Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N7H (ø1/4" One-touch Fitting, Straight Type), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A2 (Bracket B, Horizontal Mounting), Operation Manual: Y (w/o Operation Manual

Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 01 (R 1/8), Lead Wire: w/o Lead Wire, Bracket: A1 (Bracket A, Vertical Mounting)

Compact Cylinder with Solenoid Valve/

Brown Brown Load Load Auto switch 1 Auto switch 1 Blue Blue Brown Brown Auto switch 2 Auto switch 2 Blue Blue Load voltage at ON = Power supply voltage Residual voltage x 2 pcs. = 24 V 4 V x 2 pcs. = 16 V Load voltage at OFF = Leakage current x 2 pcs. x Load impedance = 1 mA x 2 pcs. x 3 k = 6 V Example: Load impedance is 3 k. Leakage current from auto switch is 1 mA.

High Pressure Coolant Valve

0 Port 1 Port 2 Port 1 Port 2 Valve element A t q q o o w Valve element B y w Port 3 3 Port valve 2 Port valve Working Principle When the pilot operated solenoid valve !2 is not energized, the valve element A t connected to the piston u is closed by the return spring i. Then valve element B y connected to the valve element A t is open. When the pilot operated solenoid valve !

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

9 Bumper Chrome molybdenum steel Clear hard anodized $3 NBR Plate A @0 O-ring Aluminum alloy $4 Clear hard anodized Carbon tool steel Plate B @1 C type snap ring for shaft Aluminum alloy $5 NBR Cushion seal @2 O-ring NBR 8-17-9 9 Series CYP Dimensions E Depth ED 4-MM Thread depth M T Y L T K PA 4-Counterbore dia B Counterbore depth C F 4-LD QW PB N Courtesy of Steven Engineering, Inc.-230

Fluoropolymer Piping Equipment

Body Needle V seal Lock nut Adjustment handle Insert bushing Nut Collar A 1 2 3 4 5 6 7 8 PFA PCTFE PTFE PVDF PVDF PFA PFA PFA Body class 2 y u y u B Dimensions A (B) (max.S) D H Port A 2 x G SMC (J) SMC C E F K Port B E A B C D E F G H J K S Model 48 60 72 LVN20 LVN30 LVN40 24 30 36 12 18 22 88 110 124 34.5 43 52 6 9 11 4 5 6 14 25 25 20 26 33 18 24 30 2.4 7.5 8.0 940 LQ1/LQ3/LVN/LQHB Series

212

Description Material Note 1 Body PFA 2 Housing PVDF 3 Diaphragm FKM 4 Plate PVDF 5 Diaphragm PTFE 6 Housing PVDF 7 Diaphragm PTFE 8 Guide PPS 9 End plate PVDF 10 Spring Stainless steel Fluorine coated r t y o i u !

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

ARP IR-A IR Construction IRV VEX Working principle The compressed air from the air source passes from the IN side through the top of element y and flows inward. The compressed air that flowed in passes through the MC cartridge element provided inside element y , where all dust that is larger than 0.3 m is removed.

IDX-OM-W094

(REFRIGERANT) IDFA60-23 W R 0001 (2018 4 ) W R 0001 o 1 Z 12 o P Q R A Z 1 2 3 4 W X y Z 2018 2019 2020 2021 IDFA60/70/80/90 Series 1-4 IDX-OM-W094 1.3 HFC 1-4 IDFA60/70/80/90 Series 1-5 IDX-OM-W094 1.4 / 1 1.5 () IDFA60/70/80/90 Series 1-6 IDX-OM-W094 2 2.1 IN OUT (ONOFF ) 6-4 6-4 L N PE 3-5 IDFA60/70/80/90 Series 2-1 IDX-OM-W094 () IDFA60/70/80/90 Series 2-2 IDX-OM-W094 3

