MTS

48 48 (63) 0 (10) 40 D-M9, D-M9V 10 (17) 0 0 54 59 (66) 48 58 (65) 5 (12) D-F9W, D-F9WV 10 (17) 0 0 54 59 (66) 48 58 (65) 5 (12) ( ): Denotes the values of D-A9V, D-M9V and D-F9WV.

Digital Flow Switch (Remote type sensor unit)

PF2A510 1 10 PF2A550 5 50 PF2A511 10 100 PF2A521 20 200 PF2A551 50 500 -22No.PF-OMO0010-C Dimensions (in mm) PF2A510/550 Output specifications A B C Output for PF2A3 48 mm 62 mm 94.3 mm Output for PF2A3 + Analogue output 58 mm 72 mm 104.3 mm -23No.PF-OMO0010-C PF2A511/521/551 Output specifications A B C Output for PF2A3 48 mm 62 mm 94.3 mm Output for PF2A3 + Analogue output 58 mm 72 mm 104.3

IDX-OM-W026

1,770 R410A 2,088 2,090 (1) (2) IDF Series 6-1 6 1 IDX-OM-W026 6 6-3 IDF22E, IDF37E Guige Guige ( 10) Guige (10) (820) 17 4-13 (17) [] mm A B C D E F G H J K L M N P IDF22E R1 775 6001 IDF37E R11/2 855 6801 85 340 (698) (93) 46 25 290 623 (134) (405) 13 314 IDF55E, IDF75E Guige Guige 10 (10, 1m 1m) 4-13 17 (911)[] mm A B C D E F G H J K L M N P Q R IDF55E 800 (868) IDF75E 900 (

4-channel Flow Monitor (Remote type monitor unit)

1.0 to 38.0 2 to 76 8 to 186 CFM x 10-2 CFM x 10-2 CFM x 10-1 CFM x 10-1 CFM x 10-1 flow Flow Min. setting/display unit 0.5 2.0 0.5 1.0 2.0 CFM x 10-2 CFM x 10-2 CFM x 10-1 CFM x 10-1 CFM x 10-1 Accumulated Setting/display flow range 0 to 9 ft3 x 10-2 0 to 9 ft3 x 10-1 flow Min. setting/display unit 1 ft3 x 10-3 1 ft3 x 10-1 Conversion of accumulated pulse 0.5 2.0 0.5 1.0 2.0 ft3 x 10-2/

VQ7-6/7-8

Control unit type (See pages 3-10-18 and 19 for details.) Thread type Rc Nil Control equipment Symbol A Nil AP M MP F G C E NPTF T G F Air filter with auto-drain Air filter with manual drain Regulator Air release valve Pressure switch Blanking plate (Air release valve) Note) It is not applicable to O n e t o u c h fittings.

VQ7-6/7-8

Control unit type (See pages 3-10-18 and 19 for details.) Thread type Rc Nil Control equipment Symbol A Nil AP M MP F G C E NPTF T G F Air filter with auto-drain Air filter with manual drain Regulator Air release valve Pressure switch Blanking plate (Air release valve) Note) It is not applicable to O n e t o u c h fittings.

VXZ

C. Normally closed N. O.

HRX-OM-W004

3.10.1 LRC(ASCII) .3-10 3.10.2 CRC(RTU) .3-10 3.11 Explanation of function codes . 3-12 3.11.1 Function code04 Reading multiple registers .3-12 3.11.2 Function code06 Writing registers .3-13 3.11.3 Function code16 Writing multiple registers .3-14 HRR Series HRX-OM-W004 Contents 3.11.4 Function code23 Reading/writing multiple registers . 3-15 3.12 Negative response . 3-16 3.13 Register Map

Information

Proportion control Analog monitor 1 10 VDC 1 LG TL 18 External torque limit selection 10 VDC 2 MO2 Analog monitor 2 LSP 43 Forward rotation stroke end LSN 44 Reverse rotation stroke end 2 m or less DOCOM 47 Upper limit setting P15R 1 Analog torque limit +10 V/Maximum torque TLA 27 LG 28 SD Plate 2 m or less Note 1) PE Note 1) For preventing electric shock, be sure to connect the driver,s

