BP1000

Code Connections 1/4 inch face seal (Female) 1/4 inch face seal (Male) 1/4 inch tube weld 3/8 inch face seal (Female) 3/8 inch face seal (Male) 3/8 inch tube weld FV4 MV4 TW4 FV6 MV6 TW6 Seat material Material Code Material Viton (Standard) PTFE Kalrez Diaphragm Code Body 316L SS secondary remelt Nozzle 316L SS Hastelloy C-22 No code TF KZ S SH Pressure gauge unit 2) Surface finish Unit psig

Low Profile

Low Profile 2/3-Port Solenoid Valve RoHS Compact Overall length Valve width Actual size Valve height 2-port 3-port 3-port valve 2-port 3-port Overall length 38 mm/54 mm Approx. 10 mm Valve width/ height 2-port 3-port 10 g/20 g Weight 2-port valve Normally closed Large flow rate 2-port/N.C. 3-port 2-port valve Universal C [dm3/(sbar)] 0.25 0.5 Flow rate [L/min (ANR)] 45*1 90*1 *1 At 0.2 MPa

SY3000/5000/7000 Series Plug-in Type

As a guide, insert bolts in 2 positions for 2-5 stations, 3 positions for 6-10 stations, 4 positions for 11-15 stations, 5 positions for 16-20 stations and 6 positions for 21-24 stations. Take the same measures for horizontal mounting if the mounting surface vibrates. 2.

PSxx-OME0003CN

JIS B 8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Note 2) For the type set to 0.2 MPa only, repeatability will be within 3 kPa. Note 3) Mass shown is for product without any options.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Note 2) For the type set to 0.2 MPa only, repeatability will be within 3 kPa. Note 3) Mass shown is for product without any options.

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

2 For single unit 1 point setting/without analog output/3 rotation setting Without valve For manifold, common SUP E15 E16 E17 E18 4 1 point setting/without analog output/200 degrees setting Solid state (12 to 24 VDC) 6 For manifold, individual SUP 2 point setting/without analog output/3 rotation setting 2 point setting/without analog output /200 degrees setting Silencer 1 point setting/analog

SY3000V-OMY0001

X 2 N.O. X 2 N.C.N.O. 1 2 2 SY7000 4 3 4 3 N.C. X 2 N.O. X 2 N.C. N.O.

ML1C

2 $9 !3 !1 %5 @6 @5 $5 #6 MLGC %2 CNG @8 !9 MNB e CNA2 $2 q %3 %4 $1 CNS #1 #0 @9 #4 $0 !5 !4 $7 $6 y %0 %1 CLS CLQ #3 #2 !8 @0 @2 @1 @7 RLQ @3 r MLU o #5 !6 $3 $4 MLGP Component Parts Component Parts Material No.

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

2 w y r !0 e 1 New PFA Body 2 New PFA Sensor 3 Super PFA Tube 4 PPS Housing A 5 PPS Housing B 6 PPS Housing C 7 POM Bushing 8 PPS Cap 9 FKM Gasket 10 FKM O-ring 11 SUS304 Thread 12 PVC Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !

PSxx-OMG0005CN

B 8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4

VFR3000-OMJ0001

1. 2. 3. 1. 2. 3. 4. 2 VFR3000-OMJ0001-A / / / / 1 1 1 1 1 1 1 1.5 .5 .5 .5 *3) *3) *3) *3) 1 1 1 1 1 1 1 1 () 3 VFR3000-OMJ0001-A VFR3000 VFR3000 VFR3000 VFR3000 Series Series Series Series 5 5 5 5 / / / / / / / / () ( ) () 1 DC 3 3 () 3 EXH (VVFS3000-R-03-12 ( ( ( ( ) ) ) ) 0.1 2 () C-R () C-R DC 3% AC 125% 3 4 VFR3000-OMJ0001-A VFR3000 VFR3000 VFR3000 VFR3000 Series Series Series

Pressure Relief 3 Port Valve with Locking Holes

) Exhaust (OUTEXH) Model IN, OUT EXH C(dm3/s-bar) b Cv C(dm3/s-bar) b Cv VHS20 1/8 1/8 4.0 0.41 1.1 3.7 0.42 1.1 1/4 5.8 0.31 1.4 3.8 0.42 1.1 6 VHS30 1/4 1/4 8.8 0.44 2.4 8.0 0.46 2.3 3/8 14.1 0.28 3.5 7.8 0.46 2.2 1/4 9.5 0.49 2.8 13.3 0.47 3.6 VHS40 3/8 17.2 0.47 4.8 13.6 0.47 3.7 3/8 1/2 26.7 0.29 6.3 13.4 0.43 3.7 -6- 4.

