HRX-OM-S004

Max. 2s 2s 1s 1s Min. 0.5s 0.5s 0.2s 0.2s 0.1s 0.1s 0.05s 0.05s 0.02s 0.02s 0.01s 0.01s 6000 100 125 200 300 400 500 700 1000 1500 2000 30004000 10 100 125 200 300 400 500 600700 1000 1500 2000 3000 4000 600 5000 7000 Current (% for breaker capacity) Current (% for breaker capacity) For HRS100-A/W-20-B For HRS150-A/W-20-B HRS100-A/W-40, HRS150-A/W-40 4h 2h 1h 30min 20min 14min 10min 6min

Rubber seal 5 Port Solenoid Valve Series SYJ5000

For 1/8 For C6/N7 42 Series SYJ5000 C4 N3 Type 43: Side Ported/SS5YJ3-43Stations [ ]: AC Grommet (G) Approx. 300 (Lead wire length) L1 L2 4.5 Manual override 2-5.5 (For mounting) 12 1/8 (P, R port) 62.7 [64.9] 62.1 [64.3] 40.6 (DIN 41.8) 40 (DIN: 41.2) 87.2 [91.6] 103.2 [107.6] R P P R B B B B B 17.5 11.4 36.9 20.3 A A A A A 3 (DIN: 4.2) 1 (4.4) 18.4 (DIN 19.6) (Pitch) P = 16 18 Built-in

IZx-OMT0049

34 22 16 64 58 46 40 34 22 16 64 58 46 40 34 22 16 40 200 100 20 100 0 0 0 0 0.1 0.2 0.3 0.4 0.5 0 0.1 0.2 0.3 0.4 0.5 0 0.1 0.2 0.3 0.4 0.5 Pressure [MPa] Pressure [MPa] Pressure [MPa] MPa MPa MPa a) Air supply from one side IZT4-16,22,34,40,46,58 Tube: O.D. 6 I.D. 4 b) Air supply from both sides IZT4-64,82,112 Tube: O.D. 6 I.D. 4 Measures pressure Measures Air supply 10mm IZT4-130,160,190

XM, XY

/Angle type C D L2 (KF flange) Fn Fc C (Fc) L1 (CF flange) J H B G A A (mm) Model A 110 120 171 B 38 48 66 C 1 1 2 D 30 40 55 Fn 34 70 Fc 17 26 41 G 40 39 63 H J P.C.D L1 6 x 4.4 6 x 6.6 L2 XMC-16 XMC-25 XMC-40 40 50 65 26 28 36 P.C.D 27 P.C.D 58.7 XMC-50 to 80/Angle type C L2 D Fd Fc L1 (KF flange) Fn C (K flange) (CF flange) H J K B G A A (mm) Model A 183 209 250 B 80 100 117 C 31 39

/

B K L K L M 40 M 40 2 x P 1 (IN), 2 (OUT) port (50) (50) 2 x P 1 (IN), 2 (OUT) port DIN terminal: D Conduit terminal: T 19.5 53.5 65.5 19.5 34 (69.5) (100.5) 30 32 T Width across flats 27 Width across flats 27 31.5 (44) 25 Applications A A T G1/2 OUT IN OUT IN B B G1/2 K L K L M 40 40 M Cable 6 to 12 2 x P 1 (IN), 2 (OUT) port (50) (50) 2 x P 1 (IN), 2 (OUT) port With bracket 67 VXED2130-

Large Size Vacuum Module: Series ZR

B Bracket B Note) 1 Dimensions for mounting bracket B 2 Dimensions for mounting spacer B Spacer B is used to leave space for maintenance (for replacement of silencer etc.) on side mounting.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

A B Hs MXY MTS Hv Hv Hv Hv 12/16/20 12/16/20 Hs Hs 25/32/40 25/32/40 Auto Switch Proper Mounting Position Solid state auto switch Bore size (mm) 2-color indication solid state auto switch Reed auto switch D-A9 D-A9V D-M9 D-M9V D-M9W D-M9WV A B C A B Hs Hv A B C A B Hs Hv A B C A B Hs Hv 15.5 15 20 15 20 19.5 46 19.5 31.5 46 46 19.5 31.5 18 46 19.5 35.5 42 15.5 13 42 12 17 17 22 17 22 21 47.5

MTS

A B Hs A B Hs Hv Hv Hv Hv 12/16/20 12/16/20 Hs Hs 25/32/40 25/32/40 Proper Auto Switch Mounting Position Solid state switch Bore size (mm) 2-color indication solid state switch Reed switch D-A9 D-A9V D-M9 D-M9V D-F9W D-F9WV A B C A B Hs Hv A B A B Hs Hv A B C A B Hs Hv C 15.5 15 20 20 15 19.5 19.5 19.5 19.5 46 46 46 46 18 13 15.5 35.5 42 31.5 42 31.5 12 17 17 22 22 17 21 21 21 21 47.5 47.5

Valve Single Unit

(A, B port) 2-One-touch fittings (A, B port) Applicable tubing O.D.: 4 6 Applicable tubing O.D.: 4, 6 Polarity indicator Manual override Manual override (Mounting hole for manifold) A: Orange B: Green A: Orange B: Green (Press and turn for the locking type.)

