PFxx-OMX0002

A to B C to D 3,000 L 30 to 3000 30 to 3150 40 to 4000 40 to 4200 L/min 6,000 L 60 to 6000 60 to 6300 40 to 4000 40 to 4200 12,000 L 120 to 12000 120 to 12600 40 to 4000 40 to 4200 PF3A7#H 3,000 L 1.1 to 105.9 1.1 to 111.2 40 to 4000 40 to 4200 cfm 6,000 L 2.2 to 211.9 2.2 to 222.4 40 to 4000 40 to 4200 12,000 L 4.0 to 424.0 4.0 to 445.0 40 to 4000 40 to 4200 : The flow ranges and relationship

HRX-OM-M005

5 to 40 Circulating fluid flow setting range*4 L/min 10 to 40 10 to 40 Circulating fluid discharge pressure display range MPa 0 to 1.5 0 to 1.5 -30 to 40C: Galden HT135*5 FluorinertTM FC-3283*5 20 to 90C: Galden HT200*5 FluorinertTM FC-40*5 Circulating fluid (No intrusion of foreign body) Refrigerant R404A (HFC) R404A (HFC) Quantity of refrigerant kg 2.9 0.72 (At 20L/min) 0.72 (At 20L/min

ZP

(mm) 02 04 2 4 Nil -X19 With lock ring Without lock ring (10 or larger) 1 2 10 to 16 20 to 32 ZX 06 6 3 40, 50 ZR 08 8 Material 10 10 ZM N S NBR Silicon rubber 13 13 16 16 Pad type U Urethane rubber 20 20 ZH F Fluoro rubber 25 25 U C Flat Flat with ribs GN Conductive NBR (2 to 16) 32 32 ZU GS Conductive silicon rubber (2 to 16) 40 40 D Deep 20 or large are manufactured upon receipt of order

Precision Cylinder Series MTS

Precision Cylinder Series MTS 8, 12, 16, 20, 25, 32, 40 Size 8 newly introduced to Series MTS!

Process Valve Series VNA

28 40 33 50 33 50 0.7 0.5 1 2 3 4 1.0 0.8 1.4 1.2 1 1 4 1 2.4 2.2 5.2 5.0 32 1 2 1 3.8 3.6 JIS Symbol 7.0 6.8 40 Valve type Operation N.C.

Ionizer

Model with 40 mm-pitch emitter cartridges Position Detection Switch Flow Sensor Pressure Control Pressure Sensor Part no.

EX120/121/122

to 85C Connector Ambient temperature 20 to 75C Operating Cable 40 to 80C Fixed Protection class IP67 (Only with screw tightened) 200 Allowable repeated insertion/withdrawal Cable retaining force 150 N/15 sec.

ACG

Series ACG How to Order ACG 30 A 03 G1 Option Symbol Description Applicable model Body size Nil 1 2 3 6 8 C J N R ACG20 to 40 Port size Symbol (8) 0.02 to 0.2 MPa setting ACG20 to 40 20 30 40 1/8 Metal bowl ACG20 to 40 3/8 Lubricator with drain cock ACG20 to 40 1/2 Nylon bowl ACG30, 40 Metal bowl with level gauge ACG20 With bowl guard Model combination ACG20 to 40 (9) Filter case with drain

Filter Regulator AW30, 40

Filter Regulator AW30, 40 Related Equipment How to Order Integration of a filter and regulator allows simple wiring. 03 BE 30 1N AW F Optional specifications Filter regulator Applicable models AW30, 40 AW30, 40 AW30, 40 AW30, 40 AW30, 40 AW30, 40 AW30, 40 AW30, 40 AW30, 40 Symbol 1 2 6 8 J N R W Z Contents 0.02 to 0.2MPa setting Metal bowl Nylon bowl Metal bowl with level gauge Drain guide

PFxx-OMY0005

Min. to Max. 1,000 L/min 10 to 1000 10 to 1050 Flow rate 2,000 L/min 20 to 2000 20 to 2100 Temperature 50 oC 0 to 50.0 -10.0 to 60.0 Pressure 1 MPa 0 to 1.000 -0.050 to 1.050 Accumulated flow 9,999,999,990 L 0 to 9,999,999,990 0 to 9,999,999,990 PD value Measured object Range Rated range Display/settable range A to B C to D 1,000 L/min 40 to 4000 40 to 4200 Flow rate 2,000 L/min 40 to 4000

