Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

XB13 CXT Standard part number M L Microspeed cylinder Specifications Guide cylinder Slide unit Compact guide cylinder Dual rod cylinder Compact slide Platform cylinder Magnetically coupled rodless cylinder CJ2 CM2 CG1 MB CU CQ2 CQS CY1 MGP MGGM MGCM CX2 CXW CXS MXU Air cylinder/Standard type Freemounting cylinder Compact cylinder Compact cylinder Applicable cylinder M L M

48

Lead wire length symbols: 0.5 m Nil (Example) M9NW Solid state auto switches marked with a v are produced upon receipt of order. 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ For details on auto switches with pre-wired connectors, refer to the Web Catalog.

Magnetically Coupled Rodless Cylinder

Dimensions L A LA Attached from top W C PA MM Note 1) M F HB HA Note 2) Attached from bottom: MD R Body B (mm) Note 1) Note 2) B C F HA HB L LA MM MD M PA R W A Model CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 16 35 6.5 5.5 16.5 23 57 25 M4 x 0.7 M3 4 25 6 36 18 36 6.5 5.5 17 23.5 66 30 M4 x 0.7 M3 4 27 6 37 20 46 8.0 5.5 21 28.5 70 30 M5 x 0.8 M4 5 36 7 47 22.5 60 9.5 6.0 27.5 36 80 35 M6 x 1.0

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

Dimensions L A LA Attached from top W C PA MM Note 1) M F HB HA Note 2) Attached from bottom: MD R Body B (mm) Note 1) Note 2) B C F HA HB L LA MM MD M PA R W A Model CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 16 35 6.5 5.5 16.5 23 57 25 M4 x 0.7 M3 4 25 6 36 18 36 6.5 5.5 17 23.5 66 30 M4 x 0.7 M3 4 27 6 37 20 46 8.0 5.5 21 28.5 70 30 M5 x 0.8 M4 5 36 7 47 22.5 60 9.5 6.0 27.5 36 80 35 M6 x 1.0

Modular Type Filter Regulator Series AW

1500 Flow rate L/min (ANR) Flow rate L/min (ANR) AW20 Rc 1/4 AW40 Rc 1/2 0.6 0.6 0.5 0.5 Outlet pressure MPa Outlet pressure MPa 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 600 800 400 200 0 2000 0 0 1000 3000 Flow rate L/min (ANR) Flow rate L/min (ANR) Pressure Characteristics (Representative value) Conditions: Inlet pressure 0.7MPa; Outlet pressure 0.2MPa; Flow rate 20L/min (ANR) AW10 AW30 AW40-

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

: Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) a = 2000 m 1000 L1 a = 3000 0 2 4 6 8 10 Transfer load m (kg) 600 L2 400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 2000 L3 (mm) L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for

Antistatic One-touch Fittings Series KA

M5, M6 D L A M Part No.

MHC2

Lead wire length symbols: 0.5 m Nil (Example) Y59A 3 m L (Example) Y59AL 5 m Z (Example) Y59AZ Auto switches marked with a symbol are produced upon receipt of order. Note) No need to add -X61 at the end of the part number for the flexible lead wire for D-Y type auto switch, because it adopts flexible lead wire as standard.

MHC2

Lead wire length symbols: 0.5 m Nil (Example) Y59A 3 m L (Example) Y59AL 5 m Z (Example) Y59AZ Auto switches marked with a symbol are produced upon receipt of order. Note) No need to add -X61 at the end of the part number for the flexible lead wire for D-Y type auto switch, because it adopts flexible lead wire as standard.

MLGP

Lead wire length symbols: 0.5 m Nil (Example) Y69A 3 m L (Example) Y69AL 5 m Z (Example) Y69AZ Since there are applicable auto switches other than the listed above, refer to page 9-11-29.

MLGP

Bore size 20, 25/MLGPM20/25 (Slide bearing) Operating Range as Stopper for MLGPM20/25 100 25 l = 50 mm l = 50 mm Weight of transferred object: m (kg) m m 20 5 10 10 20 30 40 50 Transfer speed: (m/min) Bore size 32 to 100/MLGPM32 to 100 (Slide bearing) Operating Range as Stopper for MLGPM32 to 100 1000 Weight of transferred object: m (kg) l = 50 mm l = 50 mm 100 m m 80 63 50 40 32 100

KA

<M5, M6> Tube O.D. (mm) Soft nylon Polyurethane A <M5, M6> P D L M Part No.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Description Body class Symbol Bracket assembly LQ-GBL J, K 1, 2 J type K type 1, 2, 3, 4, 5, 6 L, M L type M type (for short piping) Table 1 Tubing size symbols Part No. Description Replacement parts Tubing O.D.

Title not found

Current output 4~20mA2.5% F.S. or less Repeatability 0.2% F.S. 2digit or less 0.2% F.S. 1digit or less response time 2.5ms or less (With anti-chattering function:20ms, 160ms and 640ms selection) Hysteresis Hysteresis mode and window comparator mode selection Port size R1/8 (with M5 female) Enclosure IP40 43 Vacuum Regulator Series IRV 60 l/min (ANR) Note) 100 l/min (ANR) Note) 150 l/min (

Plug-in Unit

: Serial transmission L Kit: Lead wire F, L, M and P kits 1 to 12 stations M Kit: Multiple connector C8 (For 8) C10 (For 10) T kit 1 to 10 stations 4150 S kit (without unit) Solenoid weight is not included.

Process Pump

min 1 to 20 L/min PA(P) Average discharge pressure 0 to 0.4 MPa 0.2 to 0.5 MPa (for 0 to 60C) Pilot air pressure PAX Air consumption 230 L/min (ANR) or less PB Dry Up to 1 m (inside the pump is dry) Suction lift Wet Up to 4 m (with fluid inside the pump) PAF PAF 80 dB (A) or less (excluding the noise from the quick exhaust and solenoid valve) 80 dB (A) or less (Option: with silencer, AN20

VQC

VVQ2000-F-L Electrical wiring specifications [-K] C3 C4 C6 M5 VVQC1000-19AD S C6 (SUP port) D-sub connector Terminal no. 6 One-touch fitting SOL.

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

approx. 300 Lead wire l approx. 300 21 27 20 27 Rectifying device AC type 20 27 Rectifying device 14 2 3.2 23.5 20 AC type 20.5 17 54 48 5 11 1 1 6 8 5 M5, 1/8 M5 1 (IN) port 1 (IN) port M5, 1/8 M5 2 (OUT) port 2 (OUT) port 15 2-M2.5 x 0.45 Thread depth 3.5 2-M3 x 0.5 Thread depth 5 VDW31 36 (27.6) Lead wire l approx. 300 SMC SMC 30 40 1 1 Rectifying device AC type 45 25 34 28 Bracket assembly

2–4

Nil (Example) A73C 3 m L A73CL 5 m Z A73CZ None.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.