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4 18 Nol a\railable with pre$ure range 1 I "-40" inplt ouFut combination not avaibble Slandard soecilication CE marked 1. 17. 18. 19 For man old mountino 2 , 3 . 1 5 CE marked DeviceNet comoatible 4, 5. 6.8. 14 CE marked 16 preset tvpe 4. 5. 7, 10 DeviceNet compatible 5, 6.8, 14 1 6 preset type 5,7.10. 16 0.1s hiqh speed response Digital input type 5. 6. 9. 11 Reverse output 12,13 CE marked

Modular Type Regulators Series AR

) Note 10) Note 10) Note 10) Note 10) Note 10) Note 6) The only difference from the standard specifications is the adjusting spring for the regulator.

AC Servo Motor Driver (Pulse input type)

LA Encoder A-phase pulse (differential line driver) PG0 9 LZ 8 5 LAR PG0 COM 10 LZR 9 3 6 LB Encoder B-phase pulse (differential line driver) LG 7 LBR (Note 11) SD Control common Plate 34 LG Control common 10m max.

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

389 4-13-10

LEC-T1_C

TB 1 TB ID 1 1 CN4 2 CRC 3 func 4 ID 5 6 7 8 ID 119 - 9 FLASH 10 FLASH 11 1 CN4 11 2 3 4 120 - Ver1.** Ver2.** TB Ver.511 1TB Ver1.** TB Ver.511 11 TBsetting Language 12 TBsetting Language12 11 SET MENU TEST MONITOR DATA ALARM JOG SETTING SET AX IS. Setting 1 MENU Recconect Start Disp Easy Item Speed 1 Disp AX IS.

SY3000/5000/7000/9000 Series (Pilot Valve:V100)

Gasket SX3000-57-4 SX5000-57-6 11 DIN rail VZ1000-11-1SY3000*-OMJ0003-A -24- Specific Product Precautions 18 Be sure to read before handing.

Air cylinder

P.11 3.

FGD-C

FGDA(1 ) FGDB(2 ) 50mm Rc Rc 9/11 FGX-OM-L007-C 5. 1 1) 50mm 2) 0.02MPa 0.02MPa 3) 2 1) 2) 6. ,0.1MPa, 11 1) 2) oC 40 3) IN OUT 4) 5) 6) 7) *2 250mm 8) 21 1) 6 1 2) 3) 2 250mm * * 4) 5) *:FGDT/F 25NmFGDC/E 15Nm 10/11 FGX-OM-L007-C 3 1) 2) 7. 1 2 1 11/11 FGX-OM-L007-C Revision history A P6. 10 1 B P5. P6.1-2. P7.

Air Combination

Safety Instructions 2-10 2. Application 11 3. Specifications 11-15 4. How to Order 16-20 5. Options 21 6. Structural Drawing and Replacement Part 21 7. Trouble Shooting 22 8. How to Replace the Products 23 9. Disassembly Drawing 24 10. Dimensions 25-29 -1- Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

30

M12 x 1.5 M12 x 1.75 M14 x 1.5 M16 x 1.5 M16 x 2 M18 x 1.5 H 5 5 6 6 6 7 7 7 8 10 10 11 B C 15 15 19.6 19.6 19.6 21.9 21.9 21.9 25.4 27.7 27.7 31.2 JC20-8-100 JC20-8-125 JC32-10-100 JC30-10-125 JC25-10-150 JC40-12-125 JC40-12-150 JC40-12-175 JC40-14-150 JC50-16-150 JC63-16-200 JC63-18-150 DA00207 DA00169 DA00141 DA00142 DA00140 DA00145 DA00146 DA00143 DA00148 DA00151 DA00150 DA00153 13 13

AW

Model Optional specifications AW10(K) AW20P-270AS AR20P-260S AW20(K) AW30(K) AR40P-270AS AR40P-260S AW40(K) AW40(K)-06 AW60(K) AW60P-270AS Note 6) Bracket assembly Note 1) AR10P-270AS AR10P-260S G27-10-R1 G27-10-R1 Note 3) AR30P-270AS AR30P-260S Note 7) Set nut G36-10-01 G36-2-01 G36-10-01-L G36-2-01-L G46-10-02 G46-2-02 G46-10-02-L G46-2-02-L Round type Note 2) Standard 0.02 to 0.2 MPa

