Vacuum Unit Ejector / Vacuum Pump System Refer to Fig.1) 3) Remove the junction box B (top) for all stations using a precision screwdriver. (Refer to Fig.2) (Remove the junction box B from D side.) 4) Remove all connectors mounted to the junction box B.
(Same surface) Hs 22 B A D-A93 24.5 10.5 16.5 50 50 50 D-M9B D-M9BW D-B54 50 50 75 Auto Switch Mounting Position and Its Height Unit: mm 8.5 Auto switch set value and its height 63 7.5 30.5 47 11.5 34.5 47 2 25 50.5 Auto switch Symbol 40 11 23.5 34.5 15 27.5 34.5 5.5 18 38 50 7.5 30.5 40 11.5 34.5 40 2 25 43.5 A B Hs A B Hs A B Hs D-B54 D-A93 Hs B A 33 D-M9B D-M9BW D-B54 12 Note 1) The
0 C +0.5 0 4-Rc 1/4, 3/8 4 (B) B 0.1 Max. panel thickness D (mm) A 3.2 3.2 3.2 Model B 40 51 64 C 35 41 51 D 3.5 6 8 VH200 VH300 VH400 3.6-12 Series VH Panel Mounted/Dimensions VH41l-02 to 04 VH41l-06 2 (A) 4 (B) 4 (B) 2 (A) 25 25 3 (R) 1 (P) 3 (R) 1 (P) 107.5 19 l102 102 89 88 4-6.6 4-6.6 88 81 94 148 144 97 97 67 1.5 65 1.5 125 123 105.5 3 (R) 3 (R) 1 (P) 1 (P) 25 17 2 4-Rc1/4, 3/
01 B 06 B 1 8 3 4 1B Accessory 02 03 10 14 B 1 4 B 3 8 04 B 1 2 1 4 1 B 1 2 20 2B Option IN-OUT reversal direction -T Element service indicator AFF75A to AFF220A AFF 75A 20 D Accessory (Option) Basic size (Applicable compressor rating) D Auto-drain G Pressure gauge F Companion flange L Anchor bolt 75A 75 kW 125A 110 to 125 kW 150A 150 kW 220A 180 to 220 kW Port size 20 2BJIS 10k flange 30
(Tolerance 30%) 5.3-39 Solid State Switch/Direct Mounting D-Y59 /D-Y69 /D-Y7P(V) A B A B Applicable Actuator Series Grommet Series Bore size (mm) MGQ, MVGQ, MGP CXS MY1B MY1C, MY1M, CY1R MY1H, ML2B MGF CY1H RSH 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 6, 10, 15, 20, 25, 32 25, 32, 40, 50, 63, 80, 100 25, 32, 40, 50, 63 25, 32, 40 40, 63, 100 10, 15, 20, 25, 32 20, 32, 50, 63, 80 Specifications
VER VEA 5 (R1) 4 (A) 1 (P) 2 (B) VY2 OFF state VBA VBAT F1 < F2 condition: See figure q. 2 (B) 3 (R2) AP100 4 (A) ON state Immediately after turning on F1 > F2: See figure e.
H Section AA TH (Head height of mounting bolt) +0.03 0 RL 10 10 T TB +0.03 0 R RH Detail of part U Q QL (n x 1) x Q B -Mounting reference planes D PR PR max18 B B PH PH Type of centralized piping on one side without switch rail Type of shock absorber (Only for MXY12) FH FW MA L LA M HR J JH F FL H HA MM MB Model M5 x 0.8 (Width across flats 2.5) MXY6 24 8.5 32 28 M3 x 0.5 18 0.5 60 20 3 12
Note 2) Excluding the auto switch weight 12-3-9 10 Series MHF2 Construction MHF2-8D, MHF2-8D1 q w u !0 !3 !1 !2 !8 !4 @0 @1 o r t !5 y !9 e !7 MHF2-8D2 i !6 Component Parts Note Note No. Description Material No. Description Material Aluminium alloy Hard anodized Urethane rubber q !1 Body Head damper Stainless steel Stainless steel wire w !
