SMC Pneumatic Clean Series (Refer to Front matter 23 "Particle generation measuring method"and Front matter 24 "Comparison of cleanliness standards" for details.)
16 37.8 23 6 18 12 0.02 0.02 0.05 112211221122MHZ2-16D 5 15 67.3 8 11 38 16 6.5 23.6 30 13 30.6 24 42.5 24.5 7.5 22 15 0.02 0.02 0.05 MHZ2-20D 8 18 84.8 10 16.8 50 18.6 7.5 27.6 35 15 42 30 52.8 29 9.5 32 20 0.02 0.02 0.05 MHZ2-25D 102.7 63 33.6 52 63.6 11 25 10 12 22 36.5 36 30 40 22 21.8 10 20 0.02 0.02 0.05 U V W X Y Z AA AB AC AD AE AF AG AH AJ AK Model 1122+0.043 0 +0.043 0 +0.052 0
0.8 M6 x 1 P M3 x 0.5 M3 x 0.5 M3 x 0.5 M5 x 0.8 PA M3 x 0.5 M3 x 0.5 M3 x 0.5 M5 x 0.8 Q S SD SF SU UU WA WB WC WD M3 x 0.5 M3 x 0.5 M3 x 0.5 M4 x 0.7 WE WF XA XB XC YA YB YC Size 3.5 16 50.5 10.8 24.4 9.4 25 9.5 2H9 2 4.8 20 22.5 2H9 2 11 2H9 2 1 3.5 18 56 13.4 26.2 11.3 28 10 2H9 2 5.3 21 24.5 2H9 2 11.5 2H9 2 2 3.5 20.5 60 15.2 31 11.8 30.5 12 2H9 2 5.3 25 27 2H9 2 13.5 2H9 2 3 4.5 23
2.5 2.5 6 E 5 2 x M4 x 0.7 Piping port F QL 6 13.5 Prepared hole diameter 3.3 2 x M3 x 0.5 (Plug: M-3P) 170.05 6 (fitting seat surface dimension) M3 x 0.5 Vacuum suction port Stroke: S M 1 Mounting base side B D Piping port A 2 x M3 x 0.5 A 5 5.5 3.2 J 2.4 Z Section AA 3.5 depth 2 2.5 +0.030 0 7 +0.030 0 depth 2 2.5 Q QL 11-/22-MXPJ6-10 4 x M3 x 0.5 depth 3 F (mm) E F H J M Q QL S Z Model 23
Stroke Against Lateral Load D 17 24 27 29 0.7 W W W 500 82 103 116 127 0.3 Bushing (Bearing) fR U 62 79 89 97 0.5 Lateral load applied to rod end (fR) N 100 52 66 75 81 0.7 50 33 43 49 53 0.3 10 23 31 36 39 T 0.5 REC40 REC32 REC25 REC20 5 18 25 29 31 0.7 2 Rod side flange style: F Head side flange style: G 182 167 148 118 Foot style: L 0.3 1 L 140 128 114 90 0.5 0.5 W W W F REA 117 108 95
S + Stroke ZZ + Stroke With rod boot l h + l ZZ + l + Stroke Bore size (mm) Stroke range A B1 BC BN BZ C D E GA GB GC GD GK GL GQ GR I J K KA MM NA AL 20 25 32 40 26 31 38 47 4 7 7 8 4 7 7 8 5.5 9 9 11 3.5 4 4 4 54 62 62 67 19 20 21 23 12 12 11 12 85 95 95 103 12 14 18 25 14 16.5 20 26 57.5 69 69 76 91 101 102 111 38 45 45 52 13 17 17 19 24 29 36 44 18 22 22 30 M8 x 1.25 M10 x 1.25 M10 x
Theoretical Output Refer to Theoretical Output Table 1 on page 10-23-1.
Auto switches / Proper mounting position for stroke end detection Electrical entry direction: Inward Electrical entry direction: Outward B D C A (mm) D-Z73 D-Y59A,D-Y59B A B C D Bore size D 0.5 4 0.5 3 5 5 C 16.5 23 34 46 46.5 56 6 20.5 27 38 50 50.5 60 -1 2.5 -1 1.5 3.5 3.5 32 15 21.5 32.5 44.5 45 54.5 4.5 8 4.5 7 8.5 9 10 15 20 25 Note 1) The above mentioned values are indicated as a guide
C[dm3/(sbar)] C[dm3/(sbar)] 1(IN), 2(OUT) 3(EXH) b Cv b Cv 19 0.43 5.5 18 0.47 5.4 23 0.32 6.2 42 0.39 5.8 28 0.36 7.6 26 0.35 7.0 1.0 3 8 1 2 3 4 VPA3145 3 4 SYA SYJA Port size Effective area (mm2) Valve model Weight (kg) 12(INOUT) 23(OUTEXH) 1(IN), 2(OUT) 3(EXH) VZA 3 4 1 230 280 280 310 310 330 570 650 650 670 650 670 2 2 1.5 VPA3165 11 4 VFA 11 4 11 4 11 2 VFRA VPA3185 2.3 VPA4 SYJA Dimensions
Secure the lead wire of the switch so that it has sufficient slack, without any excessive force applied to it. 23 XL Series Specific Product Precautions 4 Be sure to read this before handling the products. Refer to the back cover for safety instructions.
