Series HAW Water Cooled Aftercooler 1

HAW2 HAW7 HAW22 HAW37 HAW55 HAW75 HAW110 Model Screw type compressor Reciprocating type compressor Screw type compressor 2.2 55 110 7.5 75 22 37 Applicable compressor (kW) 2.2 37 75 7.5 55 15 22 300 8600 18000 1000 12000 3300 5700 (1) Air flow rate l/min(ANR) Reciprocating type compressor 300 5600 11000 1000 8000 2100 4300 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

S Couplers Series KK/KK13

H L M L (mm) H Width across flats Body size Weight g Effective area mm L H Width across flats Min. bore M Applicable hose I.D.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

min Accumulated flow: l Panel mounting Specifications for Display Unit PF2D300/301 Model 0.25 to 4.5 l/min 1.3 to 21.0 l/min 2.5 to 45 l/min Flow rate measurement range Note 1) 0.25 to 4.5 l/min 1.3 to 21.0 l/min 2.5 to 45 l/min Set flow rate range Note 1) 0.05 l/min 0.1 l/min 0.5 l/min Minimum set unit Note 1) Accumulated pulse flow rate exchange 0.05 l/pulse 0.1 l/pulse 0.5 l/pulse value

Multi-channel Digital Sensor Monitor ( compatible)

Remarks Power supply/output cable ZS-26-L Length 2 m Connector for sensor lead wire ZS-28-C 1 pc.

Series MHR3 11- 3 Finger Rotary Actuated Air Gripper 22- Size: 10, 15

Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications Nominal size Item 10 15 1 Size Suction flow rate L/min (ANR) 10/15 0.15 to 0.6 MPa 0.2 to 0.6 MPa 0 to 60C Operating pressure Ambient and fluid temperature 0.01 mm 180 c.p.m.

Magnetically Coupled Rodless Cylinder Slider Type: Ball Bushing Bearing CY1L Series ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40

Bore size 6, 10, 15 Type M thread Rc NPT G Symbol BS Nil Shock Absorbers 20, 25, 32, 40 TN TF Type Bore size (mm) 25 32, 40 10, 15 20 6 Standard (shock absorber RB series) Magnetic holding force Refer to page 1517 for specifications.

IZ-OMK0015

Maintenance timing for emitter detection . 15 2-3. Indication/Setting Parts Description . 15 3. Selection and Setting of Product . 16 3-1. Sensing DC Mode . 16 3-2. Pulse DC Mode . 20 3-3. DC Mode . 25 3-4. Power supply cable wiring diagram . 27 4. Specifications . 29 4-1. Ionizer. 29 4-2.

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

B E E F G H L L M Model 2 x B L,L LQ3T11 LQ3T12 LQ3T21 LQ3T31 LQ3T32 LQ3T41 LQ3T51 LQ3T61 4 3 6 10 8 12 19 25 M 4.8 9.5 11 28.5 27.5 14 3.5 10 9 4 17 16 6 12 16 34.5 33.5 20 (E,E) (E,E) G H 9 18 21 47.5 44.5 25 5 22.5 19.5 L,L L,L 6 7 8 24 26.5 30 22 24 26 10 14 18 20 28 36 24 32 41 52.5 64 78 50.5 61.5 74 29 37 49 (E,E): Reference dimension for the inserted tubing from the end surface of

PSxx-OMG0001CN

kPa MPa(500 kPa kPa) ZS-28-A 2 m ZS-28-B (M35 L 2 ) ZS-28-C 1 ZS-27-C (M38 L 2 ) + ZS-27-D (M38 L 2 ) ZS-27-01 1 -8No.PS-OMG0001CN-H LCD OUT1 OUT2 UP SET DOWN (OUT1)() OUT1ON (OUT2)() OUT2ON LCD 4 (UP)ON/OFF (DOWN)ON/OFF (SET) -9No.PS-OMG0001CN-H M3X5 L(2) 0.50.7 Nm M35L ZS-28-B M35L M38 L(2 ) M38L ZS-27-01 ZS-27-C 90 2 -10No.PS-OMG0001CN-H 1 a a1DIN b (b -

MHS

40DB MHSH3-50 DB MHSH3-63 DB MHSH3-80 DB mm 5 5 10 10 15 N 6~10 11~15 20~25 29~34 49~59 g 500 740 1,290 2,250 4,000 g 32 40 50 63 80 MHSHJ3-D 430 600 1,020 1,710 3,040 MHSHJ3-DA 550 800 1,380 2,360 4,120 MHSHJ3-DB 520 770 1,340 2,310 4,120 5 3. 3-1. 1 2 3 3-2. 1 .

CU

L A93L 5m .

