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ZQ-OM00801-D Manifold Vacuum Pump Unit D CE/UKCA -compliant Note 3) CE/UKCA compliant products are not available for 1, 2, 3 and 4. 12 - Doc. no. ZQ-OM00801-D B KQ2S23-M5N1 KQ2S04-M5N1 KQ2S04-M5N1 KQ2S06-M5N KQ2S06-M5N KQ2L04-M5N1 KQ2L23-M5N1 KQ2L04-M5N1 CE/UKCA compliant D CE/UKCA marked Note) CE/UKCA compliant: for DC only. 13 - Doc. no. ZQ-OM00801-D Manifold 14 - Doc. no.

2-wire Connector RB Diagnostic indication (2-color indication) Grommet 3-wire (PNP) 3-wire (NPN) J IC circuit 5 V, 12 V Grommet 12 V 2-wire DConnector Relay, PLC Yes 24 V 3-wire (NPN) 5 V, 12 V Diagnostic indication (2-color indication) IC circuit 3-wire (PNP) -X Grommet 2-wire 12 V With diagnostic output (2-color indication) IC circuit 5 V, 12 V 4-wire (NPN) 20Lead wire length symbols

Pulse train signal specifications (Open collector input and differential input are common) 5 s or more 24 V 21.6 V to 26.4 V 5 V 4.75 V to 5.25 V PP3s or less 5 s or more 3s or less 16 s or more 28 - 7.4 Parallel I/O signals (Pulse Input Type) (1) Input side (Pulse input type) Function Description Common terminal for the input signal power supply.

MY CY Proper Auto Switch Mounting Position MG A B Auto switch model CX D-Y5 D-Y6 D-Y7P D-Y7PV D-Y5 D-Y6 D-Y7P D-Y7PV D-Z7 D-Z80 D-Y7W D-Y7WV D-Y7W D-Y7WV D-Z7 D-Z80 DCylinder model CYP15 24.5 93.5 -X CYP32 33 122 20Data Mounting of Auto Switch When mounting auto switches, they should be inserted into the cylinder's switch groove from the direction shown in the drawing on the right.

B A D B 2 2 2 2 D B D B A M6 x 0.75 M6 x 0.75 M8 x 0.75 M8 x 0.75 A 3 3 Lateral 3 3 With Adapter: Vacuum Inlet 0.3 0.3 0.8 0.8 Width across flat 5.5 Width across flat 5.5 1.5 2 0.3 0.3 0.8 0.8 2 2.5 1.5 2 2 2.5 Dimensions (per stroke) Dimensions (per stroke) Dimensions (per stroke) Dimensions (per stroke) Lateral D D 10 14 B 24 31 B A 7 10 A 8 11 Model Model Model Model ZP3-T015U;J3-B3 ZP3

B A D B 2 2 2 2 D B D B A M6 x 0.75 M6 x 0.75 M8 x 0.75 M8 x 0.75 A 3 3 Lateral 3 3 With Adapter: Vacuum Inlet 0.3 0.3 0.8 0.8 Width across flat 5.5 Width across flat 5.5 1.5 2 0.3 0.3 0.8 0.8 2 2.5 1.5 2 2 2.5 Dimensions (per stroke) Dimensions (per stroke) Dimensions (per stroke) Dimensions (per stroke) Lateral D D 10 14 B 24 31 B A 7 10 A 8 11 Model Model Model Model ZP3-T015U;J3-B3 ZP3

B A D B 2 2 2 2 D B D B A M6 x 0.75 M6 x 0.75 M8 x 0.75 M8 x 0.75 A 3 3 Lateral 3 3 With Adapter: Vacuum Inlet 0.3 0.3 0.8 0.8 Width across flat 5.5 Width across flat 5.5 1.5 2 0.3 0.3 0.8 0.8 2 2.5 1.5 2 2 2.5 Dimensions (per stroke) Dimensions (per stroke) Dimensions (per stroke) Dimensions (per stroke) Lateral D D 10 14 B 24 31 B A 7 10 A 8 11 Model Model Model Model ZP3-T015U;J3-B3 ZP3

(mm) Bore size D-A9, D-A9V D-M9, D-M9V D-F9W D-F9WV (mm) 10 15 25 5 10 Minimum Stroke for Auto Switch Mounting (2 pcs.)