Double piston construction achieves compact design with strong gripping force. q r Mounting is possible from 4 directions. e w Model Bore size Gripping force (N) q w MHF2-8D MHZ2-10D 8 10 19 11 MHF2-12D MHZ2-20D 12 20 48 42 w e r MHF2-16D MHZ2-25D 16 25 90 65 MHF2-20D MHZ2-32D 20 32 141 158 12-3-3 4 Series MHF2 Model Selection Model Selection Selection Procedure Confirm gripping force Confirm
Connection thread R Applicable tubing Bracket mounting dimensions B S (Width across flats) Weight (g) O. D.
Connection thread R Applicable tubing Bracket mounting dimensions B S (Width across flats) Weight (g) O. D.
(IEC 60417-5032-1) How to see the serial number Q Z 001 December 2012 Q Z 001 Year Symbol Remarks Month Symbol Remarks Serial no. 2012 Q Repeated from A to Z in alphabetic al order 1 O Repeated from O to Z in alphabetical order, with O for January and Z for December 2013 R 2 P 2014 S 3 Q Fig. 1-1 Position of the product label HRSH Series 1.4 Product Label 1-3 HRX-OM-Q026 Chapter 1 Safety
Component Parts Description Sleeve Studded body Stem Material C3604 C3604 PP Note Electroless nickel plated Electroless nickel plated No. 1 2 3 Applicable tubing Applicable fitting size D q w e C M F D E B A 192 B M Series Made to Order Specifications Please contact SMC for detailed dimensions, specifications and lead times.
(2) Conversion formula from the flow gauge measurement value to the process data: (PD) = (Pr b) / a Pr: Flow measurement value and pressure set value PD: Flow measurement value (process data) a: Inclination b: Intercept [Inclination and intercept to the unit specification] Series Unit Flow range Inclination a Intercept b 1 L 0.00025 0 2 L 0.0005 0 5 L 0.00125 0 L/min 10 L 0.0025 0 25 L 0.00625
Terminal block 5 External sensor: Terminal B of resistance temperature detector 6 External sensor: Terminal B of resistance temperature detector 7 FG D A Pin No. Signal contents A short pin is installed between No. 1 and No. 2 pins to short-circuit it (Remote ON) when shipped.
How to Order 11 LEFS 100 B 1 1 S K 6N 16 w e r t u y o i !0 !1 !2 !
Male elbow: KRL Inch e l b a c i l p p A . D .
side Model Traveling parallelism [mm] (Every 300 mm) q C side traveling parallelism to A side w D side traveling parallelism to B side D side w q LEJl40 0.05 0.03 C side LEJl63 0.05 0.03 Note) Traveling parallelism does not include the mounting surface accuracy.
Reed switch Auto switch A90 Solid state M9B, M9N, F8B, F8N Size: 10, 20, 30, 50 11 Vacuum suction type Clean series 10 Size 20 30 50 11 MSQ B 10 A M9B 22 MSQ B 10 A M9B Number of auto switches A High precision type B Basic type Nil S n 2 pcs. 1 pc. n pcs.
Proper Mounting Position (Detection at Stroke End) and Mounting Height 32, 40, 50, 63 D-M9/D-M9W/D-A9 D-M9V/D-M9WV/D-A9V Hs B W A A A B (mm) D-A9V D-A9 D-M9 D-M9W D-M9V D-M9WV A B A B Bore size (mm) W Hs A B W A B Hs 32 40 50 63 12 [17] 9 1 12 [17] 9 29 8 [13] 5 3 (0.5) 8 [13] 5 27 16 11.5 1.5 16 11.5 32.5 12 7.5 5.5 (3) 12 7.5 30.5 14 <19> 14.5 4.5 14 <19> 14.5 42 10 <15> 10.5 8.5 (6)