Fluoropolymer Piping Equipment

" A A 1/4" B B 1/4" B B 3/8" The table of combination is the same as that for A side.

MVGQ

Replacement Parts -X Description 12 No. 16 20 25 32 40 50 63 80 100 MGQ100-PS Seal kit MGQ12-PS MGQ16-PS MGQ20-PS MGQ25-PS MGQ32-PS MGQ40-PS MGQ50-PS MGQ63-PS MGQ80-PS !9 to @2 20Solenoid valve with adapter assembly SYJ3 3-M VZ5 4 -M VF3 4 -M VZ3 4 -M A B A B A B A B @3 Data Note 1) Seal kit includes !9 to @2. Order the seal kit, based on each bore size.

AWG

Construction AWG30/40 AWG20 D B K P C C C U K P O A A S H L to C U S O H L to B D !

Process Valve Series VNA

(305) 60 77 96 113 46 60 76 85 34 40 50 60 24 36 41 50 135 164.5 200 219 50 60 79 90 77 95.5 111 119 1 8 VNC 1 4 1 4 VNH Note) ( ): CE compliant product (-Q) VND Model J K L M N O P Q R S T U V VNH1 -10A A B VNH2 -15A A B VNH3 -20A A B VNH4 -25A A B M5 x 0.8 depth 5.5 M6 x 1 depth 6 M8 x 1.25 depth 6 M8 x 1.25 depth 6 202.5 232 267 286.5 29 36 48 51 25 30 35 38 30 40 50 56 37 43 50.5 58.5

Pin Clamp Cylinder Series CKQ/CLKQ

CKQ CLKQ B B B B B B A 14 49 B B A 14 49 B A 14 49 B A 7 42 A 10 45 A 11.5 46.5 A 11 46 19 or more 17 or more 33 or more 27 or more 28 or more 27 or more 22 or more 30 or more 22 or more 17 or more 54 or more 52 or more Auto Switch Mounting Height Atmosphere General use Mounting Rail mounting Rail mounting Welding Direct mounting D-A7 D-A80 D-A7H D-A80H D-F7BAL D-F7W D-J79W D-F7NTL D-F79F

MQQ

Action D Double acting Cylinder stroke (mm) Bore size (mm) Standard stroke (mm) Mounting style Bore size 10 10, 20, 30, 40 Through-hole/Both ends tapped common (Standard) Foot style Rod side flange style Head side flange style Double clevis style B L F G D Note) 10 16 20 25 28 10 mm 16 mm 20 mm 25 mm 28 mm 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 60 25 10, 20, 30, 40, 50, 75, 100

MQQ

style Double clevis style B L F G D Note) 10 16 20 25 28 10 mm 16 mm 20 mm 25 mm 28 mm 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 60 25 10, 20, 30, 40, 50, 75, 100 28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Proper Auto Switch Mounting Position (Detection at stroke end) MX A B MTS MY MY3A D-A9, D-A9V (mm) D-F9W, D-F9(W)V (mm) D-M9, D-M9V (mm) CY A B Operating range Bore size 16 25 40 63 A B Operating range Bore size 16 25 40 63 B Operating range Bore size 16 25 40 63 A 088.5 084.5 26.5 084.5 22.0 26.5 2 06.5 3.0 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080

Mini Free Mount Cylinder

A B Stroke A + Stroke B D-F8 D-M9/M9W Bore size (mm) Double acting Single acting A B Single acting Double acting A B A B A B 6 8 10 12 16 20 1 1 1 1 3 7 3 7 Note 1) Solid state switch D-M9/M9W: with 1 pc.

New

Port size A B B1 C D E F voltage suppressor) P H J Q R Q R K N 1 1/8 1/8 1/4 3/8 1/8 1/4 3/8 14 14 19 22 14 19 22 30 30 40 48 30 40 48 15 15 20 24 15 20 24 62.5 73.5 72 75 78 76.5 79.5 30 35 35 35 40 40 40 9 9 9 20 22 22 22 24.5 24.5 24.5 8 8 9 14 8 9 14 15 15 22.2 19 15 22.2 19 18 18 22.2 20.6 18 22.2 20.6 6.4 6.4 7.6 6 6.4 7.6 6 27 29.5 29.5 29.5 32 32 32 44 54 52.5 53.5 58 56.5 57.5 30

1

Auto switch model Bore size [mm] 20 25 32 40 D-M9m(V) D-M9mW(V) BM8-020 (A set of a, b, c, d) BM8-025 (A set of a, b, c, d) BM8-032 (A set of a, b, c, d) BM8-040 (A set of a, b, c, d) BM8-025S (A set of a, b, c, d) * S: Stainless steel set screw BM8-032S (A set of a, b, c, d) * S: Stainless steel set screw BM8-040S (A set of a, b, c, d) * S: Stainless steel set screw D-M9mA(V) BM8-020S (A