Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

16 22 46 40 M8 x 1.25 92 24 48 124 200 300 36 86 124 174 66 5 6 4 8 20 24 48 50 M10 x 1.5 28 52 128 200 300 38 50 88 124 174 110 80 5 6 4 8 20 24 63 M10 x 1.5 MLGPM (slide bearing)/A, DB, E dimensions MLGPL (ball bushing)/A, DB, E dimensions A E A E Bore size (mm) Bore size (mm) DB st50 50

Modular Type Lubricator Series AL

Drip failure can cause damage to the components that need lubrication. 0.04 0.02 0 0 2000 4000 6000 8000 Flow rate L/min (ANR) 51 Lubricator AL10 to 60 Construction AL10 AL20 w w e q q t IN OUT IN OUT y y r u u AL30, 40 AL50, 60 w w q t q e e t IN OUT OUT IN y r i r u y u Parts list Description Material Note No.

KA

(mm) D L M Q Part No. Soft nylon Polyurethane 4 3.2 KAL23-00 17.5 18 20 4.3 4.5 5.3 18.5 21 22 15.5 16 17 15.2 18.5 20.9 9.6 10.4 12.8 39.7 39.7 25.0 25.0 14.9 14.9 6 6 3 KAL04-00 KAL06-00 11.4 11.4 4.2 4.2 3.4 2.9 8 6 23 26.5 28.5 6 6.8 7.5 KAL08-00 10 17 12 10 KAL10-00 KAL12-00 21 Branch tee: KAT Effective area (mm2) Weight (g) Tube O.D. (mm) D L M Q Part No.

E-P HYREG ® Series VY1

pressure (MPa) 0.6 0.6 0.6 0.4 0.4 0.4 0.2 0.2 0.2 VY130-5 VY140-5 VY150-5 0 1 2 3 4 5 0 1 2 3 4 5 0 1 2 3 4 5 V V V VY130-6 VY140-6 VY150-6 1 1 1 0 2.5 5 7.5 10 0 2.5 5 7.5 10 0 2.5 5 7.5 10 V V V VY130-7 VY140-7 VY150-7 2 2 2 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA VY130-8 0 5 10 15 20 VY140-8 0 5 10 15 20 VY150-8 0 5 10 15 20 3 3 3 mA mA mA Command signal Command signal Command

Dual Speed Controller with One-touch Fitting Series ASD 1

6 q r i o e y !5 !6 !0 y i o e u r !9q !7 !0 !1 i !2 t u !7 @0 !1 q !2 t !6 !5 !7 !2 t !0 !1 Component Parts Note Description U seal U seal Cassette Seal O-ring O-ring O-ring O-ring O-ring Gasket Spacer ASD230F only Material HNBR HNBR POM, Stainless steel (1) Description No. !1 !2 !3 !4 !5 !6 !7 !8 !

E-P HYREG ® Series VY1 1

Stations Dimension 2 3 4 5 6 123 169 215 261 307 107 153 199 245 291 L1 L2 14-10-17

Antistatic One-touch Fittings Series KA

(mm) Q L M D Part No. Soft nylon Polyurethane 4 3.2 KAL23-00 17.5 18 20 9.6 10.4 12.8 15.5 16 17 15.2 18.5 20.9 4.3 4.5 5.3 18.5 21 22 KAL04-00 KAL06-00 11.4 11.4 4.2 4.2 3.4 2.9 39.7 39.7 25.0 25.0 14.9 14.9 7 6 3 8 6 KAL08-00 6 6.8 7.5 23 26.5 28.5 11 17 12 10 KAL10-00 KAL12-00 21 Branch Tee: KAT Effective orifice (mm 2) Weight (g) Applicable tube O.D. (mm) Q L M D Part No.

VZM400

6 !0 PE PE e !5 w !3 EA EA y A A P P r q B EB B !4 EB !7 !1 !2 t Component Parts Aluminum alloy NBR Note No. !0 Description Material No. PBT ADC Material Note q Description Black zinc chromated Metallic plated Pilot body Body Piston guide B Valve Metallic plated !1 !

Regulator

Safety Instructions 2-6 2. Application 7 3. Standard Specifications 7 4. How to Order 8 5. Options 9 6. Structural Drawing and Replacement Parts 10 7. Assembly of Optional Parts 11-12 8. Operation and Adjustment 13-14 9. Trouble Shooting 15-16 10. How to Replace the Components 17-24 10-1. Diaphragm Assembly Replacement 17 10-2.

