The VFM offers an internal or external pilot body option and a variety of actuator choices.Fluid: air, inert gas, Operating pressure range: 22 to 131 PSIG, Effective area (Cv): 18mm 2 (1.0), Maximum frequency (mechanical operation style): 300 c.p.m. or less, Weight (Basic): 9.2 oz., VALVE, SOL, VALVE, VM (VFM/VZM) MECHANICAL VALVE, FA, VM BODY PT 1/4, .57200 lb

The VFM offers an internal or external pilot body option and a variety of actuator choices.Fluid: air, inert gas, Operating pressure range: 22 to 131 PSIG, Effective area (Cv): 18mm 2 (1.0), Maximum frequency (mechanical operation style): 300 c.p.m. or less, Weight (Basic): 9.2 oz., VALVE, SOL, VALVE, VM (VFM/VZM) MECHANICAL VALVE, FA, VM BODY PT 1/4, 0.594 lb

The VFM offers an internal or external pilot body option and a variety of actuator choices.Fluid: air, inert gas, Operating pressure range: 22 to 131 PSIG, Effective area (Cv): 18mm 2 (1.0), Maximum frequency (mechanical operation style): 300 c.p.m. or less, Weight (Basic): 9.2 oz., VALVE, MECH, NPT, VALVE, VM (VFM/VZM) MECHANICAL VALVE, FA, VM BODY PT 1/4, .83775 lb

The VFM offers an internal or external pilot body option and a variety of actuator choices.Fluid: air, inert gas, Operating pressure range: 22 to 131 PSIG, Effective area (Cv): 18mm 2 (1.0), Maximum frequency (mechanical operation style): 300 c.p.m. or less, Weight (Basic): 9.2 oz., VALVE, SOL, VALVE, VM (VFM/VZM) MECHANICAL VALVE, FA, VM BODY PT 1/4, .79200 lb

The VFM offers an internal or external pilot body option and a variety of actuator choices.Fluid: air, inert gas, Operating pressure range: 22 to 131 PSIG, Effective area (Cv): 18mm 2 (1.0), Maximum frequency (mechanical operation style): 300 c.p.m. or less, Weight (Basic): 9.2 oz., VALVE, MECH, NPT, VALVE, VM (VFM/VZM) MECHANICAL VALVE, FA, VM BODY PT 1/4, .68200 lb

The VFM offers an internal or external pilot body option and a variety of actuator choices.Fluid: air, inert gas, Operating pressure range: 22 to 131 PSIG, Effective area (Cv): 18mm 2 (1.0), Maximum frequency (mechanical operation style): 300 c.p.m. or less, Weight (Basic): 9.2 oz., VALVE, MECH, NPT, VALVE, VM (VFM/VZM) MECHANICAL VALVE, FA, VM BODY PT 1/4, .68640 lb

The VFM offers an internal or external pilot body option and a variety of actuator choices.Fluid: air, inert gas, Operating pressure range: 22 to 131 PSIG, Effective area (Cv): 18mm 2 (1.0), Maximum frequency (mechanical operation style): 300 c.p.m. or less, Weight (Basic): 9.2 oz., VALVE, MECH, NPT, VALVE, VM (VFM/VZM) MECHANICAL VALVE, FA, VM BODY PT 1/4, .68200 lb

The VFM offers an internal or external pilot body option and a variety of actuator choices.Fluid: air, inert gas, Operating pressure range: 22 to 131 PSIG, Effective area (Cv): 18mm 2 (1.0), Maximum frequency (mechanical operation style): 300 c.p.m. or less, Weight (Basic): 9.2 oz., VALVE, MECH, NPT, VALVE, VM (VFM/VZM) MECHANICAL VALVE, FA, VM BODY PT 1/4, .68200 lb

The VFM offers an internal or external pilot body option and a variety of actuator choices.Fluid: air, inert gas, Operating pressure range: 22 to 131 PSIG, Effective area (Cv): 18mm 2 (1.0), Maximum frequency (mechanical operation style): 300 c.p.m. or less, Weight (Basic): 9.2 oz., VALVE, MECH, NPT, VALVE, VM (VFM/VZM) MECHANICAL VALVE, FA, VM BODY PT 1/4, .63800 lb

AMR3000 to 6000

N Bracket dimensions With auto-drain Model Port size A B C D E F G H J K L M U (Body) V (Adapter) L 178 211 277 321 B 260 298 366 436 T 9 9 11 11 S 8 16 21 26 R 78 97 98 115 P 50 35 45 46.5 1/4, 3/8 1/4, 3/8, 1/2 1/2, 3/4 3/4, 1 1/4, 3/8 1/4, 3/8, 1/2 1/2, 3/4 3/4, 1 AMR3000 AMR4000 AMR5000 AMR6000 100 120 130 160 180 210 246 290 264 302 370 440 10 10 45 70 101 121 131 161 51 61 66 81 28

