1

60 8 8 10 10 12 12 16 16 51 58 68 82 100 108 139 153 8 8 10 10 12 12 16 16 58 64 83 93 112 120 148 162 7.5 8 8.5 9 9 10 11 13.5 29 33 37 37.5 37.5 44 44 49 6 6 8 8 8 8 9 9 11 11 10.5 11.5 12.5 14 14 16.5 10, 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 -X M5 x 0.8 M5 x 0.8 2-Rc 3/8 20M6 x 1.0 GC GA GB FA FB 6H7 depth XL

Series SV

N7 One-touch fitting [PE: Pilot EXH port] Applicable tubing O.D.: 6 N7 Rc 1/4, 3/8 [4(A), 2(B) port] Rc 3/8 [1(P), 3(E) port] One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 8, N9 10, N11 12 U side D side (L4) L3 L5 30.1 4-6.2 (for mounting) (5.4) 13.3 [with Rc 1/4, 3/8] DIN rail holding screw B B B B B 81.7 75 (for DIN rail mounting) 8 68.5 9.5 164.7 148.2 A A A A A 35 98.2 5.5

Free Mount Cylinder

Applicable bore size (mm) d H1 B1 C1 M3 x 0.5 1.8 5.5 6.4 6 10 16 20 25 32 NTP-006 NTP-010 NTJ-015A NT-015A NT-02 NT-03 M4 x 0.7 2.4 7 8.1 M5 x 0.8 4 8 9.2 M6 x 1.0 5 10 11.5 M8 x 1.25 5 13 15.0 M10 x 1.25 6 17 19.6 Bore size (mm) A A' B C D F E FY FK FL GA GB H J L MM K 6 10 16 20 25 32 12.5 14 18 22 7 10 11 12 15.5 19.5 13 15 20 26 32 40 22 24 32 40 50 62 3 4 6 8 10 12 8 8 8 8 10 12 7

Air Cylinder

10 (12) M5 x 0.8 18 15.5 40 13 14 8 12 2 5.5 6 28 35 5 26 M4 x 0.7 5 25 Up to 300 301 to 1500 12 10 (12) 1/8 12.5 10 (12.5) M5 x 0.8 22 19.5 44 17 16.5 10 14 2 5.5 7 32 40 6 31 M5 x 0.8 5.5 32 Up to 300 301 to 1500 12 10 (12) 1/8 10.5 10 (10.5) 1/8 22 19.5 53 17 20 12 18 2 6.6 7 38 40 6 38 M5 x 0.8 5.5 40 Up to 300 301 to 1500 13 10 (13) 1/8 13 10 (10) 1/8 30 27 61 19 26 16 25 2 6.6 8 46

ZP

Flat with ribs F: M5 x 0.8 F: M6 x 1 F: M8 x 1.25 F: Rc Y 1 8 Model A 1.2 2.6 4.8 7 9 ZPT20 U C ZPT25 U C ZPT32 U C 1.6 0.8 20 23 1.7 14 23 6 8 6.2 23 29 29 4 28 5 8 8 12 12 25 1.8 M4 x 0.7 1 14.5 23.5 23.5 29.5 29.5 4.5 32 35 2.3 Deep 2.5 M5 x 0.8 1 8 B C D E G D E G D E G D E G F: M5 x 0.8 F: M6 x 1 F: M8 x 1.25 F: Rc Y Model A ZPT25D 25 28 20 5 29 8 6 29 8 8 35 12 6.2 35 12 10 b c d e

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

(mm) G GP H HB HG HP A HS HT HA D FB FA d EA EB B C Model CY1S6 CDY1S6 CY1S10 CDY1S10 6.5 3 17 7.6 6 32 27 8 5 4 8 26 8 19 8 4 18 12 7.5 6 5 40 34 12 10 3 6.5 10 12 33 14 25.5 PA J x K LD (N) PB PW Q S ta tb TT T QW W Z L Model CY1S6 CDY1S6 M4 x 0.7 x 6.5 40 3.5 10 25 25 50 52 16 42 10 16 46 68 CY1S10 CDY1S10 M5 x 0.8 x 9.5 45 4.3 9.5 25 38 60 60 24 47 12.5 20.5 0.5 1.0 58 80 PA

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Stations Black White 8 station (18 stations) A side coil B side coil Black White 9 station (19 stations) A side coil Note) When there are 10 or fewer manifold block assemblies, and more are added to make a total of 11 or more, a supply/exhaust block assembly must also be added.

