Vacuum Unit Ejector / Vacuum Pump System

ZK2-OM00201 9.

MQQ

38 5 8 20 10 3.5 6.5 39.5 7 5 4 10 to 60 M4 x 0.7 M6 x 1.0 80.5 70.5 8 8 36 11.5 47 7 10 25.5 16 5.4 9 48.5 10 5 7 10 to 60 M5 x 0.8 M6 x 1.0 89 79 10 10 40 12 52 8 10 28 20 5.4 9 55 10 6 7 10 to 50, 75, 100 M6 x 1.0 M6 x 1.0 96.5 84.5 12 12 45 13.5 60 4.5 10 12 34 25 5.5 9 58 10 49.5 7 7 10 to 50, 75, 100 M8 x 1.25 M6 x 1.0 116 104 13 16 52 17.5 69 5 14 12 40 28 5.5 9 71 10 57 10 7

MXW

9, @0, @1 Seal kit includes !9, @0, @1.

Table of Contents

(Specify a model with 9 to 16 stations by using the manifold specification sheet.)

4/5 Port Air Operated Valve Series SYJA3000

Station 2 58 40 Station 20 346 328 Station n L1 L2 3 74 56 4 90 72 5 106 88 6 122 104 7 138 120 8 154 136 9 170 152 10 186 168 11 202 184 12 218 200 13 234 216 14 250 232 15 266 248 16 282 264 17 298 280 18 314 296 19 330 312 1-5-42 5 Port Solenoid Valve Rubber Seal Series SYJ5000 [ ]: AC Type 40: Bottom Ported/SS5YJ5-40Stations -M5 Grommet (G) Approx. 300 (Lead wire length) 9 L2 L1 4-4.5

ITV

Consult with SMC for 9 stations or more. Note 2) Products without symbols are also compatible. Consult with SMC separately.

Electric Rotary Table

Dot color 1 2 3 4 5 6 7 8 9 10 11 Insulation color Dot mark Pin no.

Speed Controller: Standard Type Series AS In-line Type

3 O-ring NBR u 15-9-105 Dimensions L4 D3 H (He (Hexagon width across flats) xagon width across flats) (Hexagon width across flats) T2 A L2 D1 L3 D2 T1 L1 Dimensions AS120-U10/32-T 10-32 UNF 10-32 UNF AS120-M5-T M5 x 0.8 M5 x 0.8 Model T2 H D1 T1 D2 D3 L1 L2 L3 L4 A 8 9 9 4.5 10 31 10.3 0.7 27.4 AS220-N01-ST NPT 1/8 NPT 1/8 AS220-F01-ST G 1/8 AS220-01-ST Rc 1/8 R 1/8 12 14.3 14.6 7 18 35.6

2/3 Port Valve for Various

./31 + + + + 4; .1 + / .31 + 9$ :# 9$ :# 9$ 9$ :# :# + + //4; .1 9$ :# 9$ :# 9$ :# 9$ 9$ :# :# + + //4 .;1 9$ :# 9$ :# 9$ 9$ :# :# + + .31 // / / $ $ * # $ *# ? ?# * $ $ *# # $& : /78 & Air Operated Valves List # $ # $ $ )=/4 # $ $ )=/4 % ($ && && &'& &'& &'& ($ &'& )* + + !

IDX-OM-W034

Specification for Option R 9 1 Safety instructions . 9 1 9 2 Specifications of the GFCI . 9 1 9 3 Cautions for handling the GFCI . 9 1 9 4 Electric circuit . 9 2 Chapter 10 Specification for Option S 10 1 Safety instructions . 10 1 10 2 Specifications . 10 1 Chapter 11 Specification for Option T 11 1 Safety instructions . 11 -1 11 2 Specifications . 11 -1 11 3 Remote operation . 11 -2 11

Compact Cylinder with Lock Series CLQ

Joints 12 7 25 9 34 11.5, depth 7.5 YB-03 32, 40 K ( across flats) 12 9 32 11 42 14.5, depth 8.5 YB-05 50, 63 H (with locking) 16 11 38 13 52 18, depth 12 YB-08 80 d2 d1 19 14 50 17 62 21, depth 14 YB-10 100 L UT Weight (g) Bore size (mm) C UA RS W T1 T2 V Part no. (mm) 9 50 18 6.5 10 YB-03 32, 40 80 UA C d1 d2 H K L UT Weight (g) Part no.

2 Phase Stepper Motor/Without Motor Brake Series LXS

kg) 1000 a = 1000 to 3000 L2 500 Mer m 5 9 0 Transfer load m (kg) a 1000 Mey a = 1000 to 3000 500 m L3 5 9 0 Transfer load m (kg) Refer to page 304 for deflection data. 270 5 Phase Stepper Motor/Without Motor Brake Series LXS Dimensions/LXSH5SA Scale: 25% F G x I +0.030 0 depth 5 +0.030 0 depth 5 5H9 D-5.1 through 10 7.5 E-M5 thread depth 10 Refer to Cross section C-C, bottom view. 6 5H9

mlu

9 i o !5 @0 Extension locking w q Section A-A !

HRX-OM-Q033

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge

Environment

9 @1 @2 !3 !7 q r e i u @0 !6 !5 !4 !1 !2 y w t In-line motor type: LEY63D @7 @8 @5 @6 When rod end male thread selected @9 @9 #0 @4 Component Parts No. Description Material Note 1 Body Aluminum alloy Anodized No.

HRL

Standards RS-232C One thermo-chiller for one master RD 2 RD 2 SD 3 SD 3 Circuit diagram SG 5 SG 5 This product Master Do not connect with other pins. 1 6 9 5 D-sub 9-pin female (socket) type 9 Thermo-chiller Dual Channel Refrigerated Thermo-chiller for Lasers HRL Series Optional Accessories Consumables List Part no. Description Qty.

Thermo-chiller

(For communication cable) Weight*9,*12 kg 134 *1 Use fluid that fulfills the conditions below as the circulating fluid.

CXT

D-A80C D-A79W D-F7V D-F7BAVL D-F7WV D-J79C Auto switch model A B Hs A B Hs A B Hs A B Hs A B Hs Symbol Standard Stroke Bore size (mm) 32 40 38.5 42 38 41.5 6.5 9 6.5 9 6 (6.5) 9.5 13.5 3.5 6 34 37.5 9.5 13.5 6.5 9 35 38.5 9 (9.5) 31.5 35 6.5 10.5 9.5 13.5 8.5 (9) 13 (13.5) Long Stroke Bore size (mm) 32 40 38.5 42 38 41.5 18 24 18 24 10 13.5 10 13.5 9.5 (10) 17.5 (18) 31.5 35 7 10.5 15 21

HRX-OM-R039

8.5.1 HRSE012/018-A-10 . 8-9 8.5.2 HRSE012/018/024-A-20/23 . 8-9 8.5.3 OPTION-T (HRSE012/018-A-10-T). 8-10 8.5.4 OPTION-T (HRSE012/018/024-A-20/23-T) . 8-10 8.6 Sample DoC.

AIR COMBINATION

APPLICATION 9 3. SPECIFICATIONS. . . 9 4. SERIESMAP AND COMBINATION OF EQUIPMENT. . . 10 5. HOW TO ORDER 1115 6. ATTACHMENTS / ACCESSORIESOPTIONSPART NUMBER 16 7. TROUBLE SHOOTING 16 8. SPARE PARTS LIST 16 9. HOW TO REPLACE 17 10. DISASSEMBLY DRAWING . 1819 11.