S Note) 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) How to Order Manifold Arrangement of solenoid 9= Write both the base part number and the solenoid valve to be mounted or blanking plate part number. !"

CDQ2BP series

SealKir 25, 30, 35, 40. 45, 50, 75, 100 25 30,35,4A, 45,50.75, tOD 25, 30, 35.40, 45, 50, 75, 100 .Ho{ to make interrediaie slroke rtrmediale stroke berwen 50-l0o (5s,60,65 ...) are obtained throlgh the use ol spaceB (5. 10, 1s,20mm) (Example) CDQBPSo-55 oMr S[4C would install a 20mrn width spacer in rire cDQ2Bp 50 750M. ll lool brackel is required, order 2 pcs/cylindef.

Stainless Steel 316

FEP, PFA, Nylon, Soft nylon Note 1), Polyurethane Note 2) Note 3), Polyolefin 4, 6, 8, 10, 12 Specifications Air, Water, Steam Note 3) Note 4) Fluid Operating pressure range Note 5) 100 kPa to 1 MPa 3.0 MPa 5 to 150C (No freezing) Grease-free specification With sealant Proof pressure Ambient and fluid temperature Note 6) Lubricant Seal on the threads Note 1) For soft nylon tubing, water cannot

H/DL/L/LL

DL08-01 18 32 19 8 14 DL08-02 16 21 38 14 12 24.5 DL08-03 22 54 26.5 31 10 17 DL10-02 23 51 Connection thread 26.5 14 DL10-03 17 22 57 DL10-04 27 28.5 100 DL12-02 25 76 17 43 12 19 28.5 DL12-03 17 26 85 DL12-04 27 17 Union Tee: DT H1 (width across flats) H2 (width across flats) Applicable tubing O.D.

AP500

) Derivery pressure (kPa) 600 -21 500 -35 400 -48 300 -61 200 -75 100 -88 0 -101 0 1 2 3 4 5 6 7 8 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

OMS0020

65 41 A 97 61 a 2 2 STX 34 22 " 66 42 B 98 62 b 3 3 ETX 35 23 # 67 43 C 99 63 c 4 4 EOT 36 24 $ 68 44 D 100 64 d 5 5 ENQ 37 25 % 69 45 E 101 65 e 6 6 ACK 38 26 & 70 46 F 102 66 f 7 7 BEL 39 27 ' 71 47 G 103 67 g 8 8 BS 40 28 ( 72 48 H 104 68 h 9 9 HT 41 29 ) 73 49 I 105 69 i 10 0A LF 42 2A * 74 4A J 106 6A j 11 0B VT 43 2B + 75 4B K 107 6B k 12 0C FF 44 2C , 76 4C L 108 6C l 13 0D CR 45 2D

IDX-OM-O004C

. / 3.3 OFF 3.4 3 3 5 3.5 OFF 3.6 24 3 2 4. 4 4.1 5 310 4.2 4.2.1 () 4.2.2 1 () (T) 100 2 () 100 4.2.3 IDF-S0002 1 4 1 4. 4.2.4 AD48 1 0 OFF 501015 ( OFF IN/OUT 4 2 4.

PSxx-OMS0006CN

No.PS-OMS0006CN-G / / ZSE20(F) ISE20 2 8 10 11 14 14 16 18 [] 20 21 3 22 24 26 26 26 F0 28 F1 OUT1 29 F3 32 F4 33 F6 35 F10 36 F11 41 F80 42 F81 43 F82 45 F90 46 F98 48 F99 49 50 54 54 55 62 62 64 -1No.PS-OMS0006CN-G *1) (ISO/IEC)(JIS) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules

Digital Pressure Switch

When 1 digit = 1 kPa, the pressure is given with an increment Digit (Minimum setting unit) of 1kPa, e.g., 1, 2, 3, , 99, 100. Function to add digital filtering to the fluctuation of pressure value. Smooth the fluctuation of displayed value and analogue output for sharp start up or fall of the pressure.

Compact Cylinder High Magnetic Field Design CDQ2BP Series

SealKir 25, 30, 35, 40. 45, 50, 75, 100 25 30,35,4A, 45,50.75, tOD 25, 30, 35.40, 45, 50, 75, 100 .Ho{ to make interrediaie slroke rtrmediale stroke berwen 50-l0o (5s,60,65 ...) are obtained throlgh the use ol spaceB (5. 10, 1s,20mm) (Example) CDQBPSo-55 oMr S[4C would install a 20mrn width spacer in rire cDQ2Bp 50 750M. ll lool brackel is required, order 2 pcs/cylindef.

Heat Resistant 2-Color Indicator

Specications [mm] Table 1 Cylinder Strokes Bore size Stroke 16 15, 20, 25, 30 20, 25 15, 20, 25, 30, 35, 40, 45, 50 32 to 63 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Ambient and uid temperature range 32 to 302F [0 to 150C] Seal material Fluororubber Grease Heat resistant grease Standard stroke See Table 1. Dimensions See below.