MGZ Series

Y 4MM depth M XAH7 depth XL + 0.2 0 I D 2 x 4J E MB MC KA MA C N K N S + Stroke H B ZZ + Stroke Stroke range Bore size (mm) I J K M B D C E KA GA GB H 40 50 63 78 92 110 M6 x 1.0 M8 x 1.25 M8 x 1.25 25 25 25 10 14 14 45 55 68 21 26 32 36 46 53 34.5 40 46.5 40 45 50 46 55 66 59 71 82 23.5 28 34.5 to 1000 to 1000 to 1000 Stroke range Bore size (mm) MM XA XL Y ZZ MA MB MC N P S 40 50 63 M6 x

Compact End Lock Cylinder Series CBQ2

Y LX LZ 4-LD Bore size (mm) LS + Stroke A + Stroke LG LH LZ X Y LT LX LY 32 4 30 3.2 57 57 71 11.2 5.8 Rod end male threads 40 4 33 3.2 64 64 78 11.2 7 50 5 39 3.2 79 78 95 14.7 8 63 5 46 3.2 95 91.5 113 16.2 9 L1 Rod end nut Front flange type/CBQ2F, CDBQ2F (mm) Front flange type With rear lock With front lock Bore size (mm) FD FT FV FX FZ A B A B FV M 82.5 65.5 75 58 5.5 8 48 56 65 32 92

IDX-OM-U010

Front Structure of the product number W R 0001 (2018 April) W R 0001 Year Symbol Note Month Symbol Note Serial No. 2018 2019 2020 2021 W X y Z Repeated from A to Z in alphabetical order 1 2 3 4 o P Q R Repeated from A to Z in alphabetical order, with o assigned for January and Z for December. 1.2 Hazard classifications/ Hazard Warning Labels IDFC60/70/80/90 Series 1-4 IDX-OM-U010 Chapter

IDX-OM-W095

(REFRIGERANT) IDFC60-23 W R 0001 (2018 4 ) W R 0001 2017 2018 2019 2020 V W X Y A Z 1 2 3 4 o P Q R o 1 Z 12 IDFC60/70/80/90 Series 1-4 IDX-OM-W095 1.3 HFC 1-4 IDFC60/70/80/90 Series 1-5 IDX-OM-W095 1.4 / 1 1.5 () IDFC60/70/80/90 Series 1-6 IDX-OM-W095 2 2.1 IN OUT (ONOFF ) 6-4 6-4 L N PE 3-5 IDFC60/70/80/90 Series 2-1 IDX-OM-W095 () IDFC60/70/80/90 Series 2-2 IDX-OM-W095 3

AMR3000 to 6000

If it does not locked easily, turn the handle s l i g h t l y c l o c k w i s e o r counterclockwise; then, push it until the orange colored line is no longer visible.

High Purity Fluoropolymer Needle Valve Series LVN 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Number of needle rotations Number of needle rotations Number of needle rotations Construction t r w e With reducer q i A y u y u Part lists y Description No.

VXD21/22/23

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VXD2272/2382/2392 VXD2270/2380/2390 Operation When the coil o is energized, the armature assembly u is attracted into the core of the core assembly y and the pilot valve A opens.

Clean Air Module

IDH Component Parts ID Threaded type Threaded type IDG Manual operation valve (with lever lock) IDK AMG Lead wire with L-type connector AFF With flow adjuster With differential pressure indicator AM PB AMD One-touch fitting One-touch fitting PA AMH AME u t q w e r y AMF No. Description Individual part no.

3-Screen Display High-Precision Digital Pressure Switch Air 1.0 MPa/1.6 MPa ISE70 ISE71

None *1 ISO 1179-1 compliant Orifice K Operation manual + Calibration certificate Symbol Description Nil None T Yes*1 T Calibration certificate *1 Orifice is shipped together with the product.

Electro-Pneumatic Valve NVEP/NVEF Series

Mounting Amplifier Single mounting Ho.izontally Q r A vertica,,y F Multiple mounting + -f -t] + -ti n n n h n t t t l t t l t I i u ! L l !

PF2D

(at 25C water) Temperature characteristics 5% F.S. (0 to 50C, based on 25C) Pulse output, N channel, open drain, output for monitor unit PF2D 300/301 (Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30 V) Pulse output Output Voltage output Note 5) 1 to 5 V Accuracy: 2% F.S., Min. load impedance: 100 k (Output impedance: 1 k) Analog specifications Current output Note