XL-OMY0002

R R R EPDM PLASMA No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 -XU1 1) Barrel Perfluoro Kalrez R R Greene, Tweed Technologies, Inc.

lVFl 10

HOW TO ORDER N V F 1 1 0 H s D Z O 0 1 T F T T Opo.afing Pressure -J I 0 100 psi (CrP.055) | ' H 0 r 150 psi (C\p.05) | Solenr io vAc 3 _ KYPS" 4-2mVAC E l{vF 1100-oc{17 @io.rg None F Foot Bracket --R(PT),Mekic' T NPTF (Std.) N _ N P T Ii ; o Electrical Corinsctioi G 12'Lead (Sd.) D .

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

HOW TO ORDER N V F 1 1 0 H s D Z O 0 1 T F T T Opo.afing Pressure -J I 0 100 psi (CrP.055) | ' H 0 r 150 psi (C\p.05) | Solenr io vAc 3 _ KYPS" 4-2mVAC E l{vF 1100-oc{17 @io.rg None F Foot Bracket --R(PT),Mekic' T NPTF (Std.) N _ N P T Ii ; o Electrical Corinsctioi G 12'Lead (Sd.) D .

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow Type (Metal Body) Flow rate and effective area AS220M-02 Model AS120M AS220M-01 R 1/4 Cylinder side Tubing side M5 x 0.8 10-32UNF NPT 1/8 NPT 1/4 R 1/8 Port size Rc 1/4 Rc 1/8 l/min (ANR) {Nl/min} Flow rate 38 7 12 Controlled flow Effective area mm 0.6 0.1 0.2 l/min (ANR) {Nl/min} 420 Flow rate 105 280 Free flow 6.5 1.6 4.3 Effective area mm Note) Flow rates are values measured with

IR1000/2000/3000

P-84.5 (YG)

New

Working Principle Diagram Pressure display Output signal Power supply i Control circuit Input signal q Air supply solenoid valve w Exhaust solenoid valve e Built-in regulator Built-in regulator Solenoid valve EXH EXH P u Pressure sensor t Diaphragm r Pilot chamber EXH y Air supply valve SUP OUT 3 5.0 MPa Maximum Supply Pressure Series ITVX2000 High Pressure Electro-Pneumatic Regulator Series

Title not found

P-80 (JT)

High Precision Digital Pressure Switch, Series ZSE40/ISE40

female threads) T1: NPT1/8 (with M5 female threads) Rc1/8 Reverse pressure two directions B R1/8, NPT1/8 M5 x 0.8 female threads Panel mount (ZS-22-A) Rc1/8 E M5: M5 x 0.8 (female threads) C4: With 4 One-touch fitting C6: With 6 One-touch fitting Wall mount Wall mount Panel mount + Front protective cover (ZS-24-C) M5 x 0.8 F 4, 6 One-touch fitting Optional When optional parts only are

High Power Cylinder Series RHC

Note 2) Contact P/A if a stroke greater than the maximum stroke is desired.

SY3000-OMH0002

2) P 3) (2 ) 1 0.5MP 4) 5) AB (P AB )0.25MPa (PB PA)(Cv ) 14 No.SY3000-OMH0002 () (E) () () (PE) 15 No.SY3000-OMH0002 No. 1(ISO VG 32) (R) E 16 No.SY3000-OMH0002

ø 40, ø 50, ø 63, ø 80, ø 100 Series CBA2 Standard type CA2 Standard type CA2W Standard/Non-rotating rod CA2K Standard/Non-rotating rod CA2KW Low friction CA2
Q End Lock Cylinder

9 e r t y u q !3 @9 #0 #1 #2 #3 #4 #5 #6 !4 !5 w !2 @0 @8 o !0 !1 i Manual release non-lock type: Suffix N @4 @5@6@7 Manual release lock type: Suffix L Parts List No.

VR4151/4152

0 P1(11) port u R(4) Exhaust port r !5 o !7 A(2) port P2(12) port !4 !3 w !2 !

PFxx-OMU0002

mode] In the 3 step setting mode, the set value (P or n) and hysteresis (H) can be changed.

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

Type AS1200-M3 Direct cylinder elbow type 2 Bore size JIS Symbol Direct cylinder flat elbow type 4 Symbol Bore size Applicable series Control type AS1200-M3 AS1400-M3 M3 M3 x 0.5 Meter-out Meter-in 0 1 AS120-M5 AS120-U10/32 AS220-01 AS220-02 AS320-03 AS420-04 M5 x 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 P.15-11-3 Thread type Cylinder side R Tube side Rc Symbol Metric thread (M3

Low-Speed Rotary Actuator

Find the moment of inertia I for the rotation of shaft (B). r B 2. I is converted to the rotation of the shaft (A). B 2 r I = m2 2 b a I I = A B Number of teeth = b 5. Solid sphere Position of rotational axis: Through the center of diameter r 2 2 r I = m5 -27- Kinetic energy Table shows the allowable kinetic energy of the rotary actuator.

Safety Instructions

Leakage voltage Particularly when using a resistor in parallel with a switching element and using a C-R element (surge voltage suppressor) to protect the switching element, take note that leakage current will flow through the resistor and C-R element, etc., creating a danger that the valve may not shut OFF.

,

2 Single Nil R Metal seal Double FJG Rubber seal 1 (P) 5 (R1) 3 (R2) Rated coil voltage (A) 4 (B) 2 Option 3 4 24VDC FIG 12VDC Nil None 1 (P) 5 (R1) 3 (R2) Voltage other than above (50VDC or less) Indicator light with surge voltage suppressor 9 Z A02 VS1 01 Sub-plate Thread type Size Rc Nil F T 01 02 Size 01 G Size 02 NPTF Port size Symbol A01 A02 Piping specifications Size 02 Size 01 Side-ported

SYJA700 Series

Turbine oil P-32 Nippon Mitsubishi Oil Corp. Turbine oil 32/Mitsubishi turbine 32 Cosmo Oil Co.,Ltd. Cosmo turbine 32 Japan Energy Corp. Kyodo turbine 32 Tightening torque Kygnus Oil Co. Turbine Oil 32 When installing fittings, etc., follow the procedures below. M5 M5 M5 M5 Kyushu Oil Co. Stork turbine 32 Showa Shell Sekiyu K.K. Turbine 32 1)When using SMCs fitting, etc.

Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread), Lead Wire: w/o Lead Wire, Bracket: None, Operation Manual: K (Operation Manual, Calibration Certificate)

Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A1 (Bracket A, Vertical Mounting), Operation Manual: T (w/o Operation Manual, Calibration Certificate)