ARM10/11

www.stevenengineering.com IN (Common IN, with plug) (Pitch) IN (Individual IN) IN (Common IN) Symbol Model Dimensions A 4.5 4.5 B 25 34.5 C 34 43 D 21 28 E 18 27 F 56 70 G 16 20 H 9 11.5 J 18 24 K 19 28 M 52 66 P 9 11.5 Q 11.5 16.5 R 4.8 4.8 ARM1000 ARM2000 Dimensions by the Number of Stations Manifold stations (n) Model Symbol 1 36 27 48 39 2 55 46 76 67 3 74 65 104 95 4 93 84 132 123 5 112 103 160 151 6 131

ISG

Bellows assembly for ISG 110-030 16-9-6 3 General Purpose Pressure Switch Series ISG Dimensions Open type ISG110 to 191-030 (Without hysteresis scale plate) ISG110 to 131-031 (With hysteresis scale plate) Hysteresis adjusting bolt Setting pressure adjusting bolt Hysteresis adjusting bolt ZSE ISE Setting pressure adjusting bolt PSE Z I SE3 75 18 8.5 110 54 173 8.5 93 110 54 173 PS Z I SE1

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Insert bushing Tubing 17-5-131

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Class2 Class3 Class4 Class5 LVD20 LVD30 LVC40 LVD40 LVD50 LVC30 LVC20 LVC50 A 54.5 79.5 82 105.5 54.5 79 96 129 Integral tubing (construction) B 67 83 93 114 79 106 131 154 17-5-43 3 Integral Fitting Type (Hyper Fittings) Series LVD How to Order VC LVD 1 0 03 S VDW Body class Option VQ Symbol 1 2 3 4 5 Nil 1 2 3 Orifice dia. 2 4 8 10 16 Body class 1 2 3 4 5 None With flow rate adjustment

VQ

7 4-PT1/8 VS P, E port 7 16 P E P E 29 14 7 32 40.1 49.8 300 Round head screw M1.7 X 14 2-3.5 Mounting hole Manual override 15.5 P=10 300 n 5 4 3 2 1 U side D side 46.5 35.2 19.4 15.5 A A 9.5 16.7 P=10 n-M5 A port Dimensions Equation: L1=10n+21 L2=10n+7 n: Station (Max. 20 stations) n L L1 L2 1 31 17 2 41 27 3 51 37 4 61 47 5 71 57 6 81 67 7 91 77 8 101 87 9 111 97 10 121 107 11 131

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Matching of the ejector to the vacuum circuit For precautions associated with matching of the ejector to the vacuum circuit, refer to the technical data on page 13-1-10 to 131-19. Component Parts ZCU No. Description q w e Note Material Aluminum die-casted Zinc die-casted Zinc die-casted Body Valve cover Adapter plate AMJ Misc.

ZPT/ZPX

Outside Local Area: (800) 258-9200-www.stevenengineering.com B D Dimensions (mm) Dimensions (mm) Model B A C D E F G Y H A B C D E F G H Y Model ZPT40HBJ25-B01-A18 ZPT63HBJ25-B01-A18 83 138.5 72 127.5 50-B01-A18 50-B01-A18 63 65.1 45.5 67.6 31.5 21.5 118 173.5 43 40 41.4 28.4 43.2 20.5 32 107 162.5 13 75-B01-A18 75-B01-A18 154 209 143 198.5 ZPT50HBJ25-B01-A18 ZPT80HBJ25-B01-A18 88.5 144 75.5 131

asilltr

t 0s6 (%6') lele 2% 075 (%\ l ela 2/a 106 (1I6',1 131 216 -, Bore Stroke t 150 \1y2\ 13/4 2% 20o (2\ 11%6 2%a 106 (1'16') lia l=0.52 150 {1%") 114 l=0.5 250l2%\ 23la 3146 300 (3) 2% 3% 400 (4'l 2sla 3?/16 NOTE 1) Female threacl length ("1") is shoner for iie above listed strokes.

Direct Solenoid

oN Opd.tion: 360 it60 131) 130 360 360 130 150 150 r5n 150 1 1 0 150 150 i $'q (46.C) (4.5) 0,177 t'r.5) (10) 0.39,1 ool (5) (5) .) 0346 19.81 0.543 03.31 03.q M6di4 air {lub.i*td d 0ll.16}, .nd non.flflm.blo mn.torlci non{orcs!.

Vacuum

._. 130 Large Diameter/Heavy-duty Type.,. 131 Uacuum Pads IP $erie Female Thread Butfer Body I firsd Y t l . ' : Barbed Fitting Butfer Body !