CJP

B C E G H K MM NN 5 st 10 st F 15 st R 5 st 10 st S 15 st W Q 5 st 10 st Z Bore size (mm) 6 10 15 A 15 st M3 x 0.5 3.5 3 8.5 9 41.5 26.5 34.5 19.5 27.5 12.5 3 6 32.5 13.9 25.5 12 18.5 7 M10 x 1.0 9 M4 x 0.7 3.5 5 12 46 28 39 21 32.5 14.5 4 6 34 22 27 19 20.5 10 M15 x 1.5 13 12 M5 x 0.8 4.2 6 14 50 29 43.5 22.5 37.5 16.5 5 7 36 31 29.5 27 23.5 12 M22 x 1.5 20 19 6-2-16

CJP

B C E G H K MM NN 5 st 10 st F 15 st R 5 st 10 st S 15 st W Q 5 st 10 st Z Bore size (mm) 6 10 15 A 15 st M3 x 0.5 3.5 3 8.5 9 41.5 26.5 34.5 19.5 27.5 12.5 3 6 32.5 13.9 25.5 12 18.5 7 M10 x 1.0 9 M4 x 0.7 3.5 5 12 46 28 39 21 32.5 14.5 4 6 34 22 27 19 20.5 10 M15 x 1.5 13 12 M5 x 0.8 4.2 6 14 50 29 43.5 22.5 37.5 16.5 5 7 36 31 29.5 27 23.5 12 M22 x 1.5 20 19 6-2-16

Pin Cylinders Series CJP2/CJP

mm) 36 Pin Cylinder: Single Acting, Spring Return Series CJP Recommended Mounting Hole Dimensions for Embedded Type When embedded (mm) Bore size (mm) Stroke A B C D E F G 5 12 8.5 6 Air 4 3.5 M8 x 1.0 6.5 3 10 16.5 20 14 15 24.5 28 22 CJ1 G 5 12.5 16 10 6 M10 x 1.0 8.5 3 3.5 10 19.5 23 17 CJP Machining dimensions for mounting 0 0.5 15 26.5 30 24 E A 5 13.5 17 10.5 CJ2 B D O-ring seal 10 M15

Hand Valve Series VH

97(145) 97(145) VHS 8 (10) 8 (10) 125(136) 123(134) M8 x 1.25 M8 x 1.25 107.5 105.5 1 (P) 3 (R) 1 (P) 3 (R) 17 25 19 2 4-Rc 1/4, 3/8, 1/2 4-Rc 3/4 VH42-06 (Bottom ported) VH42-02 to 04 (Bottom ported) 2 (A) 2 (A) 46 54 1 (P) 3 (R) 1 (P) 3 (R) 4 (B) 4 (B) 4-Rc 3/4 4-Rc 1/4, 3/8, 1/2 5-8-11 Series VH Dimensions: Body Mounted VH600-06/10 2 (A) 4 (B) 32 1 (P) 132 152 4-11 132 300 223 M15

Hand Valve Series VH 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-11 132 300 223 M15 x 1.5 15 151 150 48 25 4-Rc 3/4, 1 3 (R) 40 5-8-12 7 Hand Valve Series VH Dimensions: Panel Mounted VH21-02 VH31-02/03 ( ): Long handle type 4 (B) 2 (A) 25 25 (32) 25 4 (B) SA 1 (P) 3 (R) 1 (P) 74 62 62 49 VA 2 (A) SA 49 4-5.5

Cylinder

t Q 10" 1511 lOr ,sst' 15" 6 7 12 13.9 6 12.5 19.5 8.5 9 3.5 26.5 M3x O.s Ml0Xl .0 9 18.5 25.5 32.5 3 27.5 34.5 41.5 3 ~ 10 lQ 19 22 6 14.5 21 M4 XO.7 I M15 X1.5 27 34 4 32.S '39 All ' 5 29.5 36 5 1 37.5 43.5 50 6 28 29 12 12 3.5 19 14 4.2 13 20.5 15 12 27 31 7 16.5 22.5 I M5 X O.8 M22 X 1.5 20 23.5 Plug Mount Type : CJPS Exhaust i:!!'L.

