C95Series

20 11 22 14 60 60 129 MB-SIO . 100 11 4 \20 90 15 158 132 \84 26 13.5 24 17 75 100 '29 25 +008001 (mm) [~ "r.

Step Motor Controller (Servo / 24 VDC)

External Wiring Diagram . 20 4.1 CN1: Power connector . 20 4.2 CN2: Motor power connector and CN3: Encoder connector . 20 4.3 CN4: Serial I/O connector . 20 (1) Connection with the teaching box . 20 (2) Connection with a PC . 21 1 - 4.4 CN5: Parallel I/O connector. 21 5.

ASR

7 w w q @0 e q @0 e !4 i y !0 !1 !2 !4 i !5 !6 ASR530F-02 type ASR630F-03 type ASR530F-02 type ASR630F-03 type !8 u o !3 !8 u o !3 !7 !7 !9 !9 t t q @0 q @0 r r !4 i y !0 !1 !2 !4 i !5 !6 Component Parts Note Material No. q w e r t y u i o !0 !1 !2 !3 Description No. !4 !5 !6 !7 !8 !

Compact Vacuum Ejector Series ZQ

0.3 0.4 0.5 0.6 Suction flow (l/min(ANR)) Supply pressure (MPa) ZQ110 Exhaust characteristics ZQ110 Flow characteristics Maximum suction flow (l/min(ANR)) Air consumption (l/min(ANR)) Maximum vacuum pressure (kPa) Maximum vacuum pressure (kPa) Maximum vacuum pressure -80 -80 60 -60 -60 50 40 -40 -40 30 Air consumption 20 -20 -20 10 Maximum suction flow Suction flow (l/min(ANR)) 25 20 15

AR20-B to AR60-B

r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

MHK2

30 30 60 0.3 MPa 0.4 MPa 40 0.5 MPa 0.6 MPa 20 20 40 0.6 MPa 20 20 10 10 50 60 10 0 0 20 50 60 10 0 20 30 40 100 120 20 0 20 30 40 100 80 60 40 40 60 80 Gripping point L (mm) Gripping point L (mm) Gripping point L (mm) Gripping point L (mm) Note) Distance to the gripping point L of single acting type is shortened by spring return.

MHK2

30 30 60 0.3 MPa 0.4 MPa 40 0.5 MPa 0.6 MPa 20 20 40 0.6 MPa 20 20 10 10 50 60 10 0 0 20 50 60 10 0 20 30 40 100 120 20 0 20 30 40 100 80 60 40 40 60 80 Gripping point L (mm) Gripping point L (mm) Gripping point L (mm) Gripping point L (mm) Note) Distance to the gripping point L of single acting type is shortened by spring return.

Wedge Cam Operation Provides

20 40 0.6MPa 20 20 10 10 50 60 10 0 0 20 50 60 10 0 20 30 40 100 120 20 0 20 30 40 100 80 60 40 40 60 80 Holding point L (mm) Holding point L (mm) Holding point L (mm) Holding point L (mm) Note) Distance to the holding point L of single acting type is shortened end by spring return.

High Power Cylinder Series RHC

(n 2) 2 20 + 50 D-B59W 75 + 55 (n 2) 15 20 75 (n = 2, 4, 6...)

High performance type Step Motor Controller (Servo/24 VDC)

The basic parameter is not correct for the following condition: (Assignable value range) (1) Stroke (-) < Stroke (+) (2) W-Area 1 < W-Area2 (If both W-Area1 and W-Area2 is 0, the alarm will not be activated.) (3) Maximum pushing force < Maximum pushing force of The Parameter value is incorrect (01-049) System B RESET the electric actuator parameter input error

IC

Applicable in the programming function with up to 20 steps. Step 1 Step 2 Step 3 Step 4 Step 20 Step 5 . . . . . . . . . . . . .

Single Axis Electric Actuator Series LJ1H

143 Deflection Data 145 Part Number Designations 100 F N 1 1 B G LJ1 10 H W X10 Guide type High rigidity direct acting guide H X10 Non-standard motor Series Series 10 Series 20 Series 30 Limit switch 10 20 30 Cable entry direction None B contact specification 2 pcs.

Vacuum Pad: Ball Joint Type

ZP3 Rotating J K 10 to 16 20 to 50 Non-rotating 10 10 mm ZP3E 20 20 mm 30 30 mm ZP2 40 40 mm 50 50 mm ZP2V ZP Note) Pads are exclusively ball joint type and are not interchangeable with other pads.

Compact Guide Cylinder

1.5 5 3.5 6.5 23.5 26.5 1 20 13.5 13.5 15 25.5 27 9.5 9.5 11 29.5 31 25 11.5 14 16.5 26 28.5 7.5 10 12.5 30 32.5 32 12 13 15.5 25 27.5 8 9 11.5 29 31.5 40 15 20 20 32 32 11 16 16 36 36 50 14.5 21 21 33 33 10.5 17 17 37 37 The value of W in the table means the amount of auto switch protrusion from the body end surface.

SI unit ( device)

SystemCommand N (12) 0 R/W Device Access Locks N Refer to page 17 "Device Access Locks" for details 0x000C 0x0010 (16) 0 R Vendor Name N SMC Corporation 0x0011 (17) 0 R Vendor Text N www.smcworld.com EX430-SIL1_in/out_ 0/4 byte_COM3 (It depends on switch setting 3) 0x0012 (18) 0 R Product Name N 0x0013 (19) 0 R Product ID N EX430-SIL1 0x0014 (20) 0 R Product Text N SI unit 0x0015 (21) 0 R

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Rotate the lever assembly w to align the holes on the lever assembly w and the base e. Insert the lever pin q into the holes to fix the lever assembly w. 1 y Tubing !1 Holder assembly replacement screw i Holder assembly r Insert pin assembly u Fitting nut t Insert bushing Place the insert bushing t on the insert pin assembly r. 2 !

-fl Seies

NVFR2l00 NVFR22C)0 NVFR2300. 2400. 2sO0 Gasket NBR AXr624-20-2 AXr624-20-2 N{r624-20-2 Valve mounting bolt Steel AXr624-26 (M3X31) AXT624-26 (M3X31) AXI624-26 (M3X31) @ Pilot Ass'y Refer to "Pilot Operalor Ass'y/How to Order" on page 8. Series NVFRzOOO:Base Mounted Tlpe Pilot Operatar Ass'g/How to Order NVFR2000 Series enty and lndicat!

IC

Step 20 Step 5 P4 Set pressure P3 P2 The deviation is corrected manually (with keys).

3 Port Solenoid Valve/

M12 connector pin number Wiring specification w r q e w w q e e r q r VG342(R)-X87 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) w r w r w r q e q e q e 3(R) 3(R) 3(R) w r w r w r q e q e q e 3(R) 3(R) 3(R) 1(P) X X Safety limit switch terminal [N.C.]

3 Port Solenoid Valve/

M12 connector pin number Wiring specication w r q e w w q e e r q r VG342(R)-X87 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) w r w r w r q e q e q e 3(R) 3(R) 3(R) w r w r w r q e q e q e 3(R) 3(R) 3(R) 1(P) X X Safety limit switch terminal [N.C.]