Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

/25 CY1H15/20/25 CY1H15/20/25 CY1H15/20 CY1H15/20 CY1H25 CY1H15/20 CY1H25 0.08 0.03 CY1H25 Deflection (mm) Deflection (mm) Deflection (mm) Deflection (mm) 0.02 0.06 0.02 0.04 0.01 0.01 0.02 25 25 25 5 10 15 20 0 Moment (Nm) 5 10 15 20 0 Moment (Nm) 5 10 15 20 0 Moment (Nm) CY1HT25/32 CY1HT25/32 CY1HT25/32 0.05 CY1HT25 CY1HT25 CY1HT32 CY1HT25 CY1HT32 0.03 Deflection (mm) Deflection (mm) 0.04

VZ100/300/500

plug connector (M) VZ10-M-M5 DIN terminal (D) VZ10-D-M5 VS VFN Applicable cable O.D.: 3.5 to 7 (Lead wire length) 300 300 (Lead wire length) : With light/surge voltage suppressor 4-6-7 8 Series VZ100 Manifold Specifications Manifold Specifications Manifold type Single base/B mount VV3Z1-01-1 VV4Z1-20-1 Model P(SUP)/R(EXH) Common SUP/Common EXH Valve stations 2 to 20 stations (1) A port Porting

Slider Type Ball Screw Drive/11-LEFS Series

For details about fixing method, refer to Wiring/Cables in the Electric Actuators Precautions. o Actuator cable length Nil Without cable 1 1.5 m 3 3 m 5 5 m 8 8 m* LER Nil: Left LEH LEY -X5 !0 Controller/Driver type*1 A 10 m* 11LEFS 11LEFS C 20 m* !

MQQ

H MM NN MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M 10 10.5 M5 x 0.8 M3 x 0.5 16 11.5 M6 x 1.0 M4 x 0.7 20 13.5 M8 x 1.25 M5 x 0.8 25 16.5 M10 x 1.25 M6 x 1.0 28 22.5 M14 x 1.5 M8 x 1.25 Clevis pin d Dd9 m m l t L t Applicable bore (mm) Applicable snap ring Part no.

MQQ

H MM NN MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M 10 10.5 M5 x 0.8 M3 x 0.5 16 11.5 M6 x 1.0 M4 x 0.7 20 13.5 M8 x 1.25 M5 x 0.8 25 16.5 M10 x 1.25 M6 x 1.0 28 22.5 M14 x 1.5 M8 x 1.25 Clevis pin d Dd9 m m l t L t Applicable bore (mm) Applicable snap ring Part no.

CRQ2

(Example) For M4: L2 = 8 mm Applicable shaft types; S, W L1 L1 = L1 = Q1 = M Q1 = M Q1 = M Q1 = M L1 = L1 L1 = Q2 = M Q2 = M L2 = L2 = Q1 Q1 Size 10, 15 Size 20, 30, 40 Size 10, 15 Size 20, 30, 40 (mm) (mm) (mm) Size 10, 15 Size 20, 30, 40 Size Size Size 10 15 20 30 40 10 15 20 30 40 10 15 20 30 40 Thread Thread Thread M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M3

MXQ

MXQ16-20 MXQ16-20 MXQ16-20 MXQ16-20 D0.02 0.04 MXQ16-10 MXQ16-10 MXQ16-10 0.01 MXQ16-10 MXQ16-10 -X 0 0 400 100 200 300 150 150 50 100 200 50 100 200 0 20Load (N) Load (N) Load (N) Data 20 20 20 Lr = 160 mm 0.08 MXQ20-125 MXQ20-150 MXQ20-125 MXQ20-125 MXQ20-10 MXQ20-10 MXQ20-20 MXQ20-20 MXQ20-30 MXQ20-30 MXQ20-10 MXQ20-20 MXQ20-30 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-75 MXQ20-40 0.12 MXQ20-40

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

-m-L3m-mmm : 0 x 00016F (367) PF2M701-m-L4m-mmm : 0 x 000170 (368) PF2M725-m-Lm-mmm : 0 x 00017D (381) PF2M725-m-L2m-mmm : 0 x 00017E (382) PF2M725-m-L3m-mmm : 0 x 00017F (383) PF2M725-m-L4m-mmm : 0 x 000180 (384) PF2M702-m-Lm-mmm : 0 x 000171 (369) PF2M702-m-L2m-mmm : 0 x 000172 (370) PF2M702-m-L3m-mmm : 0 x 000173 (371) PF2M702-m-L4m-mmm : 0 x 000174 (372) PF2M750-m-Lm-mmm : 0 x 000181

CE

10 m, 15 m, 20 m Extension Cable (Option) Note 1) This includes the digital display error of the counter (CEU5).