Compact Electric Actuator Series LG1

thread depth 10 20 0.02 8H10 depth 10 Encoder signal line Motor power line 8H10 depth 8 85 130 A (Table movement range) 77.3 (77) 107 10 95 Work mounting reference plane 55 Body mounting reference plane 52.5 D 1 125 8(4)-M6 x 1 thread depth 10 3(2)-8H10 depth 10 30 95 C 100 95 8(4)-6.2 (160) () () 110 95 20 95 B (140) () () Dimensions A Stroke Model B C D Note) LG1H202100-F LG1H202200-

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

13 13 16 16 2 2 G 5 5 5.5 7.5 7.5 8 11 14 14 H 13.5 12.5 13 20 20.5 22 29 33 33 I 28 34 40 50 58 72 J 4.5 4.5 6 6 8 8 10 12 12 N 9.5 11 11 18 18.5 20 26 25 25 Q NN S 62 63 83 106 111 124 150 176 188 K 5 4 11 8 10 15 16 25 26 V A 4 4 4 8 8 8 10 T C 8 14 14 26 32 32 41 L 35 38 57 66 70 80 92 110 122 MM NA 10 14 17 24 30 36 46 55 69 Model 12-CY3B6 12-CY3B10 12-CY3B15 12-CY3B20 12-CY3B25

E-MY2B_E_A

4.90 9.80 19.60 Maximum weight of transferred object [kg] 16 6(10) 4(5) 2.5(2.5) 1.25(1.25) Nominal size 25 11(20) 8(10) 4(5) 2.5(2.5) In parentheses, the coefficient of friction indicate the case of 0.1 or less by using another guide 19 Operation Characteristics Application of power supply Power supply for drive General 3 positions 5 positions General When power supply is applied, the

Rotary Cylinder Series MRQ

Graph (2) Cylinder Output on the Retracting Side (Double acting) 1500 150 Tube bore size [mm] 1000 100 40 Side load Balance weight 400 500 40 50 32 200 250 300 20 25 30 Operating pressure [MPa] Cylinder output F[N] Load weight [kg] 150 15 Allowable Side Load on the Piston End (Nm) 100 10 Stroke of linear part Size 40 40 50 4 5 100 75 50 40 30 25 20 15 10 5 32 32 40 9 10 11 12 12 13 13 13

LJ1H

20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room

CJ2

B H B H d C C d 10 8 21 M4 X 0.7 16.2 Y-J010B SNJ-006B 16 11 21 M5 X 0.8 16.6 Y-J016B M6 X 1.0 4 8 9.2 6 NTJ-006A 2.4 M3 X 0.5 6.4 5.5 6 SNJ-010B M8 X 1.0 4 11 12.7 10 NTJ-010A 3.2 M4 X 0.7 8.1 7 10 Part No.

2/3 Port Solenoid Valve for Chemicals

N.C. 3 2 1 19 2 x 3.5 Mounting hole (16) 11 24.5 21 12 Plug IN port 5 (Lead wire length) 27 For LVM14R 36 300 16 13 UL1007 AWG22 1 2 3 N.C. N.O. (16) (16) 11 OUT port IN port 10 Push type Manual override 73.5 For LVM16R N.O. N.C. 3 2 1 25.5 (16) N.O.

Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM

N.C. 3 2 1 11 11 IN port 3 x M6 x 1,1/4-28UNF OUT port (LVM13R,14R) 6 Plug (2) 5 11 6 2 (COM) port (LVM115) Plug (LVM16R) 10 1 (N.C) port 3 (N.O) port 13 For LVM115 2 x M3 Thread length 5 The broken lines indicate the bracket type. For direct mounting 6

SI Unit for Vacuum Manifold

Product summary 10 2. Wiring 11 2.1. Fieldbus interface connector 11 2.2. Power supply connector 13 2.3. FE terminal 14 3. Configuration 15 3.1. GSD file and symbol file 15 3.2. Head modules 15 3.3. Modules 16 3.4. Sub modules 17 3.5. Configuration steps 18 4. Parameter 19 4.1. Module parameters for Vacuum / Release module 19 5. Process data 23 5.1.