(mm) Bore size D-A9, D-A9V D-M9, D-M9V D-F9W D-F9WV (mm) 10 15 25 5 10 Minimum Stroke for Auto Switch Mounting (2 pcs.)

MY CY Proper Auto Switch Mounting Position MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A B Auto switch model CX D-Y5 D-Y6 D-Y7P D-Y7PV D-Y5 D-Y6 D-Y7P D-Y7PV D-Z7 D-Z80 D-Y7W D-Y7WV D-Y7W D-Y7WV D-Z7 D-Z80 DCylinder model CYP15 93.5 24.5 -X CYP32 122 33 20Data

113 g() 55 g( ) 1 2Vcc0 V 3[PSE530]1826 -36No.PS-OMH0005CN-D () + +48 48 -37No.PS-OMH0005CN-D A B C D Anm.: Die Angaben knnen ohne vorherige Ankndigung und ohne dass dem Hersteller daraus eine Verpflichtung entsteht, gendert werden. 2009-2011 SMC Corporation Alle Rechte vorbehalten No.PS-OMH0005CN-D

D NPN (420 mA) E*2 PNP (15 V) *4 (2m) F*2 PNP (420 mA) + () G*2 NPN *3 W H*2 PNP *3 *2 *3 N M8 *4 ZS-33-D 2m ZS-33-F ZS-42-C PFMB7501/7102 (3.04 ) ZS-42-D PFMB7202 (3.04 ) -10No.PF-OMP0001CN-F (OUT) (IN) INOUT LCD (UP) (SET) (DOWN) LCD (OUT1)/ OUT1OUT2 ON ON/OFF (UP) (SET) ON/OFF (DOWN) -11No.PF-OMP0001CN-F F.S. () 15 V F.S.=5[V]1[V]4[V] 1F.S.4[V]10.04[V] 15 V 15 V

P V < 2 3 . 0 C # 2 S V 2 5 . 0 C M O D E 2. Target temperature (no indication on display) Setting range : 10.0 to 60.0 C Min. increment : 0.1 C Indicated content : [SV] : Target temp.(Ex. : 25.0 C) Function : Sets target temperature P V 2 3 . 0 C # 1 S V < 2 5 . 0 C M O D E 3.

Table(2) Rated Voltage-Electrical Entry-Electrical Option PAX Table(1) Connection Size and Applicable Model Insulation type Electrical entry Electrical option 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) Class B Class H G C D, T G, C T PB S L, Z S L, Z S Note ) Connection Applicable model VXP2130-02 VXP2130-03,VXP2140-03 VXP2130-04,VXP2140-04 VXP2150-06

Mounting Basic Foot Flange Double* clevis * A T-bracket is used with double clevis (D). Standard Mounting nut V V V Rod end nut V V V V Clevis pin V Single knuckle joint v v v v Double knuckle joint* v v v v Rod end cap (Flat/Round type) v v v v T-bracket v Option * A pin and retaining rings are included with double clevis and/or double knuckle joint.

Type Load voltage Wiring (Output) 3 (L) 1 (M) 0.5 (Nil) Auto switch model Band mounting DC AC Applicable load Lead wire length (m) Indicator light Electrical entry 5 (Z) M9B M9BW 5 V 12 V 24 V 2-wire Yes Grommet Solid state auto switch Relay, PLC A93 100 V Yes 12 V 24 V 2-wire Grommet Reed auto switch Note 1) Lead wire length symbols: 0.5 mNil M9BW 1 m M M9BWM 3 m L M9BWL 5 m Z M9BWZ

E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS Misc. (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8) Dimensions Note 1) The above dimensions are for ZZQ1-BSB.

wire Connector Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector Relay, PLC 24 V 3-wire (NPN) 3-wire (PNP) IC circuit Diagnostic indication (2-color indication) 5 V, 12 V Grommet 2-wire 12 V Water resistant (2-color indication) With diagnostic output (2-color indication) 5 V, 12 V IC circuit 4-wire (NPN