BB 30 35 40 AA 106 133 164 B 220 280 340 C 206 264 322 D 42 51 59 E 138 168 204 F 93.5 107.5 130.5 II 16 19 23 I 76.5 91 110 Model ML2B25 ML2B32 ML2B40 MM 16 21.5 24.5 MA M5 x 0.8 M6 x 1 M8 x 1.25 NN 22 26 37.5 LC 9.5 12 12 LB 9.5 16 15 LD 5.5 6.5 8.5 MC M5 x 0.8 M6 x 1 M8 x 1.25 PA Rc 1/8 Rc 1/8 Rc 1/4 MD 9 11 14 KK 15 16 17.5 MB M6 x 1 M8 x 1.25 M10 x 1.5 ND 5.6 6.8 8.6 LL 28 30.5 37.5
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com HA AT ID AMG AFF AM Misc. 14-19-23 20 Series IDG Single Unit/Standard Dew Point 40C Specifications How to Order 03 IDG 50 L Option Flow rate by size None (Standard) With fitting for purge air discharge Flow direction (Right Left) Nil P R Outlet air
Since this will make it impossible to satisfy the specifications, operate with adjustment within the range of maximum values. 11-5-23 23 Series MSUB Dimensions These drawings indicate the condition when the B port is pressurized.
Stroke (mm) MTS Standard stroke Bore size (mm) 20 15 CC 32 20 50 30 63 30 80 40 Weight (kg) Bore size (mm) Action Weight Rod end configuration 20 0.41 Double acting 32 0.75 Lever with built-in shock absorber 50 Single acting 2.03 63 3.56 Double acting with spring 80 6.33 Applicable Auto Switch Model Model Electrical entry/Function Auto Switch Page Reed switch D-Z7l/Z80 Grommet (In-line) 5.3-23
.: 0.5 MPa Operating oil: Additive turbine oil Class 1 (ISO VG32) Oil piping length: 1 m RE A B Flow control valve Flow control valve Throttle valve Throttle valve Stop valve REC CX CCVS20/21/22/23 CCVS02 CCVS10/11/12/13 CY Piping bore Piping bore Piping bore Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) MQQ M Courtesy of Steven Engineering, Inc
BB 30 35 40 AA 106 133 164 B 220 280 340 C 206 264 322 D 42 51 59 E 138 168 204 F 93.5 107.5 130.5 II 16 19 23 I 76.5 91 110 Model ML2B25 ML2B32 ML2B40 MM 16 21.5 24.5 MA M5 x 0.8 M6 x 1 M8 x 1.25 NN 22 26 37.5 LC 9.5 12 12 LB 9.5 16 15 LD 5.5 6.5 8.5 MC M5 x 0.8 M6 x 1 M8 x 1.25 PA Rc 1/8 Rc 1/8 Rc 1/4 MD 9 11 14 KK 15 16 17.5 ND 5.6 6.8 8.6 MB M6 x 1 M8 x 1.25 M10 x 1.5 LL 28 30.5 37.5
CE1 CE2 20, 25 (Non-integrated type) ML2B +0.058 0 0.040 0.076 9 hole H10 Shaft d9 25 C J G5-S CV CI MVGQ CC +0.2 +0.1 14 10 RB S + Stroke 19 30 H Z + Stroke 9 J ZZ + Stroke D-X 20Bore size (mm) S CI Z H ZZ Data 20 24 97.5 168 40.5 177 25 30 102.5 177 44.5 186 10-5-23 23 Series MQM Accessory Bracket Dimensions Mounting nut Rod end nut d d C C B H B H Material: Carbon steel Material: Carbon
For details, refer to pages 7-9-23 and 7-9-21. 7-4-45
Q R Bore size (mm) 20 25 32 40 M8 x 1.25 depth14 80 5.5 60 3.5 93 35 4 4 25 26 M5 x 0.8 54 50 14 105 M6 x 1 M10 x 1.5 depth18 95 9 70 4 103 40 7 7 32 31 M5 x 0.8 62 125 60 M8 x 1.25 14 M10 x 1.5 depth18 95 9 70 4 104 40 7 7 32 38 Rc 1/8 Rc 1/8 62 60 13 125 M8 x 1.25 M12 x 1.75 depth 21 115 11 82.5 4 115 45 8 8 38 47 67 75 14 150 M8 x 1.25 WH W X Y U W T V Z Bore size (mm) 20 25 32 40 30 23
For more information, refer to page 9-12-23. 9-12-6 7 Series RLQ Compact Cylinder with Air Cushion and Lock Cylinder Specifications 32 40 50 63 Bore size (mm) Fluid Proof pressure Maximum operating pressure Minimum operating pressure Ambient and fluid temperature Lubrication Rod end thread tolerance Stroke length tolerance Piston speed Port size (Rc, NPT, G) Air 1.5 MPa 1.0 MPa 0.2 MPa Note