Space Saving Vacuum Ejector Vacuum Pump System

Edition D UKCA marking added 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved 43 -

Digital Flow Switch

[August 2018] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2015-2018 SMC Corporation All Rights Reserved No.PF-OMS0002-B

Electric Actuator / Slider type 《 Battery-less absolute encoder type (Step motor 24VDC) 》

Actuator mounting A Model Bolt size Maximum tightening torque [Nm] Amm) mm LEKFS16 M3 0.63 3.5 23.5 LEKFS25 M4 1.5 4.5 24 LEKFS32 M5 3.0 5.5 30 LEKFS40 M6 5.2 6.6 31 4. When mounting the actuator, leave a gap of 40mm or more to allow for bending of the actuator cable. 20 - 3.4 Precaution on maintenance Warning 1.

POWER CLAMP CYLINDER

Use M12-4 pin socket (female) A cord. 28 - Refer to page 15 and 16 for procedures for changing the stopper bolt and switch positions and for top cover replacement instructions. 29 - 30 - 31 - 32 - 33 - Troubleshooting Trouble Possible cause Countermeasures Operation has lost smoothness. 1. Insufficient pressure. Supply appropriate pressure. 1. Insufficient air pressure..

Multistage Ejector

ZL-OM00801 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com This manual is subject to change without prior notice. 2010 SMC Corporation All Rights Reserved 31 -

Air cylinder

Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2012 SMC Corporation All Rights Reserved

LA-OMP0023

-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2012-2013 SMC Corporation All Rights Reserved 31 -

MONOSASHI-KUN

Position detection in 0.1 mm resolution is possible by inputting this signal to CEU5. 2-1 System Configuration Yellow Blue Brown White Black Red Extension cable CE1-R Scale cylinder CE1 Multi counter CEU5 OUT1 to OUT5 RS-232C OUT1 to OUT20 (Bank switching) Binary output (31 point) 2-2 How to Order 2-2-1 MONOSASHI-KUN Base part number Auto-switch additional mark Auto-switch type Mounting

IZ-OMK0015

-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2008 SMC Corporation All Rights Reserved 31

Air cylinder

Modify the mounting. 31 4. Made to order product (XC85). Made to order product below uses special grease. (If mixed with other grease, optimum performance cannot be achieved.) 4-1. Food Machinery Grease Specification Standard models -XC85 Grease pack part number: GR-H-010(10g) Nonfood compound incidental contact.

Programless controller Step motor (servo 24 VDC)

(g) 31 No. JXC-OMU0029-A 4) Move the electric actuator to required position with external force. Lock in the position by pressing the set button (g). (g) (f) (g) At this point, the position is not stored. If the power supply is cut, it is necessary to started from procedure (1) Supply of power.

Clamp Cylinder

Cushion ring 26 Revision history 1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 4-145362 URL http://www.smcworld.com without Note: Specifications are subject to change 2012 SMC Corporation All Righ prior notice and any obligation on the part of the manufacturer. ts Reserved

Air cylinder

Modify mounting conditions. 31 5. Basic Circuit for Cylinder Operation The basic circuit for operating the product with air filter, regulator, solenoid valve and speed controller (meter-out) is shown in the following figure. Air Cylinder Speed controller Solenoid valve Regulator Air source Air filter Fig. 15 Basic Circuit 32 5. Construction A In the case of 125 Fig 16.

Solenoid Valve

Appropriate tightening torque 0.8 to 1.0Nm 63 No.SQ1000V-OMQ0002-B Revision Specific Product Precautions Manifold Options 2020.7 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2020 SMC Corporation

XLG Series

: SUS304) Valve seal (maintenance part) Body(material: A6063) C D C E E (KF Flange) Fn J H B G A Unit: mm A Model A B C D E Fn G H J XLG-16 40 110 38 1 30 17 40 26 XLG-25 50 120 48 1 12 40 26 39 27.5 XLG-40 65 171 66 2 11 55 41 63 36 10 XL*-OMI0010-E 4-2Size 50,63,80,100,160 C E D C E E (KF Flange) (K Flange) Fn Fd J K H B A G A Unit: mm Model A B C D E Fn Fd G H J K XLG-50-1 70 183 80 31

High Vacuum L Type Valve

Construction / Operation Retainer 1 Coil assembly (maintenance service part) Control power supply 2 Core assembly (maintenance service part) Armature assembly (maintenance service part) Cover 6 4 5 Core O-ring external seal (maintenance service part) 31 Bonnet O-ring external seal (maintenance service part) 32 7 Spring 8 Bellows 9 Valve Body 1 0 Armature assembly includes (7), (8), and (9

SL5200

25.4) 0.21 30 5 0.17 25 0.14 20 A Connections (mm) inch FV4 MV4 TW4 FV6 MV6 TW6 0.10 15 (70.6) 2.78 0.07 10 2.12 (53.8) 0.03 5 3.86 (98.0) 0.00 0 0 5 10 15 20 25 30 35 40 45 50 Flow rate (slpm, N2) 2.65 (67.3) SL5201A High flow option Inlet pressure: 2 psig (14 kPa) Standard 760 0 700 -8 Delivery pressure (Hg abs) 600 -21 Delivery pressure (kPa) 500 -35 400 -48 300 -61 200 -75 100 -88 -101

Compact Guide Cylinder JMGP Series ø 12, ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Theoretical Output Auto switch proper mounting position (detection at stroke end) and mounting height Minimum stroke for auto switch mounting Operating range Auto switch mounting OUT IN [N] Bore size [mm] Rod size [mm] Operating direction Piston area [mm2] Operating pressure [MPa] 0.2 0.3 0.4 0.5 0.6 0.7 12 (10 x 2) 6 OUT 157 31 47 63 79 94 110 IN 101 20 30 40 50 60 70 16 (12 x 2) 6 OUT

CU 6 6 Built-in magnet Bore size 6 10 16 20 25 32 6 mm 10 mm 16 mm 20 mm 25 mm 32 mm Port thread type Symbol Nil TN TF Type M5 x 0.8 Rc 1/8 NPT 1/8 G 1/8 Bore size ø6, ø10, ø16, ø20, ø25 ø32 ø32 ø32 30 Standard stroke (mm) ø6, ø10, ø16 ø20, ø25, ø32 5, 1

(g) Cylinder stroke (mm) Model 5 10 15 20 25 30 40 50 22 (27) 25 (35) 28 (38) 31 (41) 34 (44) 37 (47) C(D)U6-D When mounting Series CU, refer to the below table. Tightening Torque/ 36 (41) 40 (50) 44 (54) 48 (58) 52 (62) 56 (66) Bore size (mm) Hexagon socket head cap screw dia.

ZP

white marks) NBR (50), Silicon rubber (40), Urenthane rubber/Fluoro rubber (60) Conductive NBR (50), Conductive silicon rubber (50) Durometer Weight/Male Thread (Female thread) (g) Pad form Flat Flat with ribs Deep Bellows Connection M5 M6 M8 M5 M6 M8 M5 M6 M8 M5 M6 M8 Model ZPY02 to 08 2004 3507 4010 10 to 16 (Thin section series) 15 (11) except 2, 4 15 (11) except 2, 4 15 (11) 15 33 (26) 31