FREE MOUNT CYLINDER

(mm) Model 6 10, 16 20, 25, 32 Single rod C(D)U*-*D 0.12 0.06 0.05 Double acting Standard Double rod C(D)UW*-*D 0.15 0.10 0.08 Single acting Single rod C(D)U*-*S, T 0.2 0.15 0.13 Single rod C(D)UK*-*D 0.15 0.10 0.08 Double acting Non-rotating type Double rod C(D)UKW*-*D 0.18 0.13 0.11 Single acting Single rod C(D)UK*-*S, T 0.23 0.18 0.16 1-2.

Sine Rodless Cylinder Series REBR Direct Mount Type

range Usable range 5 5 5 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 7 8 9 10 11 7 8 9 10 1112 13 14 15 Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) 100 REBR32 REBR25 10 REBR15 1 0.1 100 200 300 400 600 500 Maximum speed U (mm/s) 62 Series

Digital Flow Switch (Manifold type)

Manifold type: C is not applicable to close.

Compact Cylinder

Minimum lead wire bending radius 10 H thread effective depth C 4 x N through F Q I E M Z A + Stroke B + Stroke L W G M K J Standard [mm] Bore size Stroke range Without magnet for auto switch With magnet for auto switch C D E F G H I J K L M N P Q W Z A B A B 50 10 to 50 37 29 42.5 34.5 15 18 57 9 M10 x 1.5 74 6.5 16 8 46 5.5 1/8 13 63.5 15 63 10 to 50 41.5 33.5 46.5 38.5 15 18 70 10 M10

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

HAW22-14 AT11C-06 AFF8B-04 IDF8DAM350-04 AMD350-04 11 1.5 HAA15-10 HAW22-14 AT11C-06 AFF8B-06 IDF11CAM350-06 AMD450-06 15 2.0 HAA22-14 HAW22-14 AT22C-14 AFF11B-06 IDF15CAM450-06 AMD450-06 22 3.0 HAA37-14 HAW37-14 AT22C-14 AFF22B-10 IDF22C1-3 AM550-10 AMD550-10 27 3.5 HAA37-14 HAW37-14 AT37C-14 AFF22B-10 IDF22C1-3 AM550-10 AMD550-10 37 5.0 HAW55-20 AT37C-14 AFF37B-14 IDF37C1-3 AM650-14 AMD650

CEx-OMG0106

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

10 12 Only R is available.

CQM

Mounting Bolt for CQM/Without Auto Switch Model C D Mounting bolt Model C D Mounting bolt Model C D Mounting bolt CQMB12-5 -10 -15 -20 -25 -30 CQMB16-5 -10 -15 -20 -25 -30 CQMB20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CQMB40-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CQMB50-10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CQMB25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CQMB32-5 -10 -15 -20 -25

Bernoulli Gripper

Specifications [mm] Model Top ported Side ported Min. hole dia A B C D ZNC20 10 or less 8.3 or less 1 or more 10 or less 2.5 or more A Top ported Mounting bolt Side ported Gap B B Air supply port D D Multi-port C C Gap Suction surface Recommended Part Numbers List Series Variations Model Top ported Side ported ZNC20T ZNC20 Male connector KQ2H04-M5m V V One-touch fittings Hexagon socket head

VCS

Orifice size Class 3 Class 2 Orifice size (mm) 2 3 4 5 7 10 Class 4 Symbol 2 3 4 5 7 10 Electrical entry G Grommet C Conduit Refer to the below table for orifice and port size combinations.

SL5200

160C (40 to 71C) (No freezing) 1) 0.07 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 2) 4 x 10-9 Pam3/sec 2) Ra max 10 in. (0.25 m) Option: 7 in. (0.18 m), 5 in. (0.13 m) Face seal, Tube weld 0.20 psig (0.0014 MPa) rise in delivery pressure per 20 psig (0.14 MPa) source pressure drop Bottom mount 0.19 in3 (3.1 cm3) 0.99 lbs (0.45 kg) 3) Delivery pressure Gas Source pressure Proof pressure (Inlet)