KF

O.D. 6 KFE06-02 KFE08U-03 KFE08N-03 KFE10U-03 KFE10N-03 KFE12U-03 KFE12N-03 4 5 6 6.5 7.5 8 9 1 4 41 49 50 63 62 93 91 37.5 17 12 17 44.2 16 15.2 3 4 5 5.5 6.5 7 8 M10 x 1 11 6 11 17 21 30 35 45 13 8 M12 x 1 3 8 17 46.2 39.5 16.2 19 14 19 3 8 M15 x 1 16 10 17 48.8 41.5 18.8 19 17 22 Connection thread Applicable tubing Mounting plate thickness 4 mm or less 18 12 3 8 17 51.3 44.5 19.3 22 19

Miniature Fittings M3, R(PT) 1/8, M5 Series M

I.D. 6 4 5 6 6.5 7.5 8 9 KFE06-02 KFE08U-03 KFE08N-03 KFE10U-03 KFE10N-03 KFE12U-03 KFE12N-03 1 4 41 49 50 63 62 93 91 37.5 17 17 44.2 16 15.2 3 4 5 5.5 6.5 7 8 M10 1 11 6 11 17 21 30 35 45 12 13 8 3 8 M12 1 46.2 39.5 17 16.2 19 19 14 3 8 10 M15 1 16 48.8 41.5 17 18.8 19 22 17 12 3 8 18 51.3 44.5 17 19.3 22 24 19 M17 1 Bulkhead union: KFE Applicable tube (mm) Effective orifice (mm 2) Mounting

30

(mm) 3.2 4 6 8 10 12 16 H (Width across flat) 12 12 17 19 21 24 30 T (M) 2 x Applicable tube Mounting hole M Weight (g) L Model KQB2E23-00 KQB2E04-00 KQB2E06-00 KQB2E08-00 KQB2E10-00 KQB2E12-00 KQB2E16-00 3.4 5.6 13.1 26.1 41.5 58.3 113 14.8 14.7 29.2 34.9 47.1 58.7 107.2 11 11 15 16 19 21 28 M10 x 1 M10 x 1 M14 x 1 M15 x 1 M18 x 1 M20 x 1 M27 x 1 32.2 32.4 35.4 38.8 40 42.4 46.8 12 12.6

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

point setting/without analog output/200 degrees setting Solid state (12 to 24 VDC) 6 For manifold, individual SUP 2 point setting/without analog output/3 rotation setting 2 point setting/without analog output /200 degrees setting Silencer 1 point setting/analog output/3 rotation setting Nil S High noise reduction type Standard type E19 1 point setting/analog output/200 degrees setting M21 M15

Stainless Steel 316 Fittings

16 Note 2) Effective area (mm2) 2 x Applicable tube H (Width across flat) 12 12 17 19 21 24 30 T (M) Mounting hole M Weight (g) L Model T H KQG2E23-00 KQG2E04-00 KQG2E06-00 KQG2E08-00 KQG2E10-00 KQG2E12-00 KQG2E16-00 3.4 5.6 13.1 26.1 41.5 58.3 113 14 14 25.8 30.4 40.3 49.9 87.3 11 11 15 16 19 21 28 32.2 32.4 33.6 36.4 37.2 39.2 42.6 12 12.6 13.6 16.1 17 18.6 20.8 M10 x 1 M10 x 1 M14 x 1 M15

Vacuum System Peripherals:

B Electrical entry 1 Symbol 2 3 4 5 6 7 8 9 10 Order of manifold (Station) G Grommet (Lead wire length 300 mm) H Grommet (Lead wire length 600 mm) 05 07 10 13 H M Common Individual J K A B P5 Q5 None E14 E15 E16 E17 E18 E19 M15 M21 Nil L C CL CN Nil L Nozzle diameter L L type plug connector LN LO With lead wire Without lead wire Without connector For AC, only L or LO is available.

