Monitor unit Monitor unit Monitor unit Monitor unit 3% F.S. (15 to 35C) 5% F.S. (0 to 50C) 5% F.S. (0 to 50C) 2% F.S. (15 to 35C) 5% F.S. (0 to 50C) (15 to 35C) 0.5% F.S. (0 to 50C) 0.5% F.S. (0 to 50C) 0.5% F.S. (0 to 50C) 0.5% F.S. (0 to 50C) 5% F.S. (0 to 50C) 5% F.S. (0 to 50C) 5% F.S. (0 to 50C) Repeatability 1% F.S.
Users equipment 2 1 2 Circulating fluid outlet Oscillator CH1 2 2 Circulating fluid return port 3 5 4 5 Circulating fluid outlet Optical system CH2 5 5 Circulating fluid return port No. Description Size Recommended part no.
> I A, ' Y.POO6 I 6 5 6 3g 040 112 3,5 M3XQ,5 5 3 5 I ~POO6 6 5 6 I 3 I-g040 112 3,5 M3 x Q,5 5 3 5 1 4 -1 -11'(51.0,1 '10 $,~ ~o ! 5+ g"'" 116 5:5 M4XO,7 YPOIO , '10 6.S 10 sg04I 16 5.5I M,4 XQ,7 71' 5 a 6.3 7 I 5 a 1 6.3 YP015 I 15 7 12 ~-g.048 19 7 M5XO,a 9 I 6 10 ,7.8 10 7,a ...!:!'.015 l 15 7 12 6 -g~ 19 9 I 6 7 M5 x O.B . ~I ~--~~ K ~~ P~ ' ~k I -TFunnion Pin' . , nue ' :e In .
Enable Val165000 5 ON/OFF ON/OFF 10 4 Disable ON/OFF ON/OFF 0 11 83 1( 2Hold/Clear Via software 3PLC 4 5x1000 -48No.EX-OMS0026CN No.
Note 5) Refer to cautions on page 9 if IZN10E-11-(Female threads for piping) is used.
Bore size Standard stroke (mm) MM YY L X K W J V H GA GB TA TB U G T F S DA R C Z NN Q B ML P PW YL (mm) 12 16 20 25 18 50 13 5 16 40 58 5 7.5 5 36 29 56 8 22 6 48 29 12 14 39 7 10, 20, 30, 40, 50, 75, 100 M4 x 0.7 10 M4 x 0.7 M5 x 0.8 7 M4 x 0.7 11 22 54 15 7 18 42 64 2.5 8 5.5 38 33 62 8 25 8 52 33 13 16 43 8 10, 20, 30, 40, 50, 75, 100 M5 x 0.8 13 M5 x 0.8 M5 x 0.8 5 M5 x 0.8 11 20, 30
output 1 to 5 V (within the flow rate range) Linearity: 5% F.S. or less; allowable load resistance: 100 k or more.
When bank 2 is selected 0 Decimal no. 1 2 3 4 5 6 7 8 9 Bank 2 Bank 3 Bank 4 16 17 18 19 20 BCD 0 0001 0010 0011 0100 0101 0110 0111 1000 1001 11 12 13 14 15 Ex.) 1294.53 is expressed as follows. 0001 0010 1001 0100 0101 0011 6 7 8 9 10 Bank 1 1 2 3 4 5 RS-232C 1 2 3 4 5 6 7 8 9 10 Output terminal This is the interface standard for the serial transmission method, which is standard equipment
5 DPiston nut Rolled steel Joint seal 40 to 63 NBR #5 !6 Port joint Stainless steel Valve seal NBR 40 to 63 #6 !
Metric size Inch size 3.2 01 03 05 07 09 11 23 04 06 08 10 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Control type 4 6 8 10 0 1 Meter-out Meter-in Use 1/8" tube.
