7.5

0 (B) (A) 2 4 (B) (A) 2 4 4(A) 3 5 1 3 5 1 (EB) (P) (EA) (EB) (P) (EA) 2(B) i 5(EA)/3(EB) 1(P) 2 position double with back pressure check valve 2 position double 2 position double o t r e w y q !1 u !

Fieldbus system EtherNet/IP compatible SI Unit

Content (IO size at each port) IO-Link master size setting No Process data size at each communication port Port 1 Port 2 Port 3 Port 4 44 byte 70 byte 134 byte 1 2/2/2/2 byte 2 2 2 2 2 4/4/4/4 byte 4 4 4 4 Can be selected 3 8/8/8/8 byte 8 8 8 8 4 16/16/2/2 byte 16 16 2 2 Can be selected 5 32/2/2/2 byte 32 2 2 2 Can be selected 6 16/16/8/8 byte 16 16 8 8 7 16/16/16/16 byte 16 16 16 16 8 24

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Symbol NPN output (+ COM) Nil EX510-S002B Stations N PNP output ( COM) EX510-S102B PWB U side D side COM 7 0 1 1 3 2 6 15 14 10-SS5Z3-60S6BD-05U (-Q)1 set (Type 60S6B 5-station manifold part no.) 10-SZ3160-5LOZ-C6 (-Q)2 sets (Single solenoid part no.) 10-SZ3260-5LOZ-C6 (-Q)3 sets (Double solenoid part no.) The asterisk denotes the symbol for assembly.

Dual Rod Cylinder Series CXSJ/CXS

3 @2 @0 @3 @1 !7 !4 !5 !2 CXSWL6 r !5 !6 q !8 !0 !

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J thread depth K 2 x J thread depth K DIN terminal: D Conduit terminal: T S Q F 34 D Cable 6 to 12 (Q) F G1/2 D 25 Width across flats H Width across flats H T C M C R R E E (S) A 2 x P Port size A 2 x P Port size B B M 2 x J thread depth K G1/2 2 x J thread depth K (mm) Electrical entry Grommet Mounting dimension Model Orifice diameter Port size P A Q R Conduit T DIN terminal Conduit terminal

Mechanically Jointed Rodless Cylinders

2 !0 !7 q y @2 @3 !8 !3 @4 r o !1 !

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-1A 4 Coolant Valve Series SGH Construction 2-port valve (N.C.) 3-port valve (Dual pressure type) 3-port valve 7 MPa 3 MPa 3 MPa i i o i o o PE port 12 port PE port 12 port PE port 12 port u y u u y t w e t t y w w e e q q q 1 port 2 port 1 port 2 port 1 port 2 port r r r !

NCQ8

"), 150(1 1/2"), 200(2"), 250(2 1/2") P-port H-thread C-depth 4 places N-through hole Z Q J M2 bolt circle W M1 E I dia.

Series VQ Base Mounted Metal Seal/Rubber Seal

P (2) AXT100-2-F (2) AXT100-2-TB1 (4) AXT100-2-TB2 (4) SY SYJ q SX VK VZ VF U S U S U S w e r t U S VFR Note 1) S kit is composed of a flat cable housing ass'y (AXT100-2-PU20) of q SI unit and q P kit (20 pin).

KQ2

2 2 38 42 47 51 55 16 17 2.5 4 6 8 9 8 KQ2N08-10 21 18.5 2 T 10 KQ2N10-12 22 21 18.2 12 KQ2N12-16 25 22 29 Tube Cap: KQ2C Applicable tubing O.D.

Rotary Clamp Cylinders

2 @0 i o e @3 @1 !1 o t y u w q r !9 @2 @5 @4 !

Electric Rotary Table

2 2 2 Note 2) Home position (Stroke end) 90 90 L 0 E 1 R 3 1 / 0 180 L 0 E T 2 R 3 3 / a 0 0 5 , bl 1) e e ot o N p er e g at n in ra g The figures show the origin position for each actuator.

CM2

No. of auto switches mounted 2 Different sides C85 Auto switch model Same side n Different sides 1 Same side C95 D-C7 D-C80 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C 10 50 15 50 + 45 (n 2) n 2 2 15 + 45 ( ) (n = 2, 4, 6) CP95 10 60 15 60 + 45 (n 2) NCM NCA n 2 2 15 + 50 ( ) (n = 2, 4, 6) 10 65 15 65 + 50 (n 2) Dn 2 2 D-B5/B6 D-G5NTL 15 + 50 ( ) (n = 2, 4, 6) 75 10 15 -X 75 + 55

CRBU

M3: L = 6mm (mm) (mm) Size 15 20 30 Size 15 20 30 Q Q M3 M3, M4 M3, M4, M5 X 1.5 to 18 1.5 to 20 2 to 22 Y 1.5 to 19 1.5 to 10 2 to 13 M3 M3, M4 M3, M4, M5 Symbol: A3 Symbol: A4 Symbol: A5 The shaft can be further shortened by machining male threads on the long end of the shaft. (If the shaft is not to be shortened, leave the Y dimension blank.)

60

Model Valve Model Nil 2 1 2 3 VXK21ll VXK22ll VXK23ll 1 2 3 4 7 8 J Nil 2 1 2 3 VXK21ll VXK22ll VXK23ll N.C. N.O.

Base Mounted Metal Seal/Rubber Seal Series VQ

(2) EX120-SPA1 EX120-SUW1(-XP) (2) VQC EX120-SAB1(-XP) (2) SQ EX120-SUH1(-XP) (2) q EX120-SSL1(-XP) (2) EX120-SSL2(-XP) (2) VQ0 EX120-SFU1(-XP) (2) EX120-SDN1 EX120-SCS1(-XP) (2) VQ4 EX120-SCS2(-XP) (2) VQ5 EX120-SMJ1(-XP) (2) AXT100-1-P (1) U S P kit J kit F kit w AXT100-1-J 20 (1) U S U S VQZ AXT100-1-F (1) e Note 1) Top (vertical) entry connector for FU, PU and JU while side (horizontal

VK3000

VV5K3-20-06 [Option] Note) CE-compliant: For DIN terminal only VV5K3-40-06-M5 Common SUP/Common EXH How to Order Type 20: Body ported (A, B port top ported) 20 05 VV5K3 Applicable solenoid valve VK3120--M5(-Q) VK3120--01(-Q) VK332--M5(-Q) VK332--01(-Q) A port: Rc 1/8, M5 x 0.8 A, B port Rc 1/8, M5 x 0.8 VK3120 Valve stations VK332 Thread type Q CE-compliant Nil CE-compliant 01 1 station

VM

(mm) Model H Bracket mounting dimensions Q Weight (g) 1(P) R 2(A) 2(A) R 3(R)* L1 L2 L3 L4 L5 L6 M1 M2 Bracket assembly no.

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wffi " Ava abe on 2 poslion do!

Fieldbus system EtherCAT compatible SI Unit

010 V 4 05 V 080E 5 15 V 6 020 mA 7 420 mA 0 C(Celsius) 080F 1 F(Fahrenheit) 4 2 wires 0810 5 3 wires 6 4 wires 0 Direct(No Swap) 1 Swap 16bit 0811 2 Swap 32bit 3 Swap all 0 Deactivated 1 IOL_Manual 0812 2 IOL_Autostart 3 DI_C/Q 4 DO_C/Q 0 No Device check 1 Type compatible Device V1.0 0813 2 Type compatible Device V1.1 3 Type compatible Device V1.1 , Backup + Restore 4 Type compatible Device