LEC-OM02704CN

M10 M5 M0 E 2 H E 2 H R X F R X 0 0 0 0 0 0 0 0 0 0 0 0 0 0 1 1 RX 2 F R X 2 0 2 E 3 H 2 E 3 H RX 3 F RX 3 0 2 E4 H RX4F RX40 E5 H 3 RX5F RX50 M31 M26 M21 M16 15E H RX1F RX10 1 0 RX 7E F RX 7E 0 64 15F H RX 7F F RX 7F 0 . 1 Ready bit0 1 (1) M0(RD) M1(INP) M2(CPO) M3(ZP) M4(TLC) M5 M6(MBR) M7(PUS) M8 (MOF) M9 (COF) M10(WNG) M11(BWNG) M12(MEND) M13 (DB) M14(POT) M15 M16

AC Servo Motor Driver

SET Sum check NG Y31 M15 T201 K2 Retry ABS transfer mode OFF wait timer 20ms ABS transfer mode ABS transfer retry start T201 C2 Setting retry flag M16 SET Retry counter Retry ABS transfer mode OFF wait timer C2 D7 Retry counter ABS transfer retry control M15 RST Setting ABS transfer retry start flag M16 T2 K1 Retry waiting timer (100ms) Retry flag set T2 Resetting retry flag M16 RST Retry

VM

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-11 132 300 223 M15 x 1.5 15 151 150 48 25 4-Rc 3/4, 1 3 (R) 40 5-8-12 7 Hand Valve Series VH Dimensions: Panel Mounted VH21-02 VH31-02/03 ( ): Long handle type 4 (B) 2 (A) 25 25 (32) 25 4 (B) SA 1 (P) 3 (R) 1 (P) 74 62 62 49 VA 2 (A) SA 49 4-5.5

KJ

O.D. 6 KFE06-02 KFE08U-03 KFE08N-03 KFE10U-03 KFE10N-03 KFE12U-03 KFE12N-03 4 5 6 6.5 7.5 8 9 1 4 41 49 50 63 62 93 91 37.5 17 12 17 44.2 16 15.2 3 4 5 5.5 6.5 7 8 M10 x 1 11 6 11 17 21 30 35 45 13 8 M12 x 1 3 8 17 46.2 39.5 16.2 19 14 19 3 8 M15 x 1 16 10 17 48.8 41.5 18.8 19 17 22 Connection thread Applicable tubing Mounting plate thickness 4 mm or less 18 12 3 8 17 51.3 44.5 19.3 22 19

AC Servo Motor Driver (CC-Link Type ）

Remote input Address E0H RX0F to RX00 Station No.1 1 Station FROM command E1H RX1F to RX10 M15 M10 M5 M0 RXF to RX0 * 0 0 0 0 0 0 0 0 0 0 0 0 0 1 1 E2H RX2F to RX20 2 Station E3H RX3F to RX30 Station No.2 E4H RX4F to RX40 In position Ready 3 Station E5H RX5F to RX50 M31 M26 M21 M16 RX1F to RX10 * * * * * * * * * * * * * * 1 0 15EH RX7EF to RX7E0 64 Station 15FH RX7FF to RX7F0 driver.

AC Servo Motor Driver (CC-Link Type ）

Remote input Address E0H RX0F to RX00 Station No.1 1 Station FROM command E1H RX1F to RX10 M15 M10 M5 M0 RXF to RX0 * 0 0 0 0 0 0 0 0 0 0 0 0 0 1 1 E2H RX2F to RX20 2 Station E3H RX3F to RX30 Station No.2 E4H RX4F to RX40 In position Ready 3 Station E5H RX5F to RX50 M31 M26 M21 M16 RX1F to RX10 * * * * * * * * * * * * * * 1 0 15EH RX7EF to RX7E0 64 Station 15FH RX7FF to RX7F0 driver.

Table of Contents

point setting/without analog output/200 degrees setting Solid state (12 to 24 VDC) 6 For manifold, individual SUP 2 point setting/without analog output/3 rotation setting 2 point setting/without analog output /200 degrees setting Silencer 1 point setting/analog output/3 rotation setting Nil S High noise reduction type Standard type E19 1 point setting/analog output/200 degrees setting M21 M15

Table of Contents

O.D. 6 KFE06-02 KFE08U-03 KFE08N-03 KFE10U-03 KFE10N-03 KFE12U-03 KFE12N-03 4 5 6 6.5 7.5 8 9 1 4 41 49 50 63 62 93 91 37.5 17 12 17 44.2 16 15.2 3 4 5 5.5 6.5 7 8 M10 x 1 11 6 11 17 21 30 35 45 13 8 M12 x 1 3 8 17 46.2 39.5 16.2 19 14 19 3 8 M15 x 1 16 10 17 48.8 41.5 18.8 19 17 22 Connection thread Applicable tubing Mounting plate thickness 4 mm or less 18 12 3 8 17 51.3 44.5 19.3 22 19