Flow Direction Symbols on Body Flow Rate and Effective Area Meter-out type Meter-in type AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F AS131F Model Symbol JIS Symbol Metric size 3.2, 4, 6 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 10, 12 Tubing O.D. 1/8", 5/32" 1/8" 3/16", 1/4" 1/4", 5/16" 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8" 3/16", 1/4" Controlled
Analog output Response time*6*7 0.25 s/0.5 s/1 s/2 s/5 s Voltage output Output voltage: 1 to 5 V Output impedance: 1 k Current output Output current: 4 to 20 mA Max. load impedance: 600 Hysteresis Variable Display method 2-screen (Main screen: 4-digit, 7-segment, 2-color, Red/Green; Sub screen: 6-digit, 11-segment, White) Display values updated 5 times per second Status LEDs Output 1, Output
eccentricity U Maximum operating tensile and compressive force N Applicable cylinder bore size Model Nominal size Pitch Center of sphere R M A B D E F G H Weight kg 20 25 32 32, 40 40 32, 40 50 50, 63 44 49.5 49.5 60 60 60 71.5 71.5 17.5 19.5 19.5 20 20 20 22 22 21 24 24 31 31 31 41 41 4.5 5 5 6 6 6 7.5 7.5 7 8 8 11 11 11 14 14 7 8 8 11 11 11 13.5 13.5 13 17 17 22 22 22 27 27 30.5 34 34
6 NC 14 21.3 32.4 NT 3.5 5.3 6.5 NE 27 35.5 56.5 NH 2 3 4 NX 5.8 8.5 10.5 NW 48.2 71.8 82.1 NV 3.4 5.5 6.6 Model MY2H16G MY2H25G MY2H40G PF 3.5 5.5 17 Z 160 210 330 X 6 7.5 9 XX 12 14 23 Y 5 5 8 VV 10.5 15.3 29 TT 12.5 19.3 35.4 U 4 5 6 UU 3 4.4 2 SS 9.7 14 21.5 R 5 5 8 RR 5.3 8.5 11 RW 40 50 53.5 QW 40 60 57 PP 5.3 8 16 Q 152 198 312 QQ 16.4 20.4 25.5 PB 40 60 70 PA 40 60 100 PC 7.2 8.2
MSUA3 MSUA3-S/SE 8 x M4 x 0.7 depth 7 C 58 36 44 B 27 30 4 x M4 x 0.7 depth 5.5 22.5 5 +0.025 0 41h9 0 0.062 3H9 A +0.052 0 21H9 Long groove depth 5 (Positioning pin hole) 22.5 29 2.5 3 3 x 3H9 depth 3 +0.025 0 2 x 4.5 through ( A , B , C ) 15.5 45 9 42h9 0 0.062 2 36 3 8 11 8 1.5 5 5 18.3 29 11 Angle adjustment bolt 2 x 4.5 through 6 2 x M5 x 0.8 Adjustment: Max. 8.2 6 B port A port 0.5
L 1 ISA-5-1 73.0 2 ISA-5-2 135.5 3 ISA-5-3 173.0 4 ISA-5-4 210.5 5 ISA-5-5 248.0 6 ISA-5-6 285.5 1.25 8 4.5 7.5 5.5 35 35 With 3 tapping screws (3 x 8) Bracket for centralized lead wire ISA-20 Lead wire with connector ZS-31-B ZS-31-C Straight 5 m Right angle 5 m Centralized lead wire ISA-19-m Stations Part no. 2 ISA-19-2 3 ISA-19-3 4 ISA-19-4 5 ISA-19-5 6 ISA-19-6 15 3-Color Display
Metric size Inch size 3.2 01 03 05 07 09 11 23 04 06 08 10 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Control type 4 6 8 10 0 1 Meter-out Meter-in Use 1/8" tube.
Max. 141 Type *5 Non-magnetizing lock specification Lock unit Holding force [N] 20 39 47 78 157 72 108 216 75 113 225 Power consumption [W] *6 5 2.9 5 5 Power supply voltage [V] 24VDC10% *1 Speed changes according to the work load.
(g) Size 1 2 3 7 Basic Type 75 105 150 250 High precision Type 80 115 165 265 * Values excluding the weight of auto switch Effective torque 0.8 7 Effective torque (Nm) 0.6 3 0.4 2 0.2 1 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 Operating pressure (MPa) 19 - Internal construction and parts MSQ1 to 7 20 11 18 12 17 23 21 2 24 7 1 15 14 13 6 14 15 24 5 10 9 16 22 8 4 3 19 24 O ring 4 23 Hexagon socket set
441 426 468.5 453.5 496 481 523.5 508.5 551 536 578.5 563.5 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 stations Station n L1 L2 1571 VPA300/500/700 Series VPA500 Series/Dimensions Type 41/Common exhaust: VV3PA5-411-03 Stations 92.5 2 x 7.2 (For mounting) 30 N.C.