VFS

. 3 8 10 stations 10 Base type 01T, 10: 2 to 10 stations Base type 01C, 01F: 2 to 8 stations Symbol Porting specifications (A, B) Passage Symbol R1, R2 P 1 Side 2 Bottom Common Common Caution Option When using an exhaust cleaner, mount it downwards.

SQ1000/2000

A 1 () Station 1 SOL. A Station 2 14 () SOL. A Station 3 2 () 1 SOL. A Station 4 14 15 () 2 15 SOL. A 3 3 () Station 5 16 SOL. B 4 16 () 17 5 SOL. A 4 () 18 6 Station 6 SOL. B 19 17 () 7 20 SOL. A 8 5 () Station 7 21 SOL. B 9 18 () 22 10 SOL. A 23 6 () 11 Station 8 SOL.

VFR

Porting specifications (A, B) EA, EB P Symbol 03 04 Symbol 3 8 02 2 stations 1 2 1 2 1 Side 2 Bottom 10 10 stations M Mixed Common Common For bottom ported: Rc 3/8 only.

CJ2

Material: Iron CD (cd) 3.3 5 U 8 10 R 5 8 NB 18.5 23.5 NA 12.5 12.5 MM M4 x 0.7 M5 x 0.8 CB 14 20 CA 17 20 KA 4.2 5.2 BB 12 18.3 H 28 28 BA 15 18.3 GA 8 8 A 15 15 CX 3.2 6.5 Bore size (mm) 10 16 Dimensions by Stroke Applicable bore (mm) Part no.

LEC-OM02704CN

)10 9 14 15 14 (7) ([C][6]) [C][6] [0][1][F][F] 0 8 (16)10 (8) ([C][7]) [C][7] [0][1][F][F] 020 8 (16)10 (9) ([C][8]) [C][8] [0][1][F][F] 020 8 (16)10 (10)(DWELL)([C][A]) [C][A] [0][1][F][F] (DWELL) 020 8 (16)10 (11)([C][B]) [C][B] [0][1][F][F] 03 8 (16)10 (12)([9][0]) [9][0] [0][0] EMGLSPLSN OFF ON/OFF 1EA5 4 [0][3] (DO) 1EA5 4 [1][0] EMGLSPLSN 1EA5 4 [1][3] 1EA5 4 14 16 14

CA2

B A B A B A B A B A B A B Hs Hs Hs Hs Ht Hs Ht Hs Hw Hs Hw 3.5 1.5 6.5 4.5 0 0 0.5 0 2 0 4 2 11.5 9.5 40 37 38.5 69 81 69 71.5 31.5 81.5 38 31.5 73 3.5 1.5 6.5 4.5 0 0 0.5 0 2 0 4 2 11.5 9.5 50 42 42 77 86.5 77 76.5 35.5 86.5 42 35.5 78.5 6 5 9 2.5 1.5 3 2 8 4.5 3.5 6.5 5.5 14 13 63 49 46.5 91 93.5 91 83.5 43 93.5 47 43 85.5 9.5 7.5 4.5 12.5 6 4 6.5 4.5 8 6 10 8 17.5 15.5 80 107 57.5 53.5

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

8 !1 !3 q u t y u o A !9 r e @0 !0 !2 !5 !6 !4 i A w A-A Component Parts No. Description Material Note No.

