Vacuum Pad

Stroke (M) Buffer specification Symbol Stroke 20, 25 35, 50 10 10 mm V V 20 20 mm V V J Rotating K Non-rotating Specifications Pad diameter Buffer specification Stroke [mm] Tightening torque [Nm] Mounting Spring reactive force [N] At 0 stroke At full stroke 20, 25 J/K 10, 20 2.5 to 3.5 M10 x 1 1.0 3.0 35, 50 J/K 10, 20 6.5 to 7.5 M14 x 1 2.0 5.0 Precautions Be sure to read this before handling

Integrated Controller

600 600 X 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 Mey L5 [mm] L5 [mm] L5 [mm] L5 [mm] 600 600 600 600 m Wall L5 Y 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (Q) 2-P one-touch fitting Sensor (Breathing port) PB H G C PA A B N E J B (F) R 2-V PB PA A B Pilot port threaded type (mm) Dimensions A B C D E F G H J K L M N P Q R V Model LVD1-S LVD2-S LVD3-S LVD4-S LVD5-S 4 (5/32") 20 20 45 39 9.5 46 23 11.5 4.5

RZQ

G5-S CV M L B + Full stroke FT FZ AH + Full stroke MVGQ CC RB Double clevis style: RZQD Double Style (mm) J CT Cap bolt Bore size (mm) Hole: CD H10 d9 A B CD CL CT CU CW D32 112.5 82.5 10 102.5 5 14 20 -X 40 124 92 10 114 6 14 22 50 134.5 96.5 14 124.5 7 20 28 2063 30 146 102 14 132 8 20 CU Data Bore size (mm) L B + Full stroke RR CW CX+0.2 +0.4 CX CZ RR CL + Full stroke CZ -0.3 -0.1 32 18

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

S n Nil 2 fingers 2 Number of fingers Bore size 10 mm 16 mm 20 mm 25 mm 32 mm 40 mm Auto switch 10 16 20 25 32 40 Without auto switch (Built-in magnet) Nil Open/Close stroke (mm) Symbol Bore size 10 16 20 25 32 30 60 80 40 100 160 200 Nil 1 2 40 80 100 20 40 60 50 100 120 70 120 160 Copper, fluorine and silicone-free + Low particle generation 22 Vacuum suction type Action Port thread type

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167.0 OUT 31.2 93.5 63 20 IN How To Order J With Magnetic Field Resistant Auto Switch ~ ~ : ; CKS1 , "~" L-3m Type of auto switch Z-5m No mark-No auto switch (With blanking plug) PH1-D-PH1 Clevis width .-J A-16.5mm B-19.5mm PH~D-PH9 Note) If the switch number is written, then the switch actuating rod assem bly is included.

240

Dimensions [mm] Model L1 L2 A B C D E F G J K LEPS10-25 138 152.5 61.8 20 22 30 29 20 29 39 88.2 LEPS10-50 163 177.5 24 43 34 50 24 50 60 113.2 LEPS10L-25 124 138.5 47.8 20 22 30 29 20 29 39 88.2 LEPS10L-50 149 163.5 24 43 34 50 24 50 60 113.2 394 LEPY/LEPS Series Specific Product Precautions 1 Be sure to read this before handling the products.

Cooling Capacity: 100 (11.5kW), Thread: N (NPT, w/Rc-NPT Conversion Fitting), Option: MT (M + T)

Cooling Capacity: 100 (11.5kW), Thread: N (NPT, w/Rc-NPT Conversion Fitting), Option: AKMT (A + K + M + T)

Cooling Capacity: 100 (11.5kW), Thread: N (NPT, w/Rc-NPT Conversion Fitting), Option: KMT (K + M + T)

Cooling Method: W (Water-cooled Refrigeration), Pipe Thread: N (NPT, w/Rc-NPT Conversion Fitting), Power Supply: 20 (3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz), Option: JS (w/Automatic Fluid Fill Function + Conforming to CE/UL Standards)

Cooling Capacity: 200 (20.5kW), Thread: N (NPT, w/Rc-NPT Conversion Fitting), Option: AKM (A + K + M)

Cooling Method: W (Water-cooled Refrigeration), Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting)], Power Supply: 20 [3-phase 200 VAC (50 Hz); 3-phase 200 to 230 VAC (50/60 Hz], Option: B (w/Earth Leakage Breaker)

Cooling Method: W (Water-cooled Refrigeration), Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting)], Power Supply: 20 [3-phase 200 VAC (50 Hz); 3-phase 200 to 230 VAC (50/60 Hz], Option: JM (J + M)

Cooling Method: W (Water-cooled Refrigeration), Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting)], Power Supply: 20 [3-phase 200 VAC (50 Hz); 3-phase 200 to 230 VAC (50/60 Hz], Option: M (Applicable to Deionized Water Piping)

Cooling Capacity: 012 [1000/1200, (50/60 Hz)], Cooling Method: W (Water-cooled), Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option 1: M (Applicabe to DI Water Piping)

Cooling Capacity: 030 [2500/3000, (50/60 Hz)], Cooling Method: W (Water-cooled), Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option 1: M (Applicabe to DI Water Piping)

Cooling Capacity: 018 [1600/1800, (50/60 Hz)], Cooling Method: W (Water-cooled), Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option 1: T (High-pressure Pump Mounted)

Cooling Capacity: 024 [2000/2400, (50/60 Hz)], Cooling Method: W (Water-cooled), Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option 1: DMT (DM + T)

Cooling Capacity: 024 [2000/2400, (50/60 Hz)], Cooling Method: W (Water-cooled), Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option 1: T (High-pressure Pump Mounted)