High Vacuum L Type Valve

Nut assembly (9) XL1A50-10-1 XL1A80-10-1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

AMG

AFF Port size 3/4B 1/8B 01 02 03 06 10 14 AMl 1B 1/4B Note) Please refer to p.4.7-7 about "How to Order" case assembly. 3/8B 11/2B Related products 2B 20 04 1/2B Option combinations Available Not available D J R AMG150 AMG250 AMG350 AMG450 Applicable model Accessories Options C C D J R Accessories/Optional specification AMG550 AMG650 AMG850 Symbol N.C. auto drain N.O. auto drain Drain guide

Plate Cylinder

1 r !0 !2 w y e u t !6 i o !7 B !3 B section MU25 Spring extend w i !0 o !8 t !5 q !7 r e u !1 !2 !6 y !4 A B !

Hydraulic Cylinders

F with effective thread depth G F with effective thread depth G Q Q R D R H E E 4-K through 8-L counter bore 4-K through C B + Stroke J J 8-L counter bore A + Stroke M M CHKDB20 & 25 CHKDB32 to 100 Width across flats f c a b g e h + Stroke Rod end male thread (mm) F L A B C D E G H J K M P Q R Bore size (mm) 20 M8 x 1.25 9.5 depth 5.4 51 43 8 12 10 10 6 30 5.5 43 1/8 16.5 6 25 M10 x 1.5 9.5

Sine Rodless Cylinder Series REA

Operating pressure (MPa) U: Maximum speed (mm/s) Stroke (mm) Mode of operation Inclined operation Vertical operation Horizontal operation Review of load weight and operating pressure Lo Fn W Guide First tentative bore size determination F3 D1.6 x P First tentative bore size determination F2 D1.6 x P First tentative bore size determination F1 D1.6 x P WB Inclined operation W+WBWV PPV

High Vacuum L Type Valve

Nut assembly (9) XL1A50-10-1 XL1A80-10-1 Suffix for seal materials Seal material EPDM Barrel Perfluoro Kalrez Chemraz VMQ FKM for R R R PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro is a registered trademark of MATSUMURA OIL Co.,Ltd. R Kalrez is a registered trademark of E.

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

A Rectified value P-1 Rectified value P-1 (Differential) Pressure H-1 (P-3) H-1 (H-2) n-1 Min. B Switch output 1(2) Released ON Work 1 Work 2 Work n Atmosphere OFF ZSE ISE Formula for Obtaining the Set-Value A B Switch output response time when autoshift is input.

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

Option Suck Back With flow rate adjustment With bypass With flow rate adjustment & bypass P .497 Variations [Integral fittings] P .495 Applicable tubing size Metric size Inch size Flow characteristics Av x 10 -6m 2 (Cv) Series Orifice diameter 3 4 6 8 10 12 19 25 1/8 3/16 1/4 3/8 1/2 3/4 1 2.1 (0.09) 8.4 (0.35) 2 LVD10 4 LVD20 31.2 (1.3) 45.6 (1.9) 120 (5) 8 LVD30 10 LVD40 16 LVD50 P .502

CG1

Note 1) ( ): Long stroke Note 2) Refer to p.1.6-11 for pivot bracket.

2-Color Display

P Reduced setting efforts P Reduced chance of set-value input error Cop Copy Copy Master Unit 1 Slave Unit 2 Unit 10 3-step setting -step setting 3-step setting 1 2 3 Push Push Push Push Push Push Adjust to set-value with buttons. Finish setting Added vacuum range. P Rated pressure range: 0.0 to 101.0 kPa 0 101 kPa Expanded pressure range for positive-pressure type to the vacuum range.

Round Type Hydraulic Cylinder

3 e r !2 !1 u t w y CHK CHN CHM CHM CHS CH2 o !

Air Cylinder CLA Series Fine Lock Model

p ClAseies Air Cylinder Fine Lock Model High Intermediate Stopping Accuracy , 3 Types of Locking Mechanisms r Locks in Either Extended or Retracted ', 5 Bore Sizes Available Auto Switch CaPable Direction 4-5 I Product Features . .6 I Ho* To order lf, .7 I Standard Specifications 8-9 ! locf Specifications. ..'

C76

9 @0 q w e r t y u i o !

C76

9 @0 q w e r t y u i o !

AC Servo Motor Driver (MECHATROLINK-II type)

resolution is 1048576 [Pulse/rev] P Travel amount per 1 command pulse [m] n1/n2 Pulley ratio *1 Ex.)

AC Servo Motor Driver (MECHATROLINK-III type)

resolution is 1048576 [Pulse/rev] P Travel amount per 1 command pulse [m] n1/n2 Pulley ratio *1 Ex.)

Non-Standard Motor Compatible Drivers Matsushita Electric Industrial Co., Ltd. Drivers for LJ1, LG1, LX

Command pulse (maximum 225/kpps) P Class 3 ground Ground resistor 100 or less Incremental encoder P Deviation counter clear signal (active high) 2CN PG P Be sure to treat the shielding wire terminals. +12 to 24V Note) 4.7k 13 14 5mA Servo ON 1Ry 0V SV-ON 1Ry ON for servo ON 2Ry Proportional control (P actuation) Reverse drive suppression 15 P-CON 2Ry ON for proportional control N-LS 16 N-OT

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

P + 0.1013 0.1013 P + 0.1013 0.1013 QCR = 2V x x 10-3.

End Lock Cylinder Series CBG1

The minimum stroke with rod boot is 20mm. 5 Series CBG1 Air Cushion Type: CBG1BA With rear lock: CBG1BA Bore size Stroke H With front lock: CBG1BA Bore size Stroke R WA WB 2-P W 10 Max.

Micro-Mist Separator with Prefilter Series AMH

D-SMC, P-63 (M) 2nd printing September 1996. D-SMC, P-59(YG) March 1997. 29(YG) Printed in Japan.