CJ2

D-C7 D-C8 D-C73C D-C80C D-H7 D-H7C D-H7W D-H7BAL D-H7F D-A7/A8 D-A79W Bore B A B A B A B A B A 2 (8.5) B 2 (0.5) A 1 (7.5) B 1 (0) A 6 0 0.5 0 0.5 3 3.5 3 3.5 3.5 4 3.5 4 7.5 8 7.5 8 0.5 1 0.5 1 10 16 2.5 3 2.5 3 1.5 2 1.5 2 ( ) in the table: In case of double rod style, series CJ2W.

KJ

25.5 33 26 32 32.5 32 34 36 37.5 37 39 41 42 43 44.5 46.5 46.5 48 50 4 9 4 9 10 8 10 19 32 11 19 32 25 25 32 58 27 35 61 15 22.5 14.5 20.5 20.5 18 20.5 24.5 26.5 22 26 28 24 27 29 33 27.5 29.5 33.5 2.3 2.5 2.3 2.8 3.6 2.3 15.5 15.5 8 10 8 10 10 16.5 16.5 9.6 1 8 1 8 10-32 UNF 5 32 10.4 16 17 1 8 3 16 1 8 11.4 16.5 18 10-32 UNF 11.11 Connection thread 1 8 K 1 4 13.2 17 10 19 1 4 14.29

V

E O U T S I D E D I A M E T E R Metric (mm) 06 6 08 8 10 10 12 12 Imperial (inch) 07 1/4 09 5/16 11 3/8 13 1/2 3 Universal T Y P E W I T H O N E T O U C H F I T T I N G S P O R T S I Z E Symbol Cylinder Side Pilot Port 01 R(PT)1/8 M5x0.8 02 R(PT)1/4 Rc(PT)1/8 03 R(PT)3/8 Rc(PT)1/8 04 R(PT)1/2 Rc(PT)1/4 F02 R(PT)1/4 G(PF)1/8 F03 R(PT)3/8 G(PF)1/8 F04 R(PT)1/2 G(PF)1/4 N01 NPT1/8 10

C85

x 1 M8 x 1.25 M10 x 1.25 b d 16 16 24 24 32 40 0 8 10 12 16 20 25 8 10 12 16 20 25 KJ4D KJ4D KJ6D KJ6D KJ8D KJ10D GKM4-8 GKM4-8 GKM6-12 GKM6-12 GKM8-16 GKM10-20 8 8 12 12 16 20 6 6 8 8 10 12 8 8 12 12 16 20 8 8 10 10 12 18 5 5 6 6 8 10 4 4 6 6 8 10 6.0 8 8 9 9 12 14 7.5 7.5 6.5 6.5 13 13 4 4 6 6 8 10 6.0 6.75 6.75 9 10.5 Floating joint: Series JA In the case of dimension without C M M U

Stability of suction position,

21.1 A B 50 8 8 8 8 50 Rc1/8 Rc1/8 Bushing M22 x 1.5 Bushing M22 x 1.5 M16 x 1.5 M16 x 1.5 21.1 A B Seal washer Seal washer D D D D 48.9 37.6 37.6 48.9 5 5 Width across flats 10 66 63 10 Width across flats 10 83 80 10 D-D D-D 28 28 24 24 12.5 12.5 Dimensions Dimensions Model A B Weight [g]/Pad material N/U/CL S F ZP3E-Y63UMJB10 88.1 148.1 424 421 445 ZP3E-Y63UMJB30 113.1 173.1 453 451 474

MY1

Non-lube Lubrication 1000 or less+1.8 0 2700 or less+1.8, 2701 to 5000+ 2.8 0 0 1001 to 3000+2.8 0 Stroke length tolerance Symbol Rc 1/4 Rc 3/8 Rc 1/8 Front/Side ports Bottom ports (centralized piping type only) M5 x 0.8 (10-32 nominal) Port size 10 5 6 8 11 4 Stroke adjusting unit specifications 16 20 25 32 40 50 63 Bore size (mm) A L L A H L A H L A H L A H L A H L A H Unit symbol With