30

D-X Technical Data 1141

10%3025Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3025Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3025Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

High Purity Fluoropolymer Needle Valve Series LVN 1

S) D H VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 VXA VN A port LVC 2-G LVA LVH SMC LVD SMC (J) C LVQ LQ E LVN TI/ TIL PA F K B port E PAX PB A B C D E F G H J K S LVN20 LVN30 LVN40 Model 48 60 72 2.4 7.5 8.0 18 24 30 20 26 33 14 25 25 4 5 6 6 9 11 34.5

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

Trace the intersection E upward, and C leftward to obtain the intersection D. 6. The intersection C is the amount of water included in the compressed air 1 m3 at 0.7 MPa with the pressure dew point of 62C. The amount of water is 18.2 g/m3. 7.

Series PF2W Digital Flow Switch For Water

Nil C Thread type Nil N F Rc NPT G The cable and connector are shipped unassembled. Lead wire (Refer to page 322.)

Hydraulic Filters

After washing the element, make sure the base seal is properly mounted. 500 A Vertical Suction Filter FHIA Series Dimensions Differential pressure indicator 16 B (34) F OUT Removal dimension K H F OUT D E C H Differential pressure indication switch FH FH 62 HOW (65) F IN 4 x I OUT A J G (mm) A B C D E F G H I J K Model Weight (kg) FHIA-04 FHIA-06 FHIA-08 FHIA-10 FHIA-12 FHIA-16 FHIA-20 FHIA

VXA21/22

Series VXA31/32 Dimensions P port Bracket Pilot port Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com J (Spanner flat) Port size P Port size Rc With bracket K 6 7.5 Symbol Model A B C D E F G H J M 14.5 17 L 29 32 1 8 1 4 VXA31 VXA32 19 25 20 20 18 21 20 20 22.5 27.5

NAIV

Suite D Poway, CA 92064 TEL: (858) 679-190s FAX: (858) 679-1904 ARGENTINA SMC Argentina S.A. CHILE SMC Pneumatics (Chite) Ltda.

VF1000-OMP0001

5000 5 5 5 5 / / / / ( ( ( ( ) ) ) ) ( ( ( ( ) ) ) ) 3 5m 30 ( ) 1 ()ISO VG32 2 ()ISO VG32 7 VF1000-OMP0001 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 (E) (T) DIN (D) L (L) M (M) DC +DIN +-1 2 (G) A C S DIN DIN DIN DIN DIN D 68mm Y 4.57mm T 68mm E 2.32.8mm E, T 1.25-3, 1.25-3S, 1.25Y-3N, 1.25Y-3S D,Y R Y Z EZTZDZLZMZ AC24V (+) D C S VF1000 VF1000 VF1000

AMF

190 13 13 16 16 19 55 66 72 92 98 63 76 76 90 90 7.5 4 4 5 5 63 76 76 90 90 10 10 10 10 10 AMF150 AMF250 1/2 3/8, 1/2 AMF350 3/4 AMF150SAME, #1 AMF250SAME, #2 AMF350SAME, #3 4.6-31 Odor Removal Filter Series AMF Dimensions: AMF450 to AMF850 HAl AT IDl AMG AFF AMl M Dimensions with mounting bracket Model Port size (Nominal size B) A H B C D E F G I 221 J 25 K 10 L 14 N 90 O 55 P 110 Q 50

Slide Tables MX Series

OUT port (on both sides) OUT OUT port IN Table 1 (mm) d 5 5 10 15 L 21 25 35 47 Bore size (mm) MXH6 MXH10 MXH16 MXH20 IN port IN port (on both sides) d L Operating Precautions Stroke Direction Backlash Caution Caution Since the connection between the piston rod and table is a floating structure, there is a maximum table backlash of 0.15mm in the stroke direction.

PSxx-OMS0004CN

OUT() DC(-) DC(+) PSE57--28 420 mA N.C. 500 (24 V ) 100 (12 V ) OUT() DC(-) -13No.PS-OMS0004CN-D (A/D ) () 20 2030 -14No.PS-OMS0004CN-D PSE570 PSE573 PSE574 01MPa -100100 kPa 0500 kPa 3.0MPa 600 kPa 1.5MPa oC) oC) (25 ) 2F.S.(050 3F.S.(050 oC) oC) 3F.S.(-1060 4F.S.(-1060 PSE57PSE57--28 DC1224 V1010% 10 mA 420 mA 15 V 1 k 500 (24 V ) 100 (12 V ) (25 oC) 1.0F.S. 0.5F.S. oC)

90

NPN 1 output ISE30A-01-N-ML Digital pressure PNP 1 output ISE30A-01-P-ML NPN 1 output/ Voltage output ISE30A-01-C-ML switch Note 3) NPN 1 output/ Current output ISE30A-01-D-ML Note 1) This is an assembly of the bracket and resin panel nut. Note 2) l in part numbers for a round type pressure gauge indicates a type of connection thread.

Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

Class B or equivalent (130C) Note) Coil insulation type Note) Based on JIS C 4003 How to Order 1 L 02 0 1 1 4 VS C Thread type Direct operated/Metal seal solenoid valve Electrical entry Nil Rc NPT NPTF Option 4, 5 port valve N Symbol Electrical entry Electrical entry position C T U D T Sub-plate Conduit Type of actuation Conduit with terminal Sub-plate Body size: 1/8 standard F Single

E-P HYREG

D B Valve size PVQ Sub-plate VEXD-5 VEXB-2-2 P (Port size: M5) VY1 VY1 Thread type Port size Symbol A B Port size M5 Symbol Nil F N T Thread type Rc G (7) VBA VBAT 1 8 AP100 NPT NPTF VYD-7 VEXB-4-1 Base gasket 2 4 Valve size VEX1-9-1 P VEX4-2AP Sub-plate Port size Thread type Port size Thread type Symbol A B Port size Symbol Nil F N T Thread type Rc G (7) Symbol A B C Port size Symbol Nil

PSxx-OMV0003CN

No.PS-OMV0003CN-G / / ISE70--L2 ISE71--L2 2 8 9 11 14 14 15 17 19 20 3 21 23 25 25 25 F0 27 F1 OUT1 29 F2 OUT2 32 F3 34 F4 35 F6 37 F10 38 F11 44 F14 Zero-cut 45 F80 46 F81 47 F90 49 F96 51 F98 52 F99 54 55 IO-Link 60 IO-Link 60 60 61 IO-Link 64 72 72 73 82 84 -1No.PS-OMV0003CN-G (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General

AS-FPQ/AS-FPG

Printed in Japan. 1st printing November, 2000 D-SMC.L.A. P-80 (D)

Digital Gap Checker

[June 2018] C: Contents revised in several places. [September 2019] D: Contents revised in several places. [October 2021] E: Contents revised in several places.