Process Pump

Diaphragm B moves to the right, and at the same time diaphragm A also moves to the right Air exhaust port (AIR EXH) Switching valve Air supply port (AIR SUP) Pilot valve B Pilot valve A Discharge port (FLUID OUT) Pump chamber A Pump chamber B Check valve Shaft Suction port (FLUID IN) Diaphragm A Diaphragm B Drive chamber A Drive chamber B Control unit pushing pilot valve A. 3.

High Vacuum L Type Valve

Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No.

Smooth Cylinder Series CQSY ø 12, ø 16, ø 20, ø 25

B dimension is 77.5 mm. Example Calculation:25, B dimension 27.5 mm (without auto switch) 27.5 (B dimension) + 50 (st) = 77.5 (mm) D-X 1169

VK300

Cv C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv Grommet 0.44 0.40 0.40 0.44 0.40 0.41 0.63 0.63 0.41 0.63 0.13 0.10 0.10 0.13 0.10 0.20 0.14 0.14 0.20 0.14 VK332 0.47 0.41 0.41 0.47 0.41 0.85 0.65 0.65 0.85 0.65 0.47 0.38 0.38 0.47 0.38 0.76 0.41 0.41 0.76 0.41 0.44 0.27 0.27 0.44 0.27 0.26 0.24 0.24 0.26 0.24 0.13 0.10 0.10 0.13 0.10 0.19 0.15 0.15 0.19 0.15 0.47 0.39 0.39

High Vacuum L Type Valve

Bellows assembly (7) XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No. Bellows assembly (7) XL1A63-2-101 XL1A80-2-101 Nut assembly (9) XL1A50-10-1 XL1A80-10-1 Note 1) Bellows assembly contains the valve seal 1. It does not contain the valve seal 2.

Safety Instructions

Connecting Female Thread: G Approx. spanner tightening angle after tightened by hand deg Standard torque (Nm) Nominal size of uni thread 1 8 1 4 3 8 1 2 30 to 45 15 to 30 15 to 30 15 to 30 3 to 4 4 to 5 8 to 9 14 to 15 2. Gasket can be recycled 6 to 10 times. It can be replaced easily when it has sustained damage.

Air Suction Filter In-line Type with One-touch Fittings Series ZFC 1

IN ZFC100-04 Cover B Element Cover A 1 ZFC100-06 ZFC200-06 Replacement Parts ZFC200-08 0.1 1 10 100 Description Part no.

Wedge Cam Operation Gripper Series MHK2

Holding Force MHK2-12D MHK2-12D 25 20 Pressure 0.6MPa Pressure 0.6MPa 20 Holding force N Holding force N 15 0.5MPa 0.5MPa 15 0.4MPa 10 0.4MPa 10 0.3MPa F F 0.3MPa 5 5 0.2MPa 0.2MPa 0 0 1N = 0.2248 lbf = 0.102 kgf 1MPa = 145 psi = 10.2 kgf/cm2 10 20 30 40 10 20 30 40 50 50 Holding point L mm Holding point L mm O. D. holding MHK2 series I.

Antibacterial Filter (5μm) Antibacterial Filter (0.1μm) Odor Removal Filter Bacteria Removal Filter

How to order P.10 5. Replacement parts P.11 6. How to replace the element P.12 7. Dimensions P.16 1 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

MHK2

B 1.8 1.6 Groove position of auto switch A 10.4 12.8 Model MHK2-12 MHK2-16 A B Dimensions A and B of other models are same as standard switch grooves. Standard switch grooves 12-6-17

MHK2

10 MHW 0.3 MPa 0 0 MRHQ 10 20 30 40 50 10 20 30 40 50 60 60 Gripping point L (mm) Gripping point L (mm) Misc.

Wedge Cam Operation Provides

0.6MPa 40 40 Holding force (N) Holding force (N) 0.5MPa 0.5MPa 30 30 L L 0.4MPa 0.4MPa 20 20 0.3MPa 0.3MPa 10 10 0.2MPa 0.2MPa 0 0 10 20 30 40 50 60 10 20 30 40 50 60 Holding point L(mm) Holding point L(mm) MHK2-20D MHK2-20D 80 60 70 Pressure 0.6MPa Pressure 0.6MPa 50 60 Holding force (N) Holding force (N) 50 40 0.5MPa 0.5MPa 40 30 0.4MPa 0.4MPa 30 20 0.3MPa 0.3MPa 20 10 10 0.2MPa 0.2MPa

Low torque Metal seal type Rotary joint Series MQR

#$% 45 " ! #$%& Series MQR & ' !" # $%" # " ) " 4.1 " ( & $ ' # $ % & $ ' ! 4.1 ( # $ % ( 30h8 & * # $ % ( ) ) & ) ) * * + * + * ) + ) + ) ) 25H8 30H8 45 45 +45 +30 ) 22.5 ) * ) %" " # $ % ( $ ' $ ) ' $ $ ' $ $ ( ' , ) * * ) !" $%" # $ % $ # $ % $ ' $ $ $ ( ' , ) ' $ 45 45 )

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

19 R 3/8 40 35 AS331FG-03-10 AS331FG-N03-07 32.6 52.4 45 21 25.6 43.7 38.7 10 18.5 1/4" 13.2 63 56 17 23 20.6 16.2 12.9 NPT 3/8 AS331FG-03-12 AS331FG-N03-09 45.4 40.4 40.2 35.2 34.4 54.2 48 22 28.2 44.9 39.7 12 20.9 5/16" 15.2 65 59 18.5 23 19 AS431FG-04-10 AS331FG-N03-11 32.6 57.1 52.4 21 32.6 49.4 43.7 25.8 10 18.5 3/8" 17.9 23 104 16.2 65 21 16.2 28.6 49.2 56.7 24 49.6 R 1/2 42.1 AS431FG

Digital Flow Switch (Remote type sensor unit)

-F Dimensions (in mm) PF2D504S-111S Tubing size A Tubing size B 3 27.5 mm 3 23 mm 4 33 mm 4 39 mm -26No.PF-OMG0006-F PF2D520S-131S Tubing size A Tubing size B 4 33 mm 4 23 mm 5 39 mm 5 28 mm -27No.PF-OMG0006-F PF2D540S-191S Tubing size A Tubing size B 5 39 mm 5 39 mm 6 49.5 mm 6 49 mm -28No.PF-OMG0006-F Revision history A: Full scale revision due to the change of the format and addition of

5 Port Solenoid Valve

A side: Orange(Right) B side: Green(Left) Solenoid A Solenoid B Fixed DIN rail manifold Light/surge Voltage Suppressor Fixed "45", "45" DIN rail manifold to the setting side with screws, fix points as follows:2 to 5 stations: 2 points 6 to 10 stations : 3points 11 to 15 stations: 4 points 16 to 20 stations:5 points If fixed at lesser points than specified and use it, there could be a warp

HRX-OM-Q033

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge

HRX-OM-S010

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge

Compact Cylinder with Lock Double Acting, Single Rod Series CLQ ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 How to Order CLQ B F D 30 40 30 40 M9BW CDLQ D F B With auto switch With auto switch (Built-in magnet) Made to Order Mounting style Refer to page 817

MLU Standard Stroke MLGP Bore size (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Standard stroke (mm) ML1C 20, 25 32, 40, 50, 63, 80, 100 Manufacture of Intermediate Stroke Description Part no. Spacer is installed in the standard stroke body. Refer to How to Order for the standard model no. on page 816.

HRX-OM-M091

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge temp. 4 High circulating fluid return temp. 5 High circulating