EXxx-OMC0002

(Tightening torque: 0.6 Nm) -21No.EX-OMC0002-C How to replace the EX124 Series SI unit Removal 1. Remove the cover from the SI unit, by removing the screws (4 x M4) which hold the cover. 2. Disconnect the wiring from the SI unit, and remove the SI unit from the manifold. Disconnect the wiring to the SI unit.

Vacuum Unit Ejector / Vacuum Pump System

Not specified Not specified 10,000 4 +3 4 5 5 Not specified Not specified 100,000 5 +7 6 +10 -19No.

13

Best Pneumatics 13 Vacuum Equipment Vacuum Module: ZX P. 13-2-4 ZX Vacuum Module: ZR P. 13-3-4 ZR Vacuum Ejector: ZM P. 13-4-2 ZM Vacuum Ejector with Solid State Timer: ZMA P. 13-4-23 ZH Vacuum Ejector: ZH P. 13-5-2 ZU In-line Vacuum Ejector: ZU P. 13-6-3 ZL Vacuum Ejector: ZL P. 13-7-4 ZY Ejector Valve Unit: ZYY/ZYX P. 13-8-4 ZQ Compact Vacuum Ejector: ZQ P. 13-9-2 ZF Air Suction

Process Valve

6 to 8 (D, DL) Pg9 Pilot port 12 (P1), 10 (P2) Port size: refer to table below G (Air operated) H (Grommet: G) I (DIN terminal: D, DZ) Manual override (Non-locking push type) P2 P1 F E D B A A J B C Main port 1(A) (Back side 2 (B)) Port size: refer to table below Main port 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H I J Model VNB5-32A VNB6-40A VNB7-50A 1 8 1 4 1 4 1 4 1 2 1 1 2

RQ

4 4 4 4.5 5.5 5.5 5.5 6.5 5.5 6.5 Hysteresis specifications are given as a guide, it is not a guaranteed range.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

/8 1/4 Piping specifications Symbol A02 A03 A04 A06 A10 B02 B03 B04 B06 Size 2 Size 3 Size 1 Horizontal 3/8 Side-ported 1/4 0.37 3/8 1/4 Side-ported 3/8 Bottom 3/8 Side-ported 1/2 3/8 Side-ported 3/4 0.68 1/2 Horizontal Side-ported 1 1.29 3/4 Bottom-ported 1/4 3/8 Bottom-ported 3/8 0.68 1/2 Bottom Bottom-ported 1/2 1.29 3/4 Bottom-ported 3/4 3/4 1/2 Thread type 3/4 Horizontal Rc Nil

HRX-OM-X084

. 4-1 4.2 Starting and Stopping . 4-2 4.2.1 Operation . 4-2 4.2.2 Operation restart when alarm is generated . 4-3 4.2.3 Stopping the product . 4-5 4.2.4 Cautions for re-start . 4-5 4.3 Adjustment of bypass valve . 4-6 4.4 Check items after starting . 4-6 Chapter 5 Display and Setting of Various Functions . 5-1 5.1 List of Functions . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.3 List

2-Color Display

kPa 100 kPa 100 kPa For positive pressure 0.100 to 1.000 MPa 0.1 MPa 0 1 MPa 1 0.6 4 2.4 B A C B A C Pressure Pressure Descriptions LCD Unit display Displays the current pressure, set mode, and error code.

Ｖ cylinder

Hexagon wrench of cushion valve Bore size (mm) Width across flats Hexagon wrench 40,50,63 3 JIS 4648 Hexagon wrench key 3 80,100 4 JIS 4648 Hexagon wrench key 4 C a u t i o n Use the air cushion at the end of cylinder stroke. Select the cylinder with bumper if the cushion valve is to be fully opened. Otherwise, tie-rods or piston assembly may be damaged. 11 2-8.