•

W~igh L2 L..3, ~L ~ "A1 '" , 'A2 oM II'. I '-1 'N . ,." " H1 H2 01 02 03 l1 M odel ~ T1 T2 ' ~ f . 9 4 ' 3 ~9 . 2~q .. ~ " 6 8" 41,-'1; " W }?'.." 48.7' 42.6, 10.9 46.4 2B,2 " . . '118:'7 ~7 .3 .70~ .2M ..

VHS20/30/40/50

VHS Conforming to OSHA Standard Pressure Relief 3 Port Valve with Locking Hole Specifications Model VHS20 VHS30 VHS40 VHS40-06 VHS50 IN, OUT 1/8 1/4 1/4 3/8 1/4 3/8 1/2 3/4 3/4 1 Piping port 1/8 1/2 1/2 1/4 EXH 3/8 4.17 IN OUT 0.54 0.76 1.46 2.06 2.98 4.44 6.78 0.87 1.68 Cv OUT EXH 0.60 0.87 1.75 2.08 2.12 2.12 2.85 2.93 0.76 1.57 Fluid Air Proof pressure 1.5MPa SA Operating pressure range

Microspeed Cylinder: Double Acting/Single Rod Series CQSX ø 12, ø 16, ø 20, ø 25 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Double clevis type Bore size (mm) Foot type Note 1) Flange type 3-wire (NPN) F9N F9NV IC circuit 5V 12V Relay PLC 12 16 20 25 CQS-D012 CQS-L012 CQS-F012 3-wire (PNP) F9P F9PV CQS-D016 CQS-L016 CQS-F016 CQS-D020 CQS-L020 CQS-F020 F9B F9BV 2-wire 12V Yes 24V Grommet CQS-D025 CQS-L025 CQS-F025 3-wire (NPN) F9NW F9NWV Note 1) When ordering foot brackets, order 2 pieces per cylinder.

AMR3000 to 6000

N Bracket dimensions With auto-drain Model Port size A B C D E F G H J K L M U (Body) V (Adapter) L 178 211 277 321 B 260 298 366 436 T 9 9 11 11 S 8 16 21 26 R 78 97 98 115 P 50 35 45 46.5 1/4, 3/8 1/4, 3/8, 1/2 1/2, 3/4 3/4, 1 1/4, 3/8 1/4, 3/8, 1/2 1/2, 3/4 3/4, 1 AMR3000 AMR4000 AMR5000 AMR6000 100 120 130 160 180 210 246 290 264 302 370 440 10 10 45 70 101 121 131 161 51 61 66 81 28

SY3000-OMH0002

industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -(1 :) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4.2 2 No.SY3000-OMH0002 / / / / 1 1 3) 3) 1 1 () 3 No.SY3000-OMH0002 SY Series 3 3 3 3 5 5 5 5 / / / / 1 DC VQ (DC ) N.O.( ) 3 () 0.1 2 C-R ( ) C-R ( ) 3 3 EXH ( ) ( ) 3 DC 3% AC 20% (SSR )AC 1) (C-R ) OFF 2)() 4 No.SY3000-OMH0002 SY Series 3 3 3 3 5 5 5 5 /

Heatless Air Dryer ID Series

(C) (Atm.temp.) 0.5 MPa SOL.2 AMF 0.7 MPa Fixed filter ZFC Silencer EXH.

Return Filter FH100 Series

Blanking cap (65) A 2 x Rc (d) (34) C D C C IN OUT IN IN OUT OUT E (Element removal dimension) Differential pressure indicator Differential pressure indication switch B DRAIN (mm) d A B C D E F Weight (kg) Model FH100-06 FH100-08 FH100-10 FH100-12 FH100-16 FH100-20 FH100-24 3/4 102 90 35 200 290 2.5 1 104 1 1/4 110 100 45 265 380 4.3 1 1/2 144 150 128 52 299 430 6.8 2 2 1/2 175 200 157 70