AS-FPQ/AS-FPG

Note 2) For AS121FP AS-FPG/Stainless steel 304 AQ Release button color: Light blue Flow Rate and Effective Area ASV AS121FP-M5 4 AS221FP-01 AS421FP-04 AS221FP-02 AS321FP-03 Model AK 4 6 4 6 8 6 8 10 10 12 Tubing O.D.

3 Port Solenoid Valve Series VQ100 1

Flow Rate SOL. 17 17 stations For obtaining the flow rate, refer to page 4-1-6.

Title not found

0(0) 0 o 12. 2 4(7.a B 1(0) 8 10{6. 83 88 104 0(0) 0(3) 2.5{6.5) 4.5 B 1.5(O) 1 . 5 s.st2) 8.s{4.5) 10.5 38 ,t3.5 50.5 B 3(O) 3 10{6) 12i3. = H s 40 43.5 49 55.5 42 50 B 3(0) 3 7 10(6) 12 38 50.5 59 B 3(0) 7.4 10.5(6) 12.5 40 43.5 4S 55.5 35 42 50 Acrtssofies $eries CLA Di mensions Of Accessories lType Single Knuckle Joint Y Type Double Knuckle Joint Malerial: Free cutting sulfer steel l\

3 Port Solenoid Valve Series VQ100 1

Note 6) ( ) values insides denote the air passage for normally open type. 4-12-8 9 3 Port Solenoid Valve Series VQ100 Construction q e r t u w V100 SY SYJ VK y VZ i VT VP R A P VG o VP S070 VQ VKF VQZ (For N.C. valve) VZ Component Parts VS Description Material Resin Stainless steel Stainless steel, Resin Stainless steel NBR Carbon steel NBR No. q w e r t y u i Solenoid coil Body Fixed iron

Air Cylinder CLA Series Fine Lock Model

6 43 1 . 2 59 Svoke ?

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

AK Flow Rate and Sonic Conductance VCHC ASR ASQ Model AS22l1F-U01 AS23l1F-U01 AS22l1F-U02 AS23l1F-U02 AS32l1F AS33l1F AS42l1F AS43l1F Flow Direction Symbols on Body Meter-out Meter-in Metric size 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Symbol Tubing O.D.

MRHQ

6 Hexagon socket head cap screw Stainless steel !7 Hexagon socket head cap screw Stainless steel !

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

7 q e @0 !0 o @2 @3 !5 u t !8 @1 r @4 w 12 to 40 @7 !1 !7 q !6 !0 @2 @3 o @4 @6 y e r !8 @1 @5 u w Rod cross section for 12, 16, 20, and 25 Rod cross section for 32 and 40 With end lock 12 to 40 y !7 !6 q !0 o @2 @3 @4 @6 e r !8 @5 @1 i @8 !4 !5 !2 @9 !3 w Caution Disassembly/Replacement A special tool is required when reassembling the cylinder after disassembled.

3 Port Solenoid Valve Series VQ100

Note 6) ( ) values insides denote the air passage for normally open type. 4-12-8 3 Port Solenoid Valve Series VQ100 Construction q e r t u w V100 SY SYJ VK y VZ i VT VP R A P VG o VP S070 VQ VKF VQZ (For N.C. valve) VZ Component Parts VS Description Material Resin Stainless steel Stainless steel, Resin Stainless steel NBR Carbon steel NBR No. q w e r t y u i Solenoid coil Body Fixed iron

PF-OMM0004_C

Add/dEC OUT1 (31 ) OUT1 OUT1 ( [n2AH]) ( [n2dH]) 3 1 3 6 6 1 6 3 1 1 4. [F 2] OUT2 -39No.PF-OMM0004-D d. ([ tP]) 4. [F 2] OUT2 e. ([ tPL]) [ tPH] or [ tnH] ([ tPH]) 4.

ASD

6 q r i o e y !5 !6 !0 y i o e u r !9q !7 !0 !1 i !2 t u !7 @0 !1 q !2 t !6 !5 !7 !2 t !0 !1 Component Parts Component Parts Note Description U packing U packing Cassette Packing O ring O ring O ring O ring O ring Gasket Spacer ASD230F only Material NBR NBR Description No. !1 !2 !3 !4 !5 !6 !7 !8 !