Oscillation Angle A: [180°] 180°, Torque (Range)(N⋅m): 6 to Less than 10, Type: Rotary Actuator Both Sides Shaft Outputs, Main Body Shape: Round Shape Block Mount, Operation Method: Single Vane, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 40, Valves: Not Provided, Allowable Kinetic Energy

Oscillation Angle A: [180°] 180°, Torque (Range)(N⋅m): Less than 1, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Round Shape Block Mount, Operation Method: Single Vane, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): Less than 0.005, Tube Nominal Diameter: 10, Valves: Not Provided, Allowable Kinetic Energy(J): 0.00015

Oscillation Angle A: [180°] 180°, Torque (Range)(N⋅m): Less than 1, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Round Shape Block Mount, Operation Method: Single Vane, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): Less than 0.005, Tube Nominal Diameter: 15, Valves: Not Provided, Allowable Kinetic Energy(J): 0.001,

Oscillation Angle A: [180°] 180°, Torque (Range)(N⋅m): 1 to Less than 3, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Round Shape Block Mount, Operation Method: Single Vane, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): Less than 0.005, Tube Nominal Diameter: 20, Valves: Not Provided, Allowable Kinetic Energy(J): 0.003

Oscillation Angle A: [180°] 180°, Torque (Range)(N⋅m): 6 to Less than 10, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Round Shape Block Mount, Operation Method: Single Vane, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 40, Valves: Not Provided, Allowable Kinetic Energy

Oscillation Angle A: [180°] 180°, Torque (Range)(N⋅m): 6 to Less than 10, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Round Shape Block Mount, Operation Method: Single Vane, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 40, Valves: Not Provided, Allowable Kinetic Energy

Oscillation Angle A: [180°] 180°, Torque (Range)(N⋅m): Less than 1, Type: Rotary Actuator Both Sides Shaft Outputs, Main Body Shape: Round Shape Block Mount, Operation Method: Single Vane, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): Less than 0.005, Tube Nominal Diameter: 10, Valves: Not Provided, Allowable Kinetic Energy(J): 0.00015

Oscillation Angle A: [180°] 180°, Torque (Range)(N⋅m): Less than 1, Type: Rotary Actuator Both Sides Shaft Outputs, Main Body Shape: Round Shape Block Mount, Operation Method: Single Vane, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): Less than 0.005, Tube Nominal Diameter: 15, Valves: Not Provided, Allowable Kinetic Energy(J): 0.001

Oscillation Angle A: [180°] 180°, Torque (Range)(N⋅m): 1 to Less than 3, Type: Rotary Actuator Both Sides Shaft Outputs, Main Body Shape: Round Shape Block Mount, Operation Method: Single Vane, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): Less than 0.005, Tube Nominal Diameter: 20, Valves: Not Provided, Allowable Kinetic Energy(J):

Oscillation Angle A: [180°] 180°, Torque (Range)(N⋅m): 1 to Less than 3, Type: Rotary Actuator Both Sides Shaft Outputs, Main Body Shape: Round Shape Block Mount, Operation Method: Single Vane, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): Less than 0.005, Tube Nominal Diameter: 20, Valves: Not Provided, Allowable Kinetic Energy(J):

Oscillation Angle A: [180°] 180°, Torque (Range)(N⋅m): 3 to Less than 6, Type: Rotary Actuator Both Sides Shaft Outputs, Main Body Shape: Round Shape Block Mount, Operation Method: Single Vane, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 30, Valves: Not Provided, Allowable Kinetic Energy

Oscillation Angle A: [180°] 180°, Torque (Range)(N⋅m): 3 to Less than 6, Type: Rotary Actuator Both Sides Shaft Outputs, Main Body Shape: Round Shape Block Mount, Operation Method: Single Vane, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 30, Valves: Not Provided, Allowable Kinetic Energy

Oscillation Angle A: [180°] 180°, Torque (Range)(N⋅m): 6 to Less than 10, Type: Rotary Actuator Both Sides Shaft Outputs, Main Body Shape: Round Shape Block Mount, Operation Method: Single Vane, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 40, Valves: Not Provided, Allowable Kinetic Energy

Oscillation Angle A: [180°] 180°, Torque (Range)(N⋅m): 6 to Less than 10, Type: Rotary Actuator Both Sides Shaft Outputs, Main Body Shape: Round Shape Block Mount, Operation Method: Single Vane, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 40, Valves: Not Provided, Allowable Kinetic Energy

HRX-OM-M091

Time for monitoring the communication error 180 sec When the customer's device is sending messages every 60sec, if the communication cable is disconnected and no message is received for 180sec, the product generates AL19 communication error alarm to notify the error. This product Your system Write or read Monitoring 60 sec. time Write or read Monitoring 60 sec. time Passage of 180 sec.

HRX-OM-Q033

Time for monitoring the communication error 180 sec When the customer's device is sending messages every 60sec, if the communication cable is disconnected and no message is received for 180sec, the product generates AL19 communication error alarm to notify the error. This product Your system Write or read Monitoring 60 sec. time Write or read Monitoring 60 sec. time Passage of 180 sec.

IZx-OMP0064

Detecting port Installation Detection range distance mm mm 10 45 25 100 50 180 M3 screw Unit: mm A B 10 20 20 40 25 45 30 55 40 65 50 75 Mount a metal plate directly beneath the ionizer so that the metal plate faces the ionizer. Offset voltage may vary depending on the installation environment.

High Vacuum L Type Valve

H5 Initial power / 100 VAC 200/40 400/70 400/80 600/130 800/180 Power 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

HRX-OM-S010

Time for monitoring the communication error 180 sec When the customer's device is sending messages every 60sec, if the communication cable is disconnected and no message is received for 180sec, the product generates AL19 communication error alarm to notify the error. This product Your system Write or read Monitoring 60 sec. time Write or read Monitoring 60 sec. time Passage of 180 sec.

Compact

( ): Using an external guide (Provided by customer). 167 INDEX Model Selection Page 170 Step Motor (Servo/24 VDC) Electric Actuator/Low Profile Slider Type: Basic Type LEMB Series How to Order Page 178 Specifications Page 180 Construction Page 181 Dimensions Page 182 Step Motor (Servo/24 VDC) Electric Actuator/Low Profile Slider Type: Cam Follower Guide Type LEMC Series How to Order Page