ZQ-OM01401

-40 10 -20 -20 5 0 0 0 0.2 0.3 0.4 0.5 0 1 2 3 4 5 6 [MPa] [L/min (AMR) ] ZQ07A 0.43MPa -100 40 -100 35 -80 [L/min (AMR) ] -80 [L/min (AMR) ] 30 [kPa] [kPa] -60 25 -60 20 -40 -40 15 10 -20 -20 5 0 0 0 0 2 4 6 8 10 12 0.2 0.3 0.4 0.5 [MPa] [L/min (AMR) ] ZQ10A 0.43MPa -100 70 -100 60 -80 [L/min (AMR) ] -80 [L/min (AMR) ] [kPa] [kPa] 50 -60 -60 40 -40 30 -40 20 -20 -20 10 0 0 0

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

Flow Characteristics (Conditions: Inlet pressure 0.7 MPa 2 position solenoid valve mounting) SJ3000 P port regulation (PA, B) SJ2000 P port regulation (PA, B) 0.8 0.8 0.7 0.7 0.6 0.6 Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 20 40 60 80 100 120 140 160 0 20 40 60 80 100 120 140 160 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Pneumatic circuit

Moisture Control Tube

(mm) l : Tube piping length (mm) Vt = d2l 4 20 1 30 0.5 40 0.25 Tube length means the length from the switch valve (e.g. solenoid valve) to the actuator.

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

20 10 0 100 Suction flow [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] 80 60 Suction flow 40 20 Air consumption 0 0 10 20 30 40 Supply pressure [MPa] Suction flow [L/min(ANR)] ZHP-10 ZHP-10 (Supply pressure: 0.35 MPa) 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30 20 10 0 100 Suction flow [L/min(

LG1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation 02 03 04 05 05 5m Cable length 2m 3m 4m 5m Applicable cables Model Manufacturer part no.

ZQ-OM01301

-40 10 Suction flow rate -20 -20 5 0 0 0 0.2 0.3 0.4 0.5 0 1 2 3 4 5 6 Supply pressure[MPa] Suction flow rate [L/min (AMR) ] ZQ07A Exhaust Characteristics Flow Rate Characteristics Supply pressure0.43MPa -100 40 -100 35 Air consumption [L/min (AMR) ] -80 Vacuum pressure [kPa] -80 Suction flow rate [L/min (AMR) ] Vacuum pressure [kPa] Vacuum pressure 30 -60 25 -60 Air consumption 20 -40 -

Rotary Clamp Cylinder: Standard ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63 Series MK

MK-A012 MK-A016 Bore size (mm) 12 16 20 25 32 40 50 63 12 70 87 16 100 123 20 250 290 25 280 320 32 500 525 40 595 640 50 1100 1350 63 1520 1805 Clamp bolt, Hexagon socket head cap screw, Hexagon nut, Spring washer MK-A020 MK-A032 Additional Weight MK-A050 Unit: g 63 17 46 25 350 531 50 7 46 13 350 345 32 7 21 5 200 166 40 6 21 7 200 198 25 7 10 3 100 153 12 13 16 32 20 6 10 2 100

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Example) ARP30K-03BE-1RY Symbol 20 30 40 Body size Description Nil K Without backflow function With backflow function With backflow function + Nil N F Rc NPT G Thread type + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) a Without mounting option With bracket With set nut (For panel mount) Mounting H + Note 1) Nil E G E1 Note 3) Without pressure gauge Square embedded type pressure

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Example) ARP30K-03BE-1RY Symbol 20 30 40 Body size Description Nil K Without backflow function With backflow function With backflow function + Nil N F Rc NPT G Thread type + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) a Without mounting option With bracket With set nut (For panel mount) Mounting H + Note 1) Nil E G E1 Note 3) Without pressure gauge Square embedded type pressure

PF2D

l/min Note 1) Output for the display units of PF2D 300/301 04 20 40 PF2D504 PF2D520 PF2D540 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Specifications for Sensor Unit PF2D504 PF2D520 PF2D540 Model Measured fluid Liquid not to corrode nor erode deionized water