Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Allowable load mass mv (kg) Maximum operating pressure Pv (MPa) Cushion Stroke Model Stroke (mm) 25 30 1 5 0.3 Model CYP15 CYP32 CYP15 CYP32 8-17-6 6 Clean Room Rodless Cylinder Series CYP 15, 32 How to Order MX CYP 15 Z73 200 MTS MY Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

HAW

Visible outlet air temperature Outlet air temperature is easily checked by thermometer, resulting in easy maintenance. 1.5 2 to 50 AME Proof pressure (MPa) 3B JIS 10K FF flange Rc 11/4 Rc 1 32 67 78 Rc 1/2 Rc 11/2 Rc 2 Air side Port size Rc 3/4 AMF Rc 1/2 Rc 1/2 Rc 3/4 Rc 1 Cooling water side Drain side Rc 3/4 SF Mass (kg) Coating color 9.7 11.5 59 95 Rc 1/2 Silver SFD Accessory Drain valve

PAB-OM-K007

2519 6 5 25 6 6 - 7.

Clean Room Rodless Cylinder Series CYP ø15, ø32

ED 9.5 13 E 4H9 6H9 B 9.5 14 A 8 12 C 5.4 8.6 Model +0.030 0 +0.030 0 CYP15 CYP32 L 67 90 Z 118 155 Y 2.5 3.5 WB 17 27 WA 32 46 W 69 115 TB 18 22 TA 13 17 T 23 29 R 45 79.5 QW 48 87 N 4.5 7.5 Q 105 138 M 6 8 PB 60 100 MM M4 x 0.7 M6 x 1 PA 25 50 LW 69 115 P M5 x 0.8 Rc 1/8 LD 5.6 8.6 Model CYP15 CYP32 Note 1) These dimension drawings indicate the case of piping port location Nil.

/

NBR FKM Pressure range 0 to 7 MPa Rc G (ISO1179-1) NPT NPTF 3/8 1/2 3/4 1 Y u Pilot valve o Electrical entry T: Conduit terminal D: DIN terminal (Pitch between the terminals: 11 mm) W: M12 connector (4-pin type) Note 2) V: M12 connector (5-pin type) Note 3) DO: DIN terminal without connector Note 1) V116 i Rated voltage 1 2 3 4 5 6 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC [115 VAC] 50/60

DOC1001947

R3/8, NPT3/8, G3/8 22 7/8 R1/2, NPT1/2, G1/2 27 1-1/16 (4)For M5, 10-32UNF Tightening method First, tighten it by hand, then give it an additional 1/6 turn to 1/4 turn with a wrench. Refer to the table below for reference values.

VFRA3000, 4000 Series

Prohibitted way of using the balbe which is written at "Precautions" section in this operation manual was carride out excluding above -mentioned. 6.

Process Pump <Fluororesin Type> Series PA3000

, G, NPT, NPTF 1/4 Manual reset Air pilot actuation reset (Rc, G, NPT, NPTF 1/8) FLUID OUT Rc, G, NPT, NPTF 3/8 140 8 110 14 6 81 84 67 30 13 26 10 FLUID IN Rc, G, NPT, NPTF 3/8 EXH (P2) Rc, G, NPT, NPTF 1/4 PAP331m(with tube inlet/outlet) P11m P13m 152 2-M5 with depth 8 4-7 139 64 10 10 120 95 Bottom view without foot SUP (P1) Rc, G, NPT, NPTF 1/4 Manual reset Air pilot actuation reset (

VER2000/4000

6 q w e r t y u i Block packing !

VQ7-6

Port 3(R2) and 5(R1) are Rc 3/8 0.37 1/4 Bottom 3/8 3-10-6

FGX-OMZ0008

High-viscosity fluids generate large differential pressures at low temperatures, which can damage the element. 6/12 FGX-OMZ0008 1.

ASx-OMX0006

Nylon tube: Within +/-0.1 mm Soft nylon tube: Within +/-0.1 mm Polyurethane tube: Within -0.2 to +0.15 mm 9 - 6.Construction Meter-in Component Parts No.

E,R.L.

Ex.mCG:23R Body slzo 1 0 M 5 20_ya 3 0 _ % 10-tA 50-.A 6 0 1 Polt thread [ NPT Nll Rc (PT) F P F Series NAL Lubricator NAL5qD.6{X'O Flow Characteristics Gonstruction./Parts List NAL5flXh6IXXI tlaln Part8 O I Body I Platinum silver pairiting a I HoGing I Alrminum die cas'ting Parts List 1 1 1 7 1 0 Attachments 3/a'1 Allows for ease of installation and maintenance. Gffi@ NE60.

NARM Series

Note2)Pressure gauges mounted in body are oriented so that the 6 o'clock position of the gauge is at the pressure adjusting screw.

VCHR

6 @0 No. Description Material Body 1 Aluminum + Hard anodized !3 Bonnet 2 Aluminum + Hard anodized @6 3 Valve Stainless steel i 4 Valve spool Stainless steel @7 5 Piston Steel + Electroless nickel plated o @5 6 Spring guide Steel + Electroless nickel plated 7 Spring seat Steel + Electroless nickel plated !4 !1 8 Spool guide Aluminum + Hard anodized 9 Seal A Resin r !

Large Flow Air Filter AF800/900 Series

Flow rate (L/min (ANR)) 1 4 1 4 1 6 8 Rc 1 4 NPT 1 4 G 661 A

IR10-OM00007

No. o S o1 T P2 U Q3 V R4 W Z12 -6- (1) Nm 1/8 (2) (3) (4) -7- (1) (2) (3) (4) (1) (2) (3) (1) (2) 3 (3) 1 3 1 (4) P.5 0 (5) 0 (6) 0.6Nm -8- (1) (2) (3) 12.5Nm (4) ()ON-OFF (5) 79Nm (6) (7) (1) AF AM AFM (2) (1) ( (2) 1.52 (1) -9- 6 (1) 1 1.5 (2) , (3) (4) [][] -10- 8 2 6 3 2 () 5 2 2 (80-) (80-) 2 2 9 EXH 2 2 ON-OFF 1 1 7 2

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

(mm) Stroke range Bore size (mm) I J K M B D C E KA GA GB H 40 50 63 78 92 110 M6 x 1.0 M8 x 1.25 M8 x 1.25 25 25 25 10 14 14 45 55 68 21 26 32 36 46 53 34.5 40 46.5 40 45 50 46 55 66 59 71 82 23.5 28 34.5 to 1000 to 1000 to 1000 Stroke range Bore size (mm) MM XA XL Y ZZ MA MB MC N P S 40 50 63 M6 x 1.0 M8 x 1.25 M8 x 1.25 12 16 16 6 6 6 9.5 12.5 15 178 195 221 16 16 16 12 15 15 44 50 56

High Pressure Coolant Valve

M8 x 1.25 depth 6 M8 x 1.25 depth 6 20 24 24 29 36 48 51 25 30 35 38 30 40 50 56 37 43 50.5 58.5 75 100 126 141 88 118 148 163 36 44.4 57.7 66.4 10.5 16 19.5 15.5 62 6 x 8 7 x 10 9 x 12 9 x 12 TQ 70 92 109 631 A VNH Series Specific Product Precautions Be sure to read this before handling the products.

PF2A7H.eng

Other functions Danger: Rc(NPT)11/2 Rc(NPT)2 48 to 50 Nm Function selection mode Other functions Indicator LED (output) Indicates the output status of OUT1. LED is ON (Red) when OUT1 is ON. The LED flashes when an over current error occurs.