CUJ

bolt CUJB4-4 -6 -8 -10 CUJB6-4 -6 -8 -10 -15 CUJB8-4 -6 -8 -10 -15 -20 CUJB10-4 -6 -8 -10 -15 -20 Model Mounting bolt CUJB4-4 -6 -8 -10 CUJB6-4 -6 -8 -10 -15 CUJB8-4 -6 -8 -10 -15 -20 CUJB10-4 -6 -8 -10 -15 -20 C D A M2.5 x 21l M2.5 x 23l M2.5 x 25l M2.5 x 27l M3 x 22l M3 x 24l M3 x 26l M3 x 28l M3 x 33l M3 x 22l M3 x 24l M3 x 26l M3 x 28l M3 x 33l M3 x 38l M3 x 22l M3 x 24l M3 x 26l M3

AC Servo Motor Driver (MECHATROLINK-II type)

Lead Series Lead (Including Pn20E Pn210 symbol pulley ratio) A 12 65536 750 LEY25/LEYG25 B 6 375 LEY25D/LEYG25D C 3 131072 375 A 20 65536 1250 LEY32/LEYG32 B 10 625 LEY63D C 5 131072 625 A 16 1000 LEY B 8 500 LEY32D/LEYG32D C 4 250 65536 A 20 1250 B 10 625 C 5 131072 625 LEY63 5(2.86) L 229376 625 (Pulley ratio 4/7) H 20 1250 LEFS25 A 12 750 B 6 375 H 24 1500 LEFS32 A 16 1000 B 8 500 LEF

RSH/RS1H

Rc 1/4 M5 x 0.8 Port size NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 ML2B G 1/8 G 1/8 G 1/4 G 1/4 Moantable Auto switch C J G5-S Bore Size/Standard Stroke (mm) CV MVGQ Standard stroke Bore size (mm) Model 20 15 CC RSH RS1H 32 20 50 30 RB RS1H 63 30 J 80 40 Weight D(kg) -X Bore size (mm) Action Rod end configuration Weight 2020 0.41 Data Double acting, 32 0.75 Lever type with built-in shock absorber

RSH/RS1H

Rc 1/4 M5 x 0.8 Port size NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 ML2B G 1/8 G 1/8 G 1/4 G 1/4 Moantable Auto switch C J G5-S Bore Size/Standard Stroke (mm) CV MVGQ Standard stroke Bore size (mm) Model 20 15 CC RSH RS1H 32 20 50 30 RB RS1H 63 30 J 80 40 Weight D(kg) -X Bore size (mm) Action Weight Rod end configuration 2020 0.41 Data Double acting, 32 0.75 Lever type with built-in shock absorber

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

Standard 1 2 3 4 5 6 7 Stainless steel Clip Stainless steel, Cu Tube assembly Class H Coil assembly Stainless steel, PTFE (FKM) Armature assembly PTFE (FKM) Seal Stainless steel Return spring Brass Body Dimensions (mm)/Bracket 1in = 25.4mm A J 4-G C 1.5 B D E L 4-H Valve mounting hole F Bracket mounting dimensions (mm) B C D E F G H J L A Bracket part no.

FGD-E

) B L500(L2502) 03 3/8 04 1/2 06 3/4 materials Symbol Cover Case Gasket/O-ring Seal C Aluminum SPCD NBR Nylon E Aluminum SPCD NBR Nylon/Fluororesin (Antistatic specification) Fluororesin Fluororesin T SCS14 Stainless steel 316 Fluororesin Fluororesin F SCS14 Stainless (Antistatic specification) steel 316 10/13 FGX-OM-L005-C 4.

Microspeed Cylinder

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" 38 (1.33) 7 (0.25) Flow rate l/min (ANR) (CFM) 12 (0.42) Controlled flow 0.6 (0.03) 0.2 (0.01) 0.1 (0.006) Effective area

3-Position Rotary Table

4 @4 #3 !8 #7 #8 o #6 q #9 y i $2 @3 @2 #1 @6 #4 #5 Component Parts Note Anodized Nickel plated Chromated Note No.

3/5 Port Solenoid Valve

Take note that the leakage voltage will increase when a resistor is used in parallel with a switching element or when a C-R circuit (surge voltage suppressor) is used for protecting a switching device because of the leakage voltage passing through the C-R circuit. The suppressor residual leakage voltage should be as follows. 4.

MY1

4 !0 !9 !8 !5 !

Precautions 1

Rod End Nut (mm) Trunnion Nut (mm) Mounting Nut (mm) H Material: Carbon steel Material: Carbon steel Material: Carbon steel d d B D D C C C D H B H B d Applicable bore size 20 25, 32 40 Applicable bore size 20 25, 32 40 Applicable bore size 20 25, 32 40 B C D d H D d H C B d H B C D Part no. NT-02 NT-03 NT-04 Part no.