ZL3-OM00601

Other shapes do not comply with ISO1603 or ISO1179. 8) Light/surge voltage suppressor 7) Electrical entry Z Light/surge voltage suppressor L Lead wire length 0.3(m) L shaped plug connector LO Without connectors M Lead wire length 0.3(m) M plug connector MO Without connectors 9) Manual override Nil Non-locking push type D Push-turn locking slotted type E Push-turn locking (manual type) 10)

IDX-OM-W019

3/8 8.9 16.1 18.6 2.6 4.9 12.0 1.3 2.9 1.2 1.4 6.1 0.8 13.0 9.1 0.6 [226] [410] [473] [67] [125] [304] [33] [73] [31] [36] [154] [21] [330] [231] [15] 17.8 0.5 IDFB4E 1/2 [453] 17.8 [13] 1 1.1 10.8 [453] 1.2 [283] 3.1 [275] 10.8 17.9 10.6 1.7 9.1 1.3 0.6 9.4 3.1 IDFB6E [455] 0.6 [270] [31] [42] [80] [230] [32] [15] [240] [80] [275] 3/4 [15] IDFB8E 19.1 22.4 14.0 1 1.8 [300] IDFB11E [485]

EXxx-OMN0027CN

Byte0 1 Byte1 2 Byte2 3 Byte3 PROFIBUS DP Byte4 ID(14h) Byte5 ID(11h) Byte6 Header Byte7 System diag.1 Byte8 System diag.2 Byte9 System diag.3 Byte10 System diag.4 Byte11 Reserved : : Byte18 Reserved Byte19 Header Byte20 0~7 Byte21 8~9 Byte22 Reserved : : Byte27 Reserved Byte28 A Byte29 A Byte30 A Byte31 B Byte32 B Byte33 B : : Byte61 L Byte62 L Byte63 L -71No.EX-OMN0027CN-D 1 7 6 5

Clean Rodless Cylinder Series CYP

Operating direction: Right Operating direction: Left a b c d e f g Nil Reed switch L R Solid state switch S h Nil L R S Operating direction Left Right a b h g d c f e Note) Lead wire length symbols 0.5m .

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

nut C1 X L1 Auto switch D-A9, F9 Rod end male thread (mm) Bore size (mm) 63 C1 X H1 L1 26 28.5 M18 x 1.5 33.5 80 32.5 35.5 M22 x 1.5 43.5 100 32.5 35.5 M26 x 1.5 43.5 (mm) Without auto switch With auto switch Bore size (mm) Stroke range (mm) C D E F H I J K L M N O P Q S U Z A B A B 46 10 to 50 54 14 depth 10.5 63 64 56 15 20 77 10.5 M10 x 1.5 103 7 17 8 60 9 1/4 15 93 47.5 19 56 75, 100

Exhaust Cleaner Series AMC

How to Order How to Order AMV AMP 20 Standard size Exhaust cleaner for vaccum Thread type Accessory Port size Port size Standard size Option Exhaust cleaner for clean room VEX Model Model AN Port size Max. air flow (l/min (ANR)) Accessory Option 1 4 3 8 1 2 3 4 Port size Max. air flow (l /min (ANR)) Standard size Thread type Standard size 360 650 1,500 3,700 7,500 16,000 2 3 4 3 6 15 37 75

Diaphragm Style Flow Switch Series IFW5 For details about certified products conforming to international standards, visit us at www.smcworld.com.

20 25 Flow rate (l/min) IFW520 0.12 P1 = 0.6 MPa P1 = 0.5 MPa P1 = 0.4 MPa P1 = 0.3 MPa 0.10 Pressure drop (MPa) P1 = 0.2 MPa 0.08 P1 = 0.1 MPa Rod 0.06 0.04 0.02 5 10 15 20 25 Flow rate (l/min) Working Principle Liquid flow creates a pressure differential nearby the orifice of the port of the body q.

I/O Configurator (NFC version)

) byte6 Wireless slave diagnostic information 1 (Wireless channel 1-7) Wireless slave module EX600-WSV# (Unit 3) (Wireless channel 001) Valve output: 32 points byte7 Wireless slave diagnostic information (Wireless channel 8-15) byte8 Wireless slave registration information (Wireless channel 1-7; bit 0 are fixed at "0".) byte9 Wireless slave registration information (Wireless channel 8-15)

IP8101 Series

Electrical Wiring 15 Without Output Function (IP8101-030 and IP8101-033) 15 With Output Function (IP8101-032 and 52-IP8101-034) 15 Electrical Wiring 16 C ATEX Intrinsic Safety Type of Explosion Protected Construction 17 ATEX Intrinsic Safety Type of Explosion Protected Construction 17 Explosion Protected Construction Rate 17 Wiring 17 Barrier 18 Description of Components 19 Contents of LCD