1.63

m (kg) 32, 40 50, 63 32, 40 32, 40 32, 40 32, 40 10 10 32, 40 D1 1 10 50 51 100 101 200 10 100 51 50 101 200 -X Stroke (mm) Stroke (mm) 509 MGPW Series L L m m Horizontal Mounting Ball bushing MGPWL20 to 25, MGPWA20 to 25 (25) L = 50 mm, V = 400 mm/s or less (26) L = 100 mm, V = 400 mm/s or less 10 10 25 25 25 25 25 25 Load mass m (kg) Load mass m (kg) 20 20 20 20 20 1 1 20 10 25 26 100

0.4

This allows for viable connections to take place without necessarily specifying whether the manifold station is double, single, or mixed wiring. 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM.

air-filter-e

Pressure Control Equipment Industrial Filters Port size Port size FN1 FN4 Symbol 10 20 Rc1 Rc2 Applicable model Specifications FN1 FN1101 FN1102 FN1112 FN4102 65 x 250L 65 x 500L Model Element dimension Material Construction Stainless steel 304 Element Cylindrical type 5 m, 20 m Step type 5 m Cylindrical type 5 m, 20 m Step type 5 m Cylindrical type 5 m, 20 m Nominal filtration rating Differential

Air Preparation Equipment

Pressure Control Equipment Industrial Filters Port size Port size FN1 FN4 Symbol 10 20 Rc1 Rc2 Applicable model Specifications FN1 FN1101 FN1102 FN1112 FN4102 65 x 250L 65 x 500L Model Element dimension Material Construction Stainless steel 304 Element Cylindrical type 5 m, 20 m Step type 5 m Cylindrical type 5 m, 20 m Step type 5 m Cylindrical type 5 m, 20 m Nominal filtration rating Differential

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

stations/Double wiring T kit for 2 to 20 stations/Single wiring M kit for 2 to 12 stations/Double wiring M kit for 13 to 24 stations/Double wiring M kit for 2 to 24 stations/Single wiring Note) F/P/J/G kit are available with Nil only.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

stations/Double wiring T kit for 2 to 20 stations/Single wiring M kit for 2 to 12 stations/Double wiring M kit for 13 to 24 stations/Double wiring M kit for 2 to 24 stations/Single wiring Note) F/P/J/G kit are available with Nil only.

CE

10 m, 15 m, 20 m Extension Cable (Option) Note 1) This includes the digital display error of the counter (CEU5).

energy saving effect

[MPa] Circulating fluid pressure [MPa] Usable flow rate range Usable flow rate range 0.5 0.5 50 HECR 50 0.43 0.45 Outlet Pump head [m] Pump head [m] Outlet 0.4 0.4 40 40 HEC 0.3 30 0.3 30 HEB 0.2 20 0.2 20 HED Return port 0.1 10 0.1 10 Return port 0 0 0 0 HEA 45 40 50 0 10 20 30 60 70 80 90 100 110 120 Circulating fluid flow rate [L/min] 45 0 20 10 40 30 50 60 70 80 90 100 110 120 130 Circulating

Fluoropolymer Tubing Variations

How to Order Burst pressure drop curve 1.0 TL0604 Metric sizes 20 Burst pressure drop coefficient 0.8 TIL01 20 Inch sizes 0.6 Length Applicable to both metric and inch size Tubing Model 0.4 Symbol 10 20 50 100 Type Length 10 m 20 m 50 m 100 m 0.2 Roll 0 20 40 60 80 100 120 140 160 180 200 220 240 260 Temperature (C) Straight 2 m 2S Length Applicable to inch size only Eluting fluorine ion

0.4

With cable (1.5 m) 2 to 24 2 to 24 P. 398 With cable (3 m) With cable (3 m) stations stations With cable (5 m) With cable (5 m) Terminal block box 2 to 20 stations Note 2) L kit (Serial transmission) kit (Circularconnector) S M kit (Lead wire) The valve is equipped with an indicator light and surge voltage suppressor, and the voltage is 24 VDC.

Table of Contents

Dimensions H1 (Hexagon width across flats) Applicable tubing O.D. d H2 (Hexagon width across flats) L4 L3 L5 D1 L2 M M L1 Metric Size Inch Size L5 L5 L4 Max. L4 Max. Panel-cut dimensions Panel-cut dimensions L1 L2 L3 M d D1 H1 H2 L1 L2 L3 M D1 d H1 H2 